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measurements minimizing time.
Currently, UNIMETRIK is involved in two working areas within the nanotechnology. On one hand, it is
developing new contact probes for nanometrology quality control and micromanipulation. On the other
hand, it is pushing the research of new artifacts to allow the calibration of machines and research set up
in the nanoscale range.
UNIMETRIK R&D activities are mainly developed in the NMP area, involving the following fields:
Nano-probing technologies for highly accessible, ultra-precision, 3D isotropic dimensional
characterisation of micro-part
3D nano-calibration artefacts and rapid Nano-CMM verification processes.
Calibration techniques for virtual metrology
3D auto-compensation and auto-calibration algorithms.
Micro-manipulation instrumentation for micro-probe assembly.
Main related relevant activities/projects
UNIMETRIK has lead and participated in several R&D projects:
1. NanoCMM (FP6-NMP 2006-2011): The main objective was to develop a universal Coordinate
Measurement Machine that could be able to measure most of 3D geometries at micro and nano scale,
including inside holes, steeps and behind obstacles. Nano-CMM instrumentation achieved control of 3D
features in micro-part production with accuracies from 20-200 nm in large measurement volumes
(100x100x50 cm). UNIMETRIK led this Integrated Project.
2. SCALAB (EC- MNT 2010-2012): SCALAB project aims at development of scalable solutions for
3D micro-assembly automation of complex products in photonics with highest demands on accuracy. The
solution supports the development and optimization of automated manipulation, assembly and inspection
processes during prototype production as well as the easy transfer and scaling up for series production.
3. NANOSOST (MCI 2008-2010): Development of metrology equipment for the characterization of
nano-particles in nano-manufacturing processes for health and safety considerations.
1. OPTICALSTRUCT (EC MNT 2008-2010): aims at the development of high aspect ratio microstructure
for diffractive optics applications through high-precision micro-machining processes.
Development of tactile probes and 3D calibration which can verify the micro-machining tool status and
the dimensional features of the micro-structures in 3D to demonstrate the viability of the manufacturing
process.
Other information
Innovalia Metrology (www.innovalia-metrology.com/en) is a strategic alliance between UNIMETRIK,
TRIMEK and DATAPIXEL – three Innovalia Group companies that have joined forces to offer our
customers with best-in-class metrology solutions. Innovalia Metrology offers solutions that integrate
traditional metrology with the latest technological developments, from laboratories to production lines.
Innovalia Metrology systems and solutions are designed to provide our customers with a guarantee of
measurement accuracy for parts and components that are vital to the manufacturing process, and to
enable the achievement of higher levels of productivity and efficiency in production processes.
Unimetrik is an ENAC-accredited laboratory that provides calibration, advanced measurement and
metrology engineering services and solutions to industry.
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