ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
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<strong>ALD</strong> <strong>at</strong> <strong>University</strong> <strong>of</strong> <strong>Minnesota</strong><br />
Solar panel co<strong>at</strong>ing Brookings, SD<br />
Process examples:<br />
Thin film deposits – 20 to 40 Ang and some are working to do 10 Ang<br />
Micro bolometers define Si p<strong>at</strong>tern and also use <strong>ALD</strong> film as support<br />
Only a 200 -300 Ang film <strong>for</strong> Si etch masking and support structure too.<br />
Bio comp<strong>at</strong>ibility layers done by several groups.<br />
Nano particle co<strong>at</strong>ing<br />
Normal insulting layers<br />
NanoFabric<strong>at</strong>ion <strong>Center</strong>
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