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2024<br />

PROCEEDINGS<br />

ITSC 2024<br />

International Thermal Spray<br />

Conference and Exhibition<br />

Conference Proceedings<br />

and Poster Sessions


www.aerohvaf.com<br />

HVAF for Landing Gear<br />

System applications<br />

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ITSC 2024<br />

International Thermal Spray<br />

Conference and Exhibition<br />

Conference Proceedings<br />

and Poster Sessions<br />

of the Conference in Milan/Italy on<br />

April 29 – May 1, 2024<br />

Organizers:<br />

• <strong>DVS</strong> – German Welding Society<br />

• ASM International – Thermal Spray Society (TSS)<br />

• <strong>DVS</strong> Media GmbH<br />

Supporting Partners<br />

Media Sponsors


Bibliographic information published by the Deutsche Nationalbibliothek<br />

The Deutsche Nationalbibliothek (German National Library) lists this publication in the<br />

Deutsche Nationalbibliografie; detailed bibliographic data are available on the Internet at<br />

http://dnb.d-nb.de.<br />

<strong>DVS</strong>-<strong>Bericht</strong>e Volume 393<br />

ISBN 978-3-96144-263-8 (Print)<br />

ISBN 978-3-96144-264-5 (E-Book)<br />

ISBN 978-3-96144-265-2 (USB Flash Drive)<br />

The conference abstracts are printed in form of manuscripts.<br />

All rights, also for translation, are reserved. Reprint and fotomechanical reproduction (i. e. photo<br />

copy, micro copy etc.) of this volume or of parts of it only with approval of <strong>DVS</strong> Media GmbH,<br />

Düsseldorf.<br />

© <strong>DVS</strong> Media GmbH, Düsseldorf ⋅ 2024<br />

Print: Print Media Group GmbH & Co. KG, Hamm


Preface<br />

ITSC 2024: ADVANCING THERMAL SPRAY TECHNOLOGY – Innovations,<br />

Applications and Sustainability<br />

Many economies are facing fundamental structural challenges. In addition to the transformation of<br />

manufacturing processes, the energy transition and other location factors, the geopolitical turning point<br />

should also be mentioned. This has led to higher energy- and raw material prices, among other things. The<br />

direct consequences for companies are diversified supply chains, investments in renewable energies and a<br />

transformation of manufacturing processes. Cost and production optimization are the main drivers here.<br />

These requirements are also clearly noticeable in the field of thermal spraying.<br />

The ITSC 2024 - International Thermal Spray Conference and Exhibition will once again summarize these<br />

latest global developments and will offer solutions for current or future applications. For more than 20 years,<br />

ITSC has established itself as the world‘s leading event for users, service providers and manufacturers.<br />

What ITSC offers is as fascinating as the technology itself. Parallel to the ITSC conference – various event<br />

formats will be presented to inspire visitors from all sectors for the fascinating thermal spray, but also for<br />

plasma and laser based cladding technologies. These technologies have also become more and more<br />

interesting for surfacing solutions. Cladding also fulfills many requirement specifications in an excellent way.<br />

Functional layer systems with electrically conductive and electrically insulating properties as well as layer<br />

systems with catalytic properties are becoming increasingly important as a result of new applications. ITSC<br />

2024 provides an overview of these coating systems, which are not least driven by the energy and mobility<br />

transition. ITSC 2024 will also feature the latest improvements in the field of additive manufacturing (AM).<br />

For that, thermal spray, as well as cladding technologies, offer a magnificent technological basis for new AM<br />

applications.<br />

One other highlight of the technical program will be again the Session “Young Professionals”. ITSC 2024 is<br />

supporting young talents becoming part of the worldwide thermal spray family. On the first day, the Young<br />

Professional Session will take place, in which the up-and-coming talents will present their content to the<br />

audience in short, snappy talks. The audience will decide live on site who will win the coveted Young<br />

Professional Award!<br />

To offer newcomers and interested end users an introduction in thermal spray technology, the session<br />

“Thermal Spray in a Nutshell” will fulfill all expectations for the second time. The lectures are prepared in this<br />

format for an audience that is new to the field of thermal spraying and want a well-founded introduction from<br />

the experts! The “Industrial Forum” is another characteristic of ITSC. This Forum will include practical<br />

demonstrations on industry related topics, products and solutions. Both sessions are also available for EXPO<br />

ONLY visitors!<br />

Last but not least the “Three-day Exposition” is a permanent part of the event. If you are looking for new<br />

products and services, have questions or need answers, then ITSC 2024 is the best place for you! More than<br />

70 leading companies already confirmed to participate.<br />

ITSC is organized by <strong>DVS</strong> – German Welding Society and <strong>DVS</strong> – Publishing House in cooperation with the<br />

