ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
ALD at University of Minnesota - Center for Nanoscale Systems
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<strong>ALD</strong> <strong>at</strong> <strong>University</strong> <strong>of</strong> <strong>Minnesota</strong><br />
Process examples:<br />
DRIE masking using Al2O3 works gre<strong>at</strong>, process sequence:<br />
<strong>ALD</strong> deposit – Photo – Dry etch p<strong>at</strong>tern using BCl3 – DRIE step.<br />
NanoFabric<strong>at</strong>ion <strong>Center</strong>
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