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Laser Lift-off Process

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Room-temperature dc I –V characteristics for a typical 250mm<br />

3250mm InxGa12xN SQW LED on Si<br />

Photograph of a functioning InxGa12xN SQW blue LED on Si.<br />

The LED shows no dark-line features due to microcracking from either the<br />

LLO process or the thermal expansion coefficient mismatch between GaN<br />

and Si.<br />

85<br />

Schematic diagram of the nano-roughed LED structure<br />

86<br />

35

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