SESHA 2011 Program Book - Semiconductor Safety Association

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abatement; firstly, decomposition efficiency is difficult to be verified, secondly, huge area is needed to install enormous POU type scrubbers. To solve these obstacles, Korean LCD industry has started to develop a massive-scale decomposition facility by itself since 2005. However, the technology development was quite risky, because of 3 reasons as bellows; 1) Static pressure in dry etchers should be secured. 2) Various acidic and corrosive substances from dry etching processes should be treated before SF6 gas decomposing unit. 3) In SF6 gas decomposing unit, SF6 gas should be destructed more than 90% steadily. 4) HF and other by-products, which comes from SF6 gas decomposing, should be treated after SF6 gas decomposing unit. In order to hedge these risks, Korean LCD industry utilized CDM projects, for hiring enhanced technology and funding investment. As a result of various actions, new CDM methodology approved as AM0078 by UNFCCC in February 2009, the massive-scale decomposition facilities were developed and installed in 2009, and finally SF6 decomposition in LCD industry CDM projects were registered in UNFCCC. The developed facilities are able to decompose more than 90% of SF6 gas steadily and the capacity is 40 times larger than conventional abatement facility. 10:45 am Photovoltaic Industry-An Overview of EHS Considerations-from Manufacturing to Feeding the Utility Grid Cyrs, W, Krause, K, McIntyre, A*; Environmental & Occupational Risk Management, Inc. (EORM) Gallium arsenide (Ga-As) thin film photovoltaic (PV) cells have shown promise for large-scale commercial production, with conversion efficiencies reaching as high as 40.7% using concentrators. Objective: The purpose of this study is to present an analysis of the human health risks throughout the life cycle of a Ga-As thin film PV cell. Methods: A comprehensive analysis of the literature was performed, with critical points of human health risk identified throughout the lifecycle of Ga-As thin film 1:45 pm Sustainable Energy Solutions Through PV cells. In addition, process information for the obtainment Product Life Cycle Management of raw materials, manufacture of PV cells, module Sinha, P (Ricky); First Solar assembly, installation, and commercial deployment were At least 89% of the emissions associated with electricity analyzed in order to further refine the risk characterization generation could be prevented if electricity from by describing exposure potential to hazardous substances. photovoltaics (PV) displaces electricity from the grid. Where data was unavailable for Ga-As-based PV cells, (Fthenakis, et al., 2008). The development and implementation available information from other thin film PV cell types of such renewable energy technologies are critical was applied. Results: The manufacture of PV cells is a key to helping achieve a low-carbon economy. However, to point of risk during the life cycle of Ga-As thin film PV ensure the long-term sustainability of the solar industry, cells, due to the use of process chemicals such as highly it is critical that environmental impacts be addressed at toxic metal hydride gases (e.g., arsine) and pyrophoric all stages of the product’s life cycle – from raw material metal-organics (e.g., trimethyl indium) as feedstock mate- sourcing, manufacturing, installation, operation and 16 rials. On the other hand, the incorporation of PV cells into modules provides little opportunity for exposure; thus risk becomes minimal. In this study, measures used to control exposure to potentially hazardous materials are discussed, with a focus on engineering controls. Conclusions: From this assessment, it is clear that although unique occupational hazards exist for the different life stages of Ga-As thin film PV cells, experience from the development of other PV cell types, as well as a precautionary approach, are being used to minimize the associated risks. The results of this study provide data necessary for regulatory compliance with a number of international regulations such as REACH and companion product safety requirements. 11:30 am Cash & Carry Lunch, Exhibit Hall 1:00 pm How to Improve the LED ESH Issues and GHG Emission Reduction in Taiwan Cheng, J-H, Lu, J, Peng, Y-C; ITRI LED light bulbs are also part of the solution to the energy crisis we are facing. LED light bulbs use less power up front and generate less heat. Replacing all of lighting with LED lighting will suddenly reduce electrical usage and also reduce CO2 emissions from power plants. Because LED lights are very efficient when compared to other lighting products. It is a good choice for energy saving and reducing climate change. It is why this industry grows up quickly in the past decade in the world. LED manufacture is similar to the semiconductor industry; they use a lot of chemical and energy. LED Fab emitting air pollutant, producing waste, make waste water and toxic substance etc. These pollutants and GHG emission is different from semiconductor industry. Taiwan LED industry association is the only LED industry organization in the world. This association set a ESH committee and supported by ITRI. This article will show that the information of GHG emission and how to improve the ESH issues in LED industry.
