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Patterned LLO technology<br />
[Patent: I287309(ROC)]<br />
<strong>Laser</strong> Beam<br />
Mask<br />
Patterned<br />
<strong>Laser</strong> Beam<br />
300×300, 230×230 1000×1000<br />
S. J. Wang et al., Appl. Phys. Letts, vol. 87, 2005<br />
360×360, 90 ×90 unit: μm 2<br />
S. L. Chen et al., IEEE Photon. Technol. Lett, vol. 19,<br />
41<br />
2007<br />
unit: μm 2<br />
Die size: 300 × 300 μm 2<br />
Die size: 1000 × 1000 μm 2<br />
42<br />
18
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