ASM – Thermal Spray Society and supported by GTS – Association of Thermal Sprayers. All partners do<br />

their best to fulfill and surpass all attendees expectation!<br />

ITSC will take place in Milan, the metropolis in northern Italy’s Lombardy, the world-famous center for fashion<br />

and design on April 29 to May 1, 2024. More than 320 contributions from 32 countries and all other event<br />

highlights stand for a promising and unforgettable event.<br />

Sono particolarmente impaziente di darvi il benvenuto a Milano!<br />

Jens Jerzembeck<br />

<strong>DVS</strong> – German Welding Society


Committees and Endorsing Sponsors<br />

General Chairs:<br />

W. Krömmer* The Linde Group (DE)<br />

R. Lima National Research Council (CA)<br />

*In charge of the abstract review and programming and<br />

as judges regarding the Best Paper Awards<br />

<strong>DVS</strong> Representatives:<br />

A. Barth Höganäs GmbH<br />

R. Enžl Oerlikon Metco AG (CH)<br />

F. Ernst KS HUAYU AluTech GmbH (DE)<br />

F. Gärtner Helmut-Schmidt-University (DE)<br />

T. Grund Chemnitz University of Technology<br />

(DE)<br />

S. Hartmann obz innovation gmbh (DE)<br />

H. Heinemann RWTH Aachen University (DE)<br />

X. Huang TSCC Thermal Spray Committee of<br />

Chinese Surface Engineering<br />

Association (CN)<br />

J. Jerzembeck <strong>DVS</strong> – German Welding Society (DE)<br />

T. Klassen Helmut-Schmidt-University (DE)<br />

T. Königstein GTV Verschleißschutz GmbH (DE)<br />

M. Knoch Plasmatic Franken GmbH (DE)<br />

T. Lampke Chemnitz University of Technology<br />

(DE)<br />

T. Linke Nemak Dillingen GmbH (DE)<br />

E. Lugscheider RWTH Aachen University (DE)<br />

H. Maier Leibniz University (DE)<br />

G. Mauer Forschungszentrum Jülich GmbH<br />

(DE)<br />

K. Möhwald Leibniz University (DE)<br />

M. Öte Schaeffer Technologies AG & Co. KG<br />

(DE)<br />

F. Prenger Grillo Werke AG (DE)<br />

C. Rupprecht Technische Universität Berlin (De)<br />

F. Schreiber DURUM Verschleiss-Schutz GmbH<br />

(DE)<br />

S. Tank <strong>DVS</strong> Media GmbH (DE)<br />

F. Tiggemann Flowserve Flow Control GmbH (DE)<br />

W. Tillmann University of Dortmund (DE)<br />

R. Vaßen Forschungszentrum Jülich GmbH<br />

(DE)<br />

Technical Chairs:<br />

K. Bobzin* RWTH Aachen University (DE)<br />

A. Ang Swinburne University of Technology (AU)<br />

ASM-TSS Representatives:<br />

N. Curry Thermal Spray Innovations (AT)<br />

S. Fowler-Hutchinson SAINT-GOBAIN (US)<br />

E. Irissou National Research Council (CA)<br />

C. Kay Hannecard Roller Coatings, Inc. (US)<br />

H. Koivuluoto Tampere University of Technology<br />

(FI)<br />

J. Koppes Thermal Spray Technologies (US)<br />

K. Laul Delta Airlines (US)<br />

W. Lenling Thermal Spray Technologies (US)<br />

R. Lima National Research Council (CA)<br />

A. McDonald University of Alberta (CA)<br />

C. Moreau Concordia University (CA)<br />

C. Raval Hannecard Roller Coatings, Inc. (US)<br />

K. Shinoda National Institute of Advanced<br />

Industrial Science and Technology<br />

(JP)<br />

K. Sridharan University of Wisconsin (US)<br />

A. Vackel Sandia National Laboratories (US)<br />

J. Veilleux Universite de Sherbrooke (CA)<br />

J. Villafuerte Centerline (CA)<br />

Sponsors:<br />

Alloy Coating Supply (ACS) (US)<br />

C&M Technologies GmbH (DE)<br />

GTV Verschleißschutz GmbH (DE)<br />

Höganäs GmbH (DE)<br />

Metallizing Equipment Co. PVT Ltd. (IN)<br />

Oerlikon metco AG (CH)<br />

Saint-Gobain Coating Solutions (FR)<br />

Corporate Supporters:<br />

DURUM Verschleiss-Schutz GmbH (DE)<br />

INDO-MIM Private Limited (IN)<br />

Linde Advanced Material Technologies, Inc. (DE)


Table of contents<br />

Preface<br />

Time Schedule<br />

Proceedings<br />

Power Storage<br />

Development of Dense and Low Oxide Titanium Coatings for PEMWE Application ........... 1<br />

K. Bobzin, H. Heinemann, E. Olesch, K. Radermacher<br />

Plasma-spray deposition of Na3Zr2Si2PO12 electrolyte for high<br />

performance all solid-state sodium-ion battery ................................................................... 8<br />

X.-C. Bu, N. Chen, X.-T. Luo, C.-J. Li<br />

Automotive Industry<br />

Cold Atmospheric Plasma Metallization of Power Semiconductor<br />

Devices with CuSn Pseudo-Alloys for Diffusion Soldering ................................................ 17<br />

M. Ockel, A. Gökçen, B. Ottinger, M. Petersen, C. Voigt, J. Franke<br />

Laser Cladding I<br />

Comparative Studies of SUS316L Layer Deposited by Conventional<br />

Laser Cladding and Extreme High Speed Laser Cladding ................................................ 27<br />

T. Izumi, A. Yano, and M. Arai<br />

Further Applications<br />

Thermally sprayed coatings for dynamic magnetic data storage ...................................... 34<br />

M. Nicolaus, M. Arndt, M. Wurz, K. Möhwald, H. J. Maier<br />

Young Professionals Session<br />

Subsurface Weave Pattern Influences on Cold Spray Deposits onto Woven Fiber<br />

