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includes tools for advanced material and device characterization and is complemented by other
transversal facilities like the Post-Processing Lab, the Chemical Lab, the Advanced Engineering Labs or
the Super Resolution Light Nanoscopy and Microscopy Facility at ICFO. Available techniques at the NPL
include:
Optical lithography
Electron-beam lithography (2 systems, one of them with interferometric stage for large-field
stitching)
Focused Ion Beam
Atomic Layer Deposition
Inductively and Capacitively-coupled Plasma etching
Sputtering
Thermal and electron-beam evaporation. Ion-beam densification available as an option
Scanning electron microscopy. Energy-dispersive X-ray Spectroscopy (EDX) available as an
option
Spectroscopic ellipsometry
Atomic force microscopy
Main related relevant activities / projects
ICFO has been involved in a range of projects funded by the European Union such as SCALA, QAP,
QUROPE, PLASMOCOM, ASPRINT, BIO-LIGHT_TOUCH, FASTDOT, MIRSURG, SPEDOC,
NANOVISTA, NANOMATCELL, etc. We have been partners in European networks like QGates, EMALI,
COCOS, PHOREMOST, PLASMO-NANO-DEVICES and projects supported by the European Space
Agency. ICFO currently belongs to the European Networks of Excellence Photonics 4 Life Europe and
Nanophotonics for Energy Efficiency, to the Integrated Infrastructure Initiative Laserlab Europe, to the
European Nanophotonics Association, and to the Biophotonics4Life World Consortium. Today, ICFO
hosts 11 ICREA Research professors, 8 European Research Council awardees and 5 Fundacio Cellex
Barcelona Nest Fellows. ICFO researchers are recipients of many international high-profile science
awards.
Other information
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