+ R - Center for Nanoscale Systems - Harvard University
+ R - Center for Nanoscale Systems - Harvard University
+ R - Center for Nanoscale Systems - Harvard University
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Outline• Overview of Metrology– Introduction to Metrology– Metrology <strong>for</strong> Process Control• Key Metrology Techniques <strong>for</strong> Nanofabrication at CNS– Optical Microscopy– Ellipsometry– Profilometry– Atomic Force Microscopy (AFM/SPM)– Thin Film Characterization Part-1• Electrical Property Measurements at CNS– Electronic Conduction Overview– Van der Pauw Resistivity and Hall Measurements– Thin Film Characterization Part-2– Device Testing• Q/A
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