Reinforced Composites ……….……………………………………………………………….. 40<br />

M. Kaminskyj, N. Mennie, N. Singh, B. Koohbor, F. M. Haas<br />

Techno-Economic Assessment of Utilization of Cold Spraying Process for Fabrication<br />

of Resistive Heating Elements for Temperature Protection of Steel Pipes ....................... 49<br />

M. Rezvani Rad, P. Menghesha, M. O. Jarligo, A. McDonald<br />

Soilless Cultivation via Thermal Spraying ........................................................................ 59<br />

Flammspritzen - HVOF - Verschleissschutz - Korrosionsschutz<br />

P. Biswal, M. Hauer, L. Möhrke, A. Gericke, S. Rasche, H. Schinkel, K.-M. Henkel<br />

www.cremer–beschichtungen.de<br />

info@cremer-beschichtungen.de<br />

Calibration of the Critical Velocity in Cold Gas Spraying................................................... 67<br />

L. Wiehler, J. Capan, Z. Arabgol, C. Huang, A. List, F. Gärtner, T. Klassen<br />

AZ_Cremer_176x62mm.indd 1 16.03.2017 13:43:34


Thermally sprayed coatings for dynamic magnetic data storage ...................................... 34<br />

M. Nicolaus, M. Arndt, M. Wurz, K. Möhwald, H. J. Maier<br />

Young Professionals Session<br />

Subsurface Weave Pattern Influences on Cold Spray Deposits onto Woven Fiber<br />

Reinforced Composites ……….……………………………………………………………….. 40<br />

M. Kaminskyj, N. Mennie, N. Singh, B. Koohbor, F. M. Haas<br />

Techno-Economic Assessment of Utilization of Cold Spraying Process for Fabrication<br />

of Resistive Heating Elements for Temperature Protection of Steel Pipes ....................... 49<br />

M. Rezvani Rad, P. Menghesha, M. O. Jarligo, A. McDonald<br />

Soilless Cultivation via Thermal Spraying ........................................................................ 59<br />

P. Biswal, M. Hauer, L. Möhrke, A. Gericke, S. Rasche, H. Schinkel, K.-M. Henkel<br />

Calibration of the Critical Velocity in Cold Gas Spraying................................................... 67<br />

L. Wiehler, J. Capan, Z. Arabgol, C. Huang, A. List, F. Gärtner, T. Klassen<br />

Effects of Plume Targeted Cooling on Residual Stress in Controlled Atmosphere<br />

Plasma Sprayed Coatings ............................................................................................... 74<br />

E. E. Peleg<br />

Aviation Industry I<br />

Processing and suspension plasma spray deposition of ZrO2-based<br />

ceramic materials for thermal barrier coatings ……………………………………………... 75<br />

M. C. Galeano Camacho, H. Ageorges, J. Muñoz-Saldaña<br />

Medical Industry<br />

Cold Spray of Ta-Ag Composites: Correlation Between Microstructure and<br />

Antibacterial Properties .................................................................................................... 83<br />

P. Yu, G. Perumal, K. J Genoud, R. Lupoi, S. Yin, F. J O'Brien, D. Brabazon<br />

Modelling & Simulation I<br />

Understanding the Effect of Mo Concentration on the Strength of AlCoCrFeMo<br />

High-Entropy Alloy Using Atomistic Simulations ............................................................ 100<br />

N. Jalal, M. O. Jarligo, A. McDonald, W. Stroberg<br />

Laser Cladding II<br />

Investigations on laser cladding of tin-bronze on steel .................................................. 108<br />

H. Freisse, E. Isère, T. Schudeleit, F. Rippa, D. Keller<br />

COAXquattro: A Versatile High-Power Multi-Wire Laser Cladding Technology ............. 114<br />

F.-L. Toma, H. Hillig, M. Kaubisch, I. Shakhverdova, M. Seifert, F. Brückner<br />

Repair & Recycling<br />

Trajectory Optimization for Repair by Robot-guided Cold Spray ................................... 123<br />

M. Lewke, H. Wu, A. List, F. Gärtner, T. Klassen, A. Fay<br />

Numerical simulation of the shaft parts repairing process by laser metal deposition<br />

technique ....................................................................................................................... 130


COAXquattro: A Versatile High-Power Multi-Wire Laser Cladding Technology ............. 114<br />

F.-L. Toma, H. Hillig, M. Kaubisch, I. Shakhverdova, M. Seifert, F. Brückner<br />

Repair & Recycling<br />

Trajectory Optimization for Repair by Robot-guided Cold Spray ................................... 123<br />

M. Lewke, H. Wu, A. List, F. Gärtner, T. Klassen, A. Fay<br />

Numerical simulation of the shaft parts repairing process by laser metal deposition<br />

technique ....................................................................................................................... 130<br />

Y. Meng, M. Arai, T. Izumi<br />

Is particle hardness the decisive factor for adhesion in cold spray? .............................. 138<br />

M. Steierl, F. Gärtner, T. Klassen<br />

Characterization & Testing Methods I<br />

Exploring the Crack Propagation Behaviour in Suspension Plasma Sprayed<br />

Thermal Barrier Coatings: An In-Situ Three-point Bending Study in<br />

Scanning Electron Microscope ...................................................................................... 139<br />

M. Amer, N. Curry, M. Arshad, Q. Hayat, V. Janik, J. Nottingham, M. Bai<br />

Performance of Thermally Sprayed Inconel Coatings in Erosion-Corrosion<br />

Conditions of Biomass-Fired Boilers .............................................................................. 152<br />

