ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
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<strong>ALD</strong> <strong>at</strong> <strong>University</strong> <strong>of</strong> <strong>Minnesota</strong><br />
Hardware changes<br />
Replacement lids were made, all out <strong>of</strong> Al except<br />
one out <strong>of</strong> stainless steal.<br />
Have installed O2 gas and H2O2 on the H2O line<br />
<strong>for</strong> short term to do testing.<br />
NanoFabric<strong>at</strong>ion <strong>Center</strong>
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