SESHA 2011 Program Book - Semiconductor Safety Association

Professional Development Courses
Monday 16 May - Friday 20 May
Monday 16 May
Full Day, 8:00 am – 5:00 pm
PDC1 Fundamentals and ESH Challenges of
Semiconductor Manufacturing - Sonora A
Susan Creighton
The 2011 Introduction to Semiconductor ESH
class is intended for ESH students and professionals
new to the semiconductor industry and operations. Topics
covered in the class include: •An overview of the
semiconductor industry and operations •A virtual tour
of a semiconductor fab •An introduction to the semiconductor
manufacturing process •A presentation on occupational
health and safety issues in a semiconductor
fab •A review of semiconductor environmental considerations
•Discussions on SEMI EHS Standards: S2, S8
and S23 •A summary of global environmental regulations.
An experienced semiconductor EHS professional
recognized in their area of expertise presents each topic.
This will be a full day PDC. Students will be provided
with handouts of each presentation.
3
Half Day, 8:00 am - Noon
PDC2 Vacuum and Cryogen Safety Concerns
for Laboratory Applications - Sonora B
Roger Shrouf
Vacuum systems can present a variety of hazards
to the laboratory worker. This course will provide an indepth
discussion of a wide variety of hazards and mitigation
techniques related to vacuum systems in a research
laboratory environment. A thorough discussion of the
interface between the vacuum system and commonly
associated pressure sources (such as backfill or process
gases) will be provided. The limitations and safety
concerns associated with vacuum purging of associated
pressure systems will be included. Potential accidental
overpressure of the vacuum system will be emphasized
as well as safety concerns for the use of brittle materials
in vacuum applications. Course discussions will also include
ancillary hazards commonly associated with vacuum
applications such as vacuum pump issues, electrical
safety hazards, and mechanical concerns. Many vacuum
processes involve the use of cryogenic fluids – and
nearly all cryogenic fluid applications involve the use of
vacuum. Therefore, cryogenic fluid properties and hazards
as well as mitigation techniques will be discussed.
The primary focus of the cryogen safety segment of the
course will be on liquid nitrogen and liquid helium applications.
A wide variety of hazards will be discussed
including the highlighted hazards of pressure build up
from the warming of trapped cryogens and asphyxiation
concerns. The features and safety concerns of cryogenic
liquid Dewars will also be illustrated. Open discussion
will be encouraged throughout the course and lessons
learned from accident scenarios will be included where
applicable.
Half Day, 1:00 – 5:00 pm
PDC3 Silane Safety - Sonora B
Eugene Ngai
Unpredictable, delayed ignition and explosive are
words typically used to describe the behavior of silane.
Since 2006 significant attention has been focused on
silane safety because of the increasing number of incidents.
One day safety seminars and training classes have
been conducted around the world by leading experts.
Despite these efforts, silane related incidents continue to
occur worldwide. Attend this Professional Development
Course and you will learn the latest on silane from leading
experts. Agenda items include review of the history
of silane, how it behaves, insurance/industry funded research
projects and their importance of how silane systems
can be designed to drastically reduce the number
of incidents and/or their severity. A code overview and
best practices for silane handling will also be presented.
1:00 – 1:15 Eugene Ngai: Welcome and Introductions
1:15 – 1:45 Eugene Ngai: Review of recent incidents
1:45– 2:30 John Cox and Beth Tshudy: Code Case Study
2:30 – 3:00 Crystal Mjelde: Bulk Installations
3:00 – 3:15 Break
3:15 – 3:45 Sue Creighton: Abatement
3:45 – 4:15 Eugene Ngai: Testing and G13
4:15 – 4:50 Vinnie DeGiorgio: Best Practices
4:50 – 5:00 Closing remarks
Evening, 6:00 – 8:00 pm
PDC4 Nanoethics: Safety, Risk, and Responsible
Innovation - Sonora B
Sarah Davies
This session offers an introduction to contemporary
thinking on nanoethics, applying this to the context
of the industrial laboratory and opening up a discussion
of what constitutes ethical practice in scientific research
and development. Throughout, the emphasis will be on
the critical skills and tools needed to engage in informal
ethical reflection in the workplace. After giving a