R. Verma, G. Kaushal<br />

The influence of incursion rate on abradability of AlSi-hBN abradable seal coating ...... 159<br />

T. Liu, J. Liu, D. Zhang, Y. Hou<br />

Ceramic Coatings<br />

Understanding the formation of different surface structures of hydrophobic<br />

ceramic coatings deposited in the SPAPS process and SPVPS process ...................... 166<br />

P. Xu, X. Sui, T. W. Coyle, L. Pershin, J. Mostaghimi<br />

Development and understanding of CMAS coating on YSZ using APS technique ........ 176<br />

A. Roy, F. B. Ettouil, R. S. Lima, C. Moreau<br />

Corrosion Protection I<br />

Comparative Analysis of Cold Sprayed and HVOF Sprayed NiCrTiCRe coating<br />

on T22 Boiler Steel in Thermal Power Plant Boiler Environment ................................... 185<br />

N. Bala, H. Singh, S. Prakash<br />

Thermal Spray in a Nutshell I<br />

Plasma spraying − from single to multiple electrodes .. .................................................. 194<br />

G. Mauer<br />

Suspension spraying ...................................................................................................... 195<br />

F.-L. Toma<br />

Thermal Spray in a Nutshell II<br />

Cold spraying ................................................................................................................. 196<br />

F. Gärtner


The influence of incursion rate on abradability of AlSi-hBN abradable seal coating ...... 159<br />

T. Liu, J. Liu, D. Zhang, Y. Hou<br />

Ceramic Coatings<br />

Understanding the formation of different surface structures of hydrophobic<br />

ceramic coatings deposited in the SPAPS process and SPVPS process ...................... 166<br />

P. Xu, X. Sui, T. W. Coyle, L. Pershin, J. Mostaghimi<br />

Development and understanding of CMAS coating on YSZ using APS technique ........ 176<br />

A. Roy, F. B. Ettouil, R. S. Lima, C. Moreau<br />

Corrosion Protection I<br />

Comparative Analysis of Cold Sprayed and HVOF Sprayed NiCrTiCRe coating<br />

on T22 Boiler Steel in Thermal Power Plant Boiler Environment ................................... 185<br />

N. Bala, H. Singh, S. Prakash<br />

Thermal Spray in a Nutshell I<br />

Plasma spraying − from single to multiple electrodes .. .................................................. 194<br />

G. Mauer<br />

Suspension spraying ...................................................................................................... 195<br />

F.-L. Toma<br />

Thermal Spray in a Nutshell II<br />

Cold spraying ................................................................................................................. 196<br />

F. Gärtner<br />

Isolating Coatings<br />

Enhanced Coating Deposition by Development of Oxide Shelled Aluminium Nitride .... 197<br />

K. Bobzin, H. Heinemann, E. Olesch, A. Aslankaya<br />

Power Generation<br />

Properties of Novel Partially Amorphous Fe-based Thermal Barrier Coatings<br />

under the Influence of Cryogenic Temperature and Hydrogen ...................................... 204<br />

M. Hauer, L. Möhrke, P. Biswal, O. Brätz and A. Gericke, B. Allebrodt, K.-M. Henkel<br />

Refurbishment Process of Platform Combustion System of SGT5-8000H .................... 213<br />

B. Burbaum, I. Just, W. Remmert, M. Gralki<br />

Air plasma-sprayed MCrAlY coatings with low oxide content enabled by<br />

adding a deoxidizer ........................................................................................................ 221<br />

Y.-S. Zhu, X. Xue, X.-T. Luo, C.-J. Li<br />

Hot corrosion behaviour of yttria stabilized zirconia and La2Ce2O7<br />

based dual coatings ....................................................................................................... 228<br />

A. Pakseresht, A. Suyambulingam, A. Sekar, M. Parchovianský<br />

Maritime Industry & Offshore Technologies<br />

Data-Driven Mitigation of Process Fluctuations in Wire-Arc Spraying ........................... 233


Hot corrosion behaviour of yttria stabilized zirconia and La2Ce2O7<br />

based dual coatings ....................................................................................................... 228<br />

A. Pakseresht, A. Suyambulingam, A. Sekar, M. Parchovianský<br />

Maritime Industry & Offshore Technologies<br />

Data-Driven Mitigation of Process Fluctuations in Wire-Arc Spraying ........................... 233<br />

K. Bobzin, H. Heinemann, L. M. Johann<br />

In-field Repair for Maritim Hardware Using High-Pressure Cold Spray ......................... 240<br />

H. P. Höll, K. Klus, A. T. Nardi, R. M. Gerani, D. Stanley, T. J. Eden<br />

Cavitation Erosion in HVOF Thermally Sprayed WC-NiCrBSi Coatings ........................ 248<br />

A. Algoburi, R. Ahmed, V. Kumar<br />

Aviation Industry II<br />

Effect of Pt additions on the bond coats of the Thermal Barrier Coating systems<br />

in aero gas turbine engines ............................................................................................ 256<br />

T. B. Usubaliyev, A. S. Samedov, P. Sh. Abdullayev<br />

New Processes<br />

Influence of Substrate Patterns on the Coating Microstructure in<br />

Aerosol-deposited Alumina Coatings ............................................................................. 257<br />

Z. Yang, A. Dolatabadi, T. W. Coyle<br />

In-Situ SEM Observation of Mechanical Failure of Hybrid Plasma Spray Coatings ....... 266<br />

R. Musalek, T. Tesar, J. Minarik, R. Genois, J. Dudik<br />

A new approach for the application of highly reactive metals ........................................ 278<br />

