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-<br />
0.5 mm<br />
Start<br />
0.5 mm<br />
0.5 mm<br />
<strong>Laser</strong> beam size<br />
1 mm<br />
2-inch wafer<br />
1 mm<br />
End<br />
: Overlap for neighboring laser pulse<br />
39<br />
-<br />
(overlap)<br />
y 軸 移 動 0.3 mm 打 一 發<br />
0.3 mm<br />
Sample<br />
X 軸 移 動 0.3 mm 打 一 發<br />
<strong>Laser</strong> beam size<br />
1 mm<br />
1 mm<br />
雷 射 移 動 的 方 向<br />
40<br />
17
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