ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
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<strong>ALD</strong> <strong>at</strong> <strong>University</strong> <strong>of</strong> <strong>Minnesota</strong><br />
Hardware changes<br />
Extra space in top<br />
lid by having it<br />
slightly taller, 7 mm.<br />
With the normal 5 mm<br />
total height <strong>of</strong> sample<br />
is 12 mm.<br />
NanoFabric<strong>at</strong>ion <strong>Center</strong>
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