M. Rodriguez Diaz, M. Szafarska, René Gustus, K. Möhwald, H. J. Maier<br />

HVOF/HVAF-Spraying<br />

Gas-fuel HVOF and its influencing factors: introducing the total gas flow ...................... 284<br />

C. Hambrock, W. Rannetbauer, S. Hubmer, R. Ramlau<br />

Highly Porous Titanium Coatings for Proton Exchange Membrane Water<br />

Electrolysis Application by HVOF ..................................................................... ….……. 291<br />

K. Bobzin, L. Zhao, H. Heinemann, E. Olesch<br />

Suspension Spraying<br />

Physical mechanisms in plasma spray processing of suspensions ............................... 298<br />

A. Chergui, C. Lebot, V. Rat, G. Mariaux, A. Denoirjean<br />

Parameters influencing the photocatalytic activity of suspension sprayed<br />

ZnO-TiO2 coatings ........................................................................................................ 310<br />

A. Meyer, F.-L. Toma, O. Kunze, A. Potthoff, C. Leyens<br />

Gas & Fuel Industry<br />

An optical and metallurgical comparison of chrome free and chrome containing<br />

Al-Si slurry diffusion coatings for Gas Turbine Applications ........................................... 319<br />

S. Higgins, T. D. A. Jones, Q. Zhao


Parameters influencing the photocatalytic activity of suspension sprayed<br />

ZnO-TiO2 coatings ........................................................................................................ 310<br />

A. Meyer, F.-L. Toma, O. Kunze, A. Potthoff, C. Leyens<br />

Gas & Fuel Industry<br />

An optical and metallurgical comparison of chrome free and chrome containing<br />

Al-Si slurry diffusion coatings for Gas Turbine Applications ........................................... 319<br />

S. Higgins, T. D. A. Jones, Q. Zhao<br />

Study the Impact of Process Parameters of Laser Cladding Nickel-Chromium<br />

Alloy Powder on Substrate Melted Areas ....................................................................... 325<br />

R. A. Ahmed, R. S. Khan, M. M. Qahtani, A. Alsayoud, A. S. Bukhari<br />

Pre- & Post-Treatment<br />

Influence of laser fusing parameters on the microstructure evolution of thermally<br />

sprayed self-fluxing NiCrBSiFe coatings ........................................................................ 336<br />

B. Preuß, T. Lindner, G. Töberling, S. Kaur and T. Lampke1<br />

Effect of surface preparation by laser texturing in thermal spraying on the fatigue<br />

life of the Ti-6Al-4V alloy ................................................................................................ 343<br />

E. Pegane-Vingadas, M. Chaussumier, A. Soveja, S. Costil<br />

Improved adhesion of plasma-sprayed ceramic coatings on textured<br />

ceramic substrates ......................................................................................................... 356<br />

T. Ferrasse, S. Costil, G. Darut, B. Bouteiller, M. C. Auscher<br />

Functional Coatings<br />

Comparative Analysis of Mechanical Properties of Thermally Sprayed Cu<br />

and Zn Coatings on Fibre-Reinforced Plastic for Enhanced EMC Applications ……...... 365<br />

J. Gebauer, S. Scheitz, C. Rothe, A. Paul, P. Kanagarajah, M. Reif<br />

Microstructure evolution and oxidation behavior of thermal barrier coatings<br />

with varying cold sprayed bond coats after isothermal heat treatments ......................... 376<br />

S. Dosta, C. R. C. Lima, V. Crespo, J. Nin, G. Clavé<br />

Corrosion Protection II<br />

Investigation on oxidation and interdiffusion in the systems of aluminiferous<br />

coatings and superalloys ............................................................................................... 382<br />

X. Sun, J. Moverare, X.-H. Li, R. L. Peng<br />

Tribology behaviour of HVAF and HVOF sprayed WC-CoCr coatings<br />

on light alloys ................................................................................................................. 386<br />

T. Owoseni, M. Gupta, I. Mare, T. Varis<br />

The impact of YSZ powder morphology and chemical composition on the efficacy<br />

of Thermal Barrier Coatings (TBCs) used in industrial applications ............................... 398<br />

G. Bolelli, S. Bursich, G. Cavazzini, L. Lusvarghi, S. Morelli, C. Ricci, E. Rossi, M. Sebastiani, P. Puddu


Metals Processing<br />

Optimization of the Ni-coating geometry and microstructure of large surfaces<br />

by laser cladding on cast-iron molds used in glass industry .......................................... 399<br />

F. Bourahima, T. Lauridant, C. Guasch, T. Baudin, A.-L. Helbert<br />

High-Speed Laser melt Injection for Reinforcing Skin-Pass Rolls .................................. 409<br />

P. Warneke, A. Bohlen, T. Seefeld<br />

Cold Gas Spraying I<br />

Comprehensive Characterization of Annealed Coatings: Investigating Roughness<br />

and Wear Performance through Wear Testing and Analysis ......................................... 418<br />

N. Sheibanian, R. Sesana, S. Özbilen, R. Lupoi<br />

Characterization & Testing Methods II<br />

Fast and non-destructive mechanical characterization of coatings from thermal<br />

spraying and laser cladding: automated surface acoustic wave spectroscopy<br />

as a new tool for quality control and research ................................................................ 427<br />

M. Zawischa, S. Makowski<br />

Characterizing deformation by positron annihilation spectroscopy: cold spray vs.<br />

high-pressure torsion ..................................................................................................... 437<br />

