SESHA 2011 Program Book - Semiconductor Safety Association

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Monday, 16 May Board of Directors 1:00-5:00 pm Sonora D PDC 1-Fundamentals and EHS Challenges of Semiconductor Manufacturing 8:00 am-5:00 pm Sonora A PDC 2-Vacuum and Cryogen Safety Concerns 8:00 am-Noon Sonora B PDC 3-Silane Safety 1:00-5:00 pm Sonora B PDC 4-Ethics and ESH 6:00-8:00 pm Sonora B Tuesday, 17 May Opening Ceremony and Awards Presentation - SESHA History Project, Liz Aton 8:00-9:30 am Sonora A/B/C Break 9:30-10:00 am Salons I/II/III Exhibits 9:30 am-7:00 pm Salons I/II/III SIA Regional Updates - SIA, ESIA, TSIA, CSIA, KSIA, JSIA 10:00-11:00 am Sonora A/B/C Keynote - Global Semiconductor Industry - Looking Forward, David Isaacs; SIA 11:00 am-Noon Sonora A/B/C Complimentary Exhibitor Sponsored Lunch Noon-1:45 pm Week Schedule Salons I/II/III Concurrent Sessions 1:45-3:15 pm Sonora A/B/C Break - Raffle Ticket Distribution 3:15-3:45 pm Salons I/II/III Concurrent Sessions 3:45-5:30 pm Sonora A/B/C Opening Reception - Raffle Ticket Drawing 5:15-7:00 pm Salons I/II/III Wednesday, 18 May Exhibitor Breakfast 7:30 am Salons I/II/III Keynote Presentation: IC Insights, Trevor Yancey 8:30-9:30 am Sonora A/B/C/D Exhibits 9:00 am-4:00 pm Salons I/II/III 2 Break - 2nd Raffle Ticket Distribution & Raffle Drawing 9:30-10:00 am Salons I/II/III Concurrent Sessions 10:00-11:30 am Sonora A/B/C/D Cash & Carry Lunch 11:30 am-1:00 pm Salons I/II/III Concurrent Sessions 1:00-3:15 pm Sonora A/B/C/D Break - Raffle Ticket Distribution & Raffle Drawing 3:15-3:45 pm Salons I/II/III Concurrent Sessions 3:45-5:30 pm Sonora A/B/C Thursday, 19 May 5K Race 6:30 am Meet in Lobby Fellows Breakfast 7:30-8:00 am Sonora D1 Region Chapter Leader Breakfast 7:30 am Salon 4 Keynote - Towards Harmonization of Measuring and Reporting Product Sustainability, Kevin Dooley 8:30-9:30 am Sonora A/B/C Break 9:30-10:00 am Sonora Foyer Concurrent Sessions 10:00-11:30 am Sonora A/B/C Lunch on your Own 11:30 am-1:00 pm X Concurrent Sessions 1:00-3:15 pm Sonora A/B/C Break 3:15-3:45 pm Sonora Foyer Closing Ceremony & Prize Drawing 3:45-5:00 pm Sonora A/B/C Board of Directors 5:00-6:00 pm Sonora D Friday, 20 May PDC 5-Fundamentals & EHS Challenges of PV Manufacturing 8:00 am-5:00 pm Salon I PDC 6-Exhaust Management, Point-of-Use Abatement Devices, Electronics Industry Greenhouse Gas Reporting Rule, and Process Emissions and POU Abatement Device DRE/ Emissions Testing Methodologies 8:00 am-5:00 pm Salon II
Professional Development Courses Monday 16 May - Friday 20 May Monday 16 May Full Day, 8:00 am – 5:00 pm PDC1 Fundamentals and ESH Challenges of Semiconductor Manufacturing - Sonora A Susan Creighton The 2011 Introduction to Semiconductor ESH class is intended for ESH students and professionals new to the semiconductor industry and operations. Topics covered in the class include: •An overview of the semiconductor industry and operations •A virtual tour of a semiconductor fab •An introduction to the semiconductor manufacturing process •A presentation on occupational health and safety issues in a semiconductor fab •A review of semiconductor environmental considerations •Discussions on SEMI EHS Standards: S2, S8 and S23 •A summary of global environmental regulations. An experienced semiconductor EHS professional recognized in their area of expertise presents each topic. This will be a full day PDC. Students will be provided with handouts of each presentation. 3 Half Day, 8:00 am - Noon PDC2 Vacuum and Cryogen Safety Concerns for Laboratory Applications - Sonora B Roger Shrouf Vacuum systems can present a variety of hazards to the laboratory worker. This course will provide an indepth discussion of a wide variety of hazards and mitigation techniques related to vacuum systems in a research laboratory environment. A thorough discussion of the interface between the vacuum system and commonly associated pressure sources (such as backfill or process gases) will be provided. The limitations and safety concerns associated with vacuum purging of associated pressure systems will be included. Potential accidental overpressure of the vacuum system will be emphasized as well as safety concerns for the use of brittle materials in vacuum applications. Course discussions will also include ancillary hazards commonly associated with vacuum applications such as vacuum pump issues, electrical safety hazards, and mechanical concerns. Many vacuum processes involve the use of cryogenic fluids – and nearly all cryogenic fluid applications involve the use of vacuum. Therefore, cryogenic fluid properties and hazards as well as mitigation techniques will be discussed. The primary focus of the cryogen safety segment of the course will be on liquid nitrogen and liquid helium applications. A wide variety of hazards will be discussed including the highlighted hazards of pressure build up from the warming of trapped cryogens and asphyxiation concerns. The features and safety concerns of cryogenic liquid Dewars will also be illustrated. Open discussion will be encouraged throughout the course and lessons learned from accident scenarios will be included where applicable. Half Day, 1:00 – 5:00 pm PDC3 Silane Safety - Sonora B Eugene Ngai Unpredictable, delayed ignition and explosive are words typically used to describe the behavior of silane. Since 2006 significant attention has been focused on silane safety because of the increasing number of incidents. One day safety seminars and training classes have been conducted around the world by leading experts. Despite these efforts, silane related incidents continue to occur worldwide. Attend this Professional Development Course and you will learn the latest on silane from leading experts. Agenda items include review of the history of silane, how it behaves, insurance/industry funded research projects and their importance of how silane systems can be designed to drastically reduce the number of incidents and/or their severity. A code overview and best practices for silane handling will also be presented. 1:00 – 1:15 Eugene Ngai: Welcome and Introductions 1:15 – 1:45 Eugene Ngai: Review of recent incidents 1:45– 2:30 John Cox and Beth Tshudy: Code Case Study 2:30 – 3:00 Crystal Mjelde: Bulk Installations 3:00 – 3:15 Break 3:15 – 3:45 Sue Creighton: Abatement 3:45 – 4:15 Eugene Ngai: Testing and G13 4:15 – 4:50 Vinnie DeGiorgio: Best Practices 4:50 – 5:00 Closing remarks Evening, 6:00 – 8:00 pm PDC4 Nanoethics: Safety, Risk, and Responsible Innovation - Sonora B Sarah Davies This session offers an introduction to contemporary thinking on nanoethics, applying this to the context of the industrial laboratory and opening up a discussion of what constitutes ethical practice in scientific research and development. Throughout, the emphasis will be on the critical skills and tools needed to engage in informal ethical reflection in the workplace. After giving a
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SESHA 2011 Program Book - Semiconductor Safety Association

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