end-of-life disposal and recycling. This presentation will provide insight and lessons learned from First Solar’s life cycle management approach and it’s leading-edge efforts to implement a comprehensive environmental plan. Given the significant growth of the CdTe PV technology and its rapid deployment in the field it is critical that environmental impact data continue to be collected, analyzed, made public, and updated. In this presentation First Solar will provide an overview of its experiences and best practices in developing large-scale PV projects, including detailing the benefits and impacts of utility-scale PV projects on a life cycle basis. By the end of 2010, a total of more than 30GW of PV capacity will have been installed worldwide, and what happens to these products at the end of their useful life needs to be addressed. With a commitment to extended producer responsibility, First Solar, a leading manufacturer and developer of large scale projects, has implemented a comprehensive pre-funded module collection and recycling program. This presentation will provide details on how the overall program is designed to be convenient, unconditional, and free. First Solar will also share updated information on the recycling technology it has developed and implemented on a commercial scale ensuring that substantially all module components (by mass) are recovered for reuse in new solar modules or new glass products. By offering a collection and recycling program, the largest CdTe PV manufacturer is proving today that it is possible to manage waste concerns for the future while creating truly sustainable energy solutions today. 2:30 pm GHG Reporting for the Electronics Industry - Determination of Reporting Applicability Cotter, D; Capaccio Environmental Engineering, Inc. Mr. Cotter will present a review of the U.S. EPA’s recently promulgated greenhouse gas (GHG) reporting rule for the electronics manufacturing industry (40 CFR Part 98, Subpart I). The presentation will include a review of the rule’s applicability criteria and how to use the equations in the regulation to determine applicability. The presentation will also discuss the rule’s requirements for monitoring, reporting, and record keeping, including the requirement to develop a written GHG monitoring plan by April 1, <strong>2011</strong>. 3:15 pm Break & Raffle Drawing, Exhibit Hall 17 3:45-5:15 pm Disaster Preparedness Roundtable Sonora C 3:45 pm Losses in the <strong>Semiconductor</strong> Industry – Case Studies and Lessons Learned Acorn , W; Acorn Consulting Services, LLC The author will discuss several large losses incurred by semiconductor and similar advanced manufacturing clients that resulted not only in business interruption, but significant out-of-pocket expenses. Case studies will address: 1. Fire in wafer fab – catastrophic losses, business interruption, lengthy litigation 2. Fire in flat panel display manufacturing facility - catastrophic losses, business interruption, lengthy litigation 3. Chemical leak in wafer fab - catastrophic losses, business interruption, lengthy litigation 4. Alleged unsafe environments in wafer fabs result in employee claims and protracted lawsuits The author will address the impact of these cases not only from business interruption, but distraction of the owners’ employees from more productive endeavors. 10:00 am-3:15 pm Abatement Strategies Sonora D 10:00 am Point-of-Use Ammonium Compounds Removal - Keeping Exhaust Emission Clear Tsou, A, Chen, C-H, Hsiao, H-C; United Microelectronic Corp. (Singapore Branch), Singapore Hsuan-Chien Hsiao is with the United Microelectronic Corp. (Singapore Branch), No. 03, Pasir Ris Dr 12, Singapore (Paul_Hsiao@umc.com) Chi-Hua Chen is with the United Microelectronic Corp. (Singapore Branch), No. 03, Pasir Ris Dr 12, Singapore Po-Wen Wu is with the United Microelectronic Corp., No. 3, Li-Hsin 2nd Road, Hsinchu Science Park, Hsinchu, Taiwan 300, R.O.C. H-R Lai is with the United Microelectronic Corp., No. 3, Li-Hsin 2nd Road, Hsinchu Science Park, Hsinchu, Taiwan 300, R.O.C. Abstract – Many wafer fabs face the challenge of managing effluent generated from compound semiconductor process-specific and that includes ensuring Point-of-use (POU) abatement devices meets the required or desired performance. For POU abatement systems, we usually focus on the main electric/fuel oxidation abatement mechanism but not on wet scrubbing section. It was found that poor abatement efficiencies of wet scrubbing could lead to environmental issues such as generation of fine particle at the stack and corrosion of exhaust duct.
Page 1 and 2: SESHA & SIA PRESENT THE 33rd ANNUAL
Page 3 and 4: SESHA 33rd Annual International Hig
Page 5 and 6: Professional Development Courses Mo
Page 7 and 8: will be highlighted. Point-of-Use (
Page 9 and 10: Tuesday 8:00-9:30 am Opening Ceremo
Page 11 and 12: sponsored by IBM found that contact
Page 13 and 14: product is 12-inches wafer, and it
Page 15 and 16: 10:00-11:30 am CSR Sonora B 10:00 a
Page 17: 3:15 pm Break & Raffle Drawing, Exh
Page 21 and 22: abatement device effluents. This st
Page 23 and 24: 10:00 am-3:15 pm Risk Management So
Page 25 and 26: stakeholder events and solicits inp
Page 27 and 28: William R. Acorn, PE, FASHRAE Willi
Page 29 and 30: Lisy. His research involved impleme
Page 31 and 32: health and safety programs in both
Page 33 and 34: a BA cum laude in Philosophy and An
Page 35 and 36: Exhibitors Don’t Miss these Exhib
Page 37 and 38: up with new technologies and never

SESHA 2011 Program Book - Semiconductor Safety Association

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