J. Cizek, J. Medricky, F. Stefanik, F. Lukac, O. Melikhova, J. Cizek<br />

A micro-spectroscopic approach to characterizing residual stresses and<br />

subsurface modifications due to high-speed collision during cold spray<br />

deposition of metals on glass substrates ....................................................................... 444<br />

A. K. Elkholey, D. de Ligny, R. N. Raoelison, C. Verdy, P. Bertrand, C. Langlade<br />

Data Driven Models & Artificial Intelligence<br />

Physics-Informed Neural Networks for Predicting Particle Properties in<br />

Plasma Spraying ............................................................................................................ 452<br />

K. Bobzin, H. Heinemann, A. Dokhanchi<br />

Databased Optimization of Coating Characteristics – Challenges and<br />

Possible Solution ........................................................................................................... 459<br />

BodyClad® High Wear Performance<br />

W. Rannetbauer, C. Hambrock, S. Hubmer, R. Ramlau<br />

Claddings - Wear Parts - Wear Plates - Maintenance - Sustainable<br />

Additive Manufacturing I<br />

Towards an integrated modular cold spray additive manufacturing system .................... 469<br />

W. Li, H. Wu, S. Liu, H. Liao, S. Costil, S. Deng<br />

An Investigation on the Effect of Deposition Technique on Microstructural<br />

and EUROMAT Mechanical GmbH Properties of Hermann-Hollerith-Straße WC-17Co Deposited 6 Using t +49Direct 2401 607 2866 Energy e input@euromat.de<br />

Deposition<br />

Industrial Surface<br />

(DED)<br />

Solutions<br />

and High-Velocity<br />

52499 Baesweiler<br />

Oxygen Fuel (HVOF)<br />

f +49 2401<br />

...........................................<br />

607 2855<br />

w www.euromat.de483<br />

T. Grabowski, F. Azarmi, M. McDonnell<br />

Engineering · Production · Technology


subsurface modifications due to high-speed collision during cold spray<br />

deposition of metals on glass substrates ....................................................................... 444<br />

Powders, Wires, Suspensions<br />

A. K. Elkholey, D. de Ligny, R. N. Raoelison, C. Verdy, P. Bertrand, C. Langlade<br />

Data Driven Models & Artificial Intelligence<br />

Physics-Informed Neural Networks for Predicting Particle Properties in<br />

Plasma Spraying ............................................................................................................ 452<br />

K. Bobzin, H. Heinemann, A. Dokhanchi<br />

Databased Optimization of Coating Characteristics – Challenges and<br />

Possible Solution ........................................................................................................... 459<br />

W. Rannetbauer, C. Hambrock, S. Hubmer, R. Ramlau<br />

Additive Manufacturing I<br />

Towards an integrated modular cold spray additive manufacturing system .................... 469<br />

W. Li, H. Wu, S. Liu, H. Liao, S. Costil, S. Deng<br />

An Investigation on the Effect of Deposition Technique on Microstructural<br />

and Mechanical Properties of WC-17Co Deposited Using Direct Energy<br />

Deposition (DED) and High-Velocity Oxygen Fuel (HVOF) ........................................... 483<br />

T. Grabowski, F. Azarmi, M. McDonnell<br />

From Anticosti Island’s ‘Deep Time’ to A Cold Spray Additive Manufacturing<br />

Art Creation .................................................................................................................... 495<br />

A. Nastic, B. Jodoin, C. Fitzgerald, S. Desaulniers, L. Pouliot, F. Caio, D. Macdonald, A. Duval, G. Dubois,<br />

V. Tessier, C. Etienne<br />

Additive Manufacturing II<br />

Experimental and numerical study of the spattering dynamic mechanisms in<br />

selective laser melting .................................................................................................... 508<br />

S. Qin, W. Zhang, S. Yin, S. Lei<br />

The effect of powder particle size on mechanical and fracture properties of cold<br />

sprayed Al ...................................................................................................................... 514<br />

O. Kovarik, F. Wick, L. Wiehler, C. Huang, J. Cizek, A. List, F. Gärtner, T. Klassen<br />

Cold Gas Spraying II<br />

Improving Adhesion Strength by Laser Assisted Cold Spraying of Mild Steel ............... 520<br />

F. Caio, A. Nascimento, Luc Pouliot, D. MacDonald, J-G. Legoux, D. Poirier, M. Martin<br />

Evaluation of lightning resistance property of thermoplastic CFRP metallized<br />

by low-pressure cold spray ............................................................................................ 521<br />

H. Saito, W. Kai, T. Funaki, Y. Ichikawa, K. Ogawa<br />

Studies of Particle Deformation and Microstructure Evolution Using High Strain<br />

Rate Particle Compression Test .................................................................................... 528<br />

G. J. Na, A. Hashizume, Q. Tang, M. Hassani, Y. Ichikawa<br />

Cold Gas Spraying III<br />

In-Situ Studies of Impact-Induced Bond Strength at the Single Particle Scale .............. 535<br />

Q. Tang, M. Hassani


Studies of Particle Deformation and Microstructure Evolution Using High Strain<br />

Rate Particle Compression Test .................................................................................... 528<br />

G. J. Na, A. Hashizume, Q. Tang, M. Hassani, Y. Ichikawa<br />

Cold Gas Spraying III<br />

In-Situ Studies of Impact-Induced Bond Strength at the Single Particle Scale .............. 535<br />

