5-6. Diffusion & Ion Implantation

4.8 Junction-Depth and Impurity profile Measurement
- After grooving operation, the junction is delineated using a chemical etchant
which stains the pn junction. Concentrated hydrofluoric acid with 0.1~0.5% nitric
acid can be used as a stain. The distances a and b are measured through a
microscope, and the x j is calculated using Eq(4.20).
Figure 4.20
Junction-depth measurement by the
groove-and-stain technique. The
distance a and b are measured through
a microscope, and the junction depth is
calculated using Eq.(4.20).
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