SESHA 2011 Program Book - Semiconductor Safety Association

stakeholder events and solicits input from stakeholders
for continuous improvement of the Code of Conduct.
The Code of Conduct provides guidance in five critical
areas of CSR performance: • Labor • Health and Safety
• Environment • Management System • Ethics
11:30 am Lunch on your Own
1:00-3:15 pm
GHG
Sonora C
1:00 pm PCS PIRANHA Plasma Abatement System:
Update of Evaluation on 300mm Etch Process
Kopatzki, E, Guerin, J; CS Clean Systems
Introduction by the EPA in mid 2010 of Reporting
rules on greenhouse gases has led to a heightened level
of interest in PFC reduction within the semiconductor
and related industries. In view of the limited number of
practical options available to the typical semiconductor
manufacturing facility for the curtailment of CO2 equivalent
emissions, PFC abatement offers a convenient
route to more environmentally-friendly manufacturing
as well as compliance with present and future EPA policies.
The PCS PIRANHA plasma conversion system
uses a 2kW or 3kW microwave plasma to decompose
PFC gases into reactive fluorine/ fluoride species which
are readily removed by a downstream scrubber. The unit
is fitted inline within the vacuum foreline between the
etch chamber exhaust and dry roughing pump. A 2.45
GHz microwave is generated by a magnetron and conducted
into the exhaust gas stream. This setup ensures
that the full microwave power is focussed on the PFC
gases prior to dilution by the N2 ballast of the dry pump,
allowing very high PFC destruction efficiencies to be
achieved. This presentation will discuss the results of
current testing carried out using a 3kW pre-pump microwave
plasma device. The evaluation is being carried out
in conjunction with a vendor of Etch tools using stateof-the
art 300 mm recipes over a wide range of PFC gas
flows and foreline pressure regimes.
1:45 pm Guideline for GHG Emission Measurement
and Management
Kagino, M; Toshiba, Tokyo Japan
JEITA thinks that we need grasp of the amount of
emission of F-GHG in order to advance a battle against
global warming, and the technique of the suitable and efficient
amount grasp of F-GHG emission contributes to
progress of the battle. The IPCC 2006 guideline requests
that the performance is measured and checked under a
use situation as the conditions which can use a default
value at the abatement efficiency of F-GHG abatement
equipment. JEITA had already exhibited the guideline
for measurement. Since JEITA revised this extensively
this time, I will introduce this. This guideline provides
the efficient measuring method and the management
method such as time and frequency of the efficient measurement
to users of the equipment which use F-GHG.
And it will assist users to grasp exactly the amount of
emission of F-GHG which oneself has discharged, and
to make plan for reduction based on these results, and to
carry out.
2:30 pm Global Warming Evaluation of Chamber
Cleaning Gases by New Indicators, CEWN and
CETN
Sekiya, A, Okamoto, S; National Institute of Advanced
Industrial Science and Technology (AIST), Japan
Dealing with the global warming is still big issue
because the Earth temperature has been rising. Semiconductor
and liquid crystal industries have been used longlived
fully fluorinated compounds that have high global
warming effects. The long-term evaluation of global
warming caused by the use of these gases has to be paid
much more attentions. On the other hand, evaluation
metric is quite important to get scientifically reliable
results. In this paper, using LCCP (Life Cycle Climate
Performance) data of our previous work, CVD chamber
cleaning gases are evaluated by new global warming indicators,
CEWN1) (Carbon Dioxide Equivalent Warming
Number), CETN2) -(Carbon Dioxide Equivalent
Temperature Change Number), and s-CETN2) (square-
Carbon Dioxide Equivalent Temperature Change Number
). CEWN evaluates based on radiative forcing as
GWP3). CETN and s-CETN are based on the global
surface temperature rise by Shine’s equation4). CEWN
and CETN compare GHGs by unifying the removal rate
of each gas from the atmosphere, while s-CETN unifies
the ratio to the total amount of the global warming of
each gas. They provide fair index of global warming to
each GHG. LCCP data is analyzed using GWP, CEWN,
CETN, and s-CETN and compared. Results show that
CEWN, CETN, and s-CETN are as easy-to-use as GWP.
Further, the relation of CEWN, CETN, s-CETN values
with the climate impact is clearer than that of GWP
values. According to those new indicators, the order of
global warming is C2F6 > C3F8 > NF3>> COF2. In
the case where 16% 5) of NF3 production releases into
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