ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
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<strong>ALD</strong> <strong>at</strong> <strong>University</strong> <strong>of</strong> <strong>Minnesota</strong><br />
Shift in VFB<br />
Capacitance (F)<br />
1x10 -9<br />
800x10 -12<br />
600x10 -12<br />
400x10 -12<br />
200x10 -12<br />
Bare - 200 kHz<br />
H-Passiv<strong>at</strong>ed - 200 kHz<br />
F-Passiv<strong>at</strong>ed - 200 kHz<br />
HF-Passiv<strong>at</strong>ed - 200 kHz<br />
0<br />
-3 -2 -1 0 1 2<br />
Voltage (V)<br />
NanoFabric<strong>at</strong>ion <strong>Center</strong>
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