Q. Tang, M. Hassani<br />

Powders, Wires, Suspensions<br />

Plasma-Sprayed Bulk-like Ni-based Alloy Coating Enabled by Boron-containing<br />

Powder Design with exceptional High Tensile Strength ................................................. 536<br />

C.-Jiu Li, X.-Y. Dong, J.-J. Song, Y.-S. Zhu, X.-T. Luo, L. Zhang<br />

Process Diagnostics, Sensors & Controls I<br />

Offline robot programming for generating coating paths quickly and accurately ............ 543<br />

S. Schneebeli, D. A. Karandikar<br />

Opportunities and Limitations of a Holistic Process Monitoring System<br />

for Arc Processes .......................................................................................................... 549<br />

S. Weis, S. Brumm, R. Grunert, M. Halmaghi, J. Morgenschweis, J. Bosler<br />

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Modelling & Simulation II<br />

Computational Quantitative Validation of Multiphase High-Entropy Alloy Coating<br />

Using Non-Equilibrium CALPHAD Simulation ................................................................ 557<br />

E. Bosi, A. Meghwal, S. Singh, P. Munroe, C. C. Berndt, A. S. M. Ang<br />

Tribological Coatings I<br />

A Comparative Investigation of Feedstock Materials on Multiple Properties of<br />

HVOF-Formed Cr3C2-NiCr Coatings: Size Effects of Powders and Carbides<br />

on Sliding Abrasive Wear Behavior ............................................................................... 558<br />

X. Ma, P. Ruggiero<br />

Hard-Facing Coatings for Agriculture Tools ................................................................... 570<br />

L. Möhrke, M. Hauer, P. Biswal and A. Gericke<br />

Dynamic impact wear behavior of HVOF sprayed hardmetal coatings .......................... 580<br />

Š. Houdková, J. Duliškovič, M. Vostřák, T. Taranda, O. Skála, R. Musilová, J. Daniel, L.-M. Berger<br />

Metal Coatings<br />

Enhancing the Optimized HEA Bond Coating in TBC Systems via HVAF Technique ... 594<br />

H. Shahbazi, R. S. Lima, P. Stoyanov, C. Moreau<br />

Tribological Coatings II<br />

Tribology of self fluxing ceramic coatings prepared using external feeding<br />

hybrid plasma spraying .................................................................................................. 611<br />

T. Tesar, R. Musalek, F. Lukac, J. Walter, L. Cvrcek, J. Cech<br />

The Performance of Metal Based Abradable Sealing Coatings Based on Peeling<br />

Medium Particle Structure Design ................................................................................. 617<br />

D. Guo, J. Liu, T. Liu, C. Wu<br />

Process Diagnostics, Sensors & Controls II<br />

In Situ Spray Bead Acquisition and Analysis for Coating Thickness Predictions ........... 623<br />

U. Hudomalj, I. Aschwanden, L. Weiss, M. Nabavi, K. Wegener


Applications – Automotive Industry<br />

Poster Sessions<br />

Analysis of Different High-Velocity Thermally Sprayed Coatings to Recover<br />

AISI H13 High-Pressure Die-Casting Molds .................................................................. 632<br />

A. R. Mayer, E. B. Sabino, H. D. C. Fals, A. G. M. Pukasiewicz,<br />

W. R. de Oliveira, S. Björklund, S. Joshi<br />

Applications – Aviation Industry<br />

Deposition and Characterization of Thermally Sprayed Metallic Coatings onto<br />

Polymer Reinforced Carbon Fiber Composites .............................................................. 643<br />

D. S. Ghuman, M.-L. Cliche, B. C. N. M. de Castilho, F. B. Ettouil, C. Moreau, C. Pan, P. Stoyanov<br />

Applications – Electronics and Sensors<br />

Fluid Velocity Sensors Made by Thermal Spray ............................................................ 652<br />

A. Hanna, S. Chandra<br />

Applications – Medical Industry<br />

Mold-resistant air filters embedded with copper particles .............................................. 660<br />

L. Pershin, S. Delage, M. Zhang, M. Ringuette, J. Mostaghimi<br />

Antibacterial surface coatings by Plasma Spray (APS/SPS) and Physical<br />

Vapor Deposition (PVD) processes: a comparative approach ....................................... 663<br />

L. Youssef, A. Prorot, L. Gnodé, T. Maerten, S. Belvèze, C. Acikgoz, N. Manninen, V. Rat, A. Vardelle, A. Denoirjean<br />

Applications – Power Generation<br />

Improvements in cavitation and slurry wear erosion of Inconel 718 laser<br />

cladding through the NiNb addition ........................................................................... …. 670<br />

H. D. C. Fals, S. R.F. Sabino, A. G.M. Pukasiewicz<br />

Equipment/Consumables – Industrial Automation & Robotics<br />

Visual Odometry for Mobile Material Deposition Systems using<br />

RGB-D Cameras ......................................................................................... ….………… 681<br />

..<br />

H. Saadati Nezhad, M. Contreras, A. McDonald, E. Hashemi<br />

Equipment/Consumables – Process Diagnostics, Sensors & Controls<br />

Understanding the impact of binary plasma gas mixtures in plasma spraying ............... 689<br />

K. Bobzin, H. Heinemann, M. Erck, K. Jasutyn<br />

Properties and Materials – Metal Coatings<br />

Effect of the Test Method on the Resulting Adhesion of the Coating ............................. 696<br />

