ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
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<strong>ALD</strong> <strong>at</strong> <strong>University</strong> <strong>of</strong> <strong>Minnesota</strong><br />
Hardware changes<br />
D spacers in tall ring<br />
D spacers are solid Al<br />
NanoFabric<strong>at</strong>ion <strong>Center</strong>
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