SESHA 2011 Program Book - Semiconductor Safety Association

abatement device effluents. This study directly compares
an alternative approach using Fourier transform infrared
(FTIR) spectroscopy to the required QMS method.
Since the EPA Protocol also requires usage of FTIR for
emissions characterization, its use for flow determination
will provide significant cost savings. A study was
performed by URS Corporation in conjunction with International
SEMATECH Manufacturing Initiative and
Sherer Consulting Services where three POU abatement
systems were tested during normal operation. Two of
the POU abatement systems were fuel-based thermal
oxidation/wet scrubbing systems (burn/wet) and one
POU abatement system was an electric heat oxidation/
wet scrubbing system (electric heat/wet). Determination
of TVF by QMS was performed in strict accordance
to EPA Protocol and the FTIR determination of TVF
strictly followed the pertinent sections of the 2009 ISMI
Guideline for Environmental Characterization of Semiconductor
Process Equipment – Revision 2 (2009 ISMI
Guideline).
Thursday
8:30-9:30 am
Keynote
Sonora A/B/C
8:30 am Towards Harmonization of Measuring
and Reporting Product Sustainability
Dooley, Kevin; ASU
9:30 am Break, Sonora Foyer
10:00-11:30 am
CSR
Sonora A
10:00 am Leveraging Existing Semi Guidelines
to Drive Leading-Edge Supplier Environmental,
Health, Safety and Sustainability Programs
Firu, D, McIntyre, A, Sternberg, R; TSMC, EORM
By utilizing existing SEMI environmental and
safety standards, EHS professionals can work with
their sustainability and corporate social responsibility
counterparts to add scientific basis and depth to corporate
supplier responsibility programs. Implications are
that newer industries, such as Photovoltaic (PV) manufacturing,
can leapfrog the amount of time it took the
semiconductor industry to establish industry standards
for manufacturing equipment and labor suppliers. Additionally,
EHS professionals in all industries can bring
significant value to their companies’ sustainability programs
and drive cost and risk reduction in the business.
Example approaches will focus on the PV industry but
will be broadly applicable to any emerging process intensive
market area. Speakers: Speakers will include
EORM’s Andy McIntyre, CIH and Managing Principal
and Rebecca Sternberg, Sustainability Practice Lead.
10:45 am Building Information Modeling: A Process
to Mitigate Risk, Improve Project Delivery, and
Integrate Sustainability into Semiconductor Facilities
Chasey, A; Arizona State University
Building Information Modeling (BIM) is an approach
gaining traction in the architect, engineer and
construction (AEC) industry. BIM combines the ability
to construct a virtual model with all aspects of a facility,
from design (space planning) to construction (cost and
scheduling) to operations and maintenance (planning
and asset management). BIM is also a process as well as
a project. Even though the technology for implementation
of BIM will change, and probably change rapidly,
the process and underlying concepts will likely change
very little. BIM directly relates to a project team’s ability
for Visualization, Understanding, Communication,
and Collaboration: Visualization to “see” the project,
Understanding to know the project elements, Communications
to ensure the understanding, and Collaboration
to receive all the necessary input at the proper time. BIM
requires openness amongst the team players for sharing
information supporting the goals of the project. Building
Information Modeling (BIM) has become a valuable
tool in many sectors of the capital facilities industry. The
fundamental characteristic of BIM is its development
through an information feedback loop. The development
of the visual model and the relevant project information
is iterative in nature as different project team members
develop the project. During the course of a project, the
information gradually increases in scope, depth, and relationship
to the project. This presentation will focus on
the benefits of BIM and how this process can be used
to mitigate risk and improve project delivery for both
new facilities and upgrades, introduce sustainability efforts
and determine impacts during both construction
and operations. The reduction of risk and value-added
sustainability comes through improved understanding,
coordination, and material use in the management of the
project as well as reduced conflicts, waste, and cost. We
will introduce the concept of Intelligent Tool Models
and Intelligent Fab Models.
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