Ž. Dlouhá


Properties and Materials – Tribological Coatings<br />

Design and Development of Cost-Effective Equipment for Tribological Evaluation<br />

of Thermally Sprayed Abradable Coatings .................................................................... 704<br />

K. Bertuol, F. R. E. Rivadeneira, B. C. N. M. Castilho, C. Moreau, P. Stoyanov<br />

Thermal Spray and other Processes – Additive Manufacturing<br />

Investigation of Mechanical Properties of Cobalt Chromium Additively<br />

Manufactured Using Direct Energy Deposition: Experimental Study and<br />

Finite Element Analysis .................................................................................................. 712<br />

D. Smith, P. Pickett, T. Grabowski, J. Thorpe, F. Azarmi<br />

Thermal Spray and other Processes – Cold Gas Spraying<br />

Heat treatment effects on structural and mechanical features of cold sprayed<br />

3D Aluminium part ......................................................................................................... 724<br />

M. Sokore, S. Deng, H. Liao, R. N. Raoelison<br />

Cold-Sprayed Aluminum Alloys: Exploring the Differences Between 6061<br />

and 7075 ........................................................................................................................ 732<br />

K. Rafiee, E. Barbosa de Melo, P. Vo, M.H. Martin, S. Yue<br />

Thermal Spray and other Processes – Modeling & Simulation<br />

Investigation of the pore formation during the cold spray additive manufacturing<br />

of a bulk aluminum part .................................................................................................. 743<br />

M. Sokore, S. Deng, H. Liao, R. N. Raoelison<br />

Nozzle geometry optimization for cold spray applications by using<br />

3D-CFD calculations ...................................................................................................... 751<br />

J. Gutiérrez de Frutos, A. List, F. Gärtner, T. Klassen<br />

Thermal Spray and other Processes – Plasma Spraying<br />

Influence of Concentrated Solar Power on Plasma Sprayed Hybrid Thermal<br />

Barrier Coatings ............................................................................................................. 759<br />

J. Dudik, I. Hulka, T. Tesar, F. Lukac, R. Musalek<br />

Thermal Spray and other Processes – Pre- & Post-Treatment<br />

Lightblast ....................................................................................................................... 768<br />

T. Wanski, P. Herwig, J. Hauptmann<br />

Authors and Co-Authors ……………………………………………………………….. 773


Development of Dense and Low Oxide Titanium Coatings for PEMWE<br />

Application<br />

K. Bobzin, H. Heinemann, E. Olesch, K. Radermacher*<br />

Surface Engineering Institute (IOT), RWTH Aachen University, Aachen, Germany<br />

A key technology to minimise CO2-emissions is the production of hydrogen from water electrolysis. The proton<br />

exchange membrane water electrolysis (PEMWE) consists of a stacked system out of bipolar plates (BPP),<br />

porous transport layers (PTL) and a membrane electrode assembly (MEA). Research activities are ongoing to<br />

minimize material input, reduce costs and increase the performance. For example, the BPP on the anodic side<br />

of the stack is currently manufactured of bulk titanium and its substitution by a Ti-coated steel substrate is<br />

economically interesting. The main requirements for the BPP-coating are a high coating density, a low<br />

electrical resistance and a long lifetime in a harsh electrochemical environment. Coating application on<br />

substrates of s ≤ 0.5 mm thickness is conducted with three thermal spraying technologies: Cold Gas Spraying<br />

(CGS), High Velocity Air-Fuel (HVAF) spraying and High Velocity Oxy-Fuel (HVOF). Substrate preparation is<br />

examined as well. Coating development is conducted with regards to coating thickness, density and oxidation.<br />

The examination of coatings includes roughness analysis, structural and chemical analysis. The results allow<br />

an evaluation of the suitability of thermally sprayed Ti-coatings by the structural properties for the PEMWE<br />

application. Among the three tested processes, CGS is the most suitable for this type of application. The three<br />

chosen thermal spraying processes are examined for coating application on metal sheets in context of PEMWE<br />

for the first time.<br />

1 Introduction<br />

The use of thermally sprayed coatings for water electrolysis to produce hydrogen is known in the context of<br />

alkaline water electrolysis (AWE) and solid oxide electrolysis cell (SOEC). The proton exchange membrane<br />

water electrolysis (PEMWE) is another electrolysis variant which is characterised by a higher hydrogen<br />

production rate under smaller cell dimensions [SGG11].<br />

The PEMWE entails a stacked system out of bipolar plates (BPP), porous transport layers (PTL) and a<br />

membrane electrode assembly (MEA). The BPP is a structural cell component responsible for fluid transport,<br />

electrical conductivity and mechanical stability of the electrochemical cell. Typically, BPPs are manufactured<br />

from commercially pure titanium sheets with a thickness of 0.3 mm ≤ s ≤ 1 mm. In order to facilitate the<br />

manufacturing process and to reduce costs, steel-based BPPs are currently investigated. Because of the acidic<br />

conditions in the PEMWE cell and the high cell voltage of of U = 2 V, corrosion of the steel-based BPP is to be<br />

expected. In order to protect the steel-based BPP from corrosion, a corrosion protection coating with a high<br />

coating density as a barrier between steel and electrolyte should be deposited on the steel surface. According<br />

to the Pourbaix diagrams [Pou74], titanium, tantalum and niobium are the most suitable materials for this type<br />

of protection coating under the PEMWE conditions.<br />

The coating development for potential corrosion protection of the BPP is yet at the beginning. Physical vapor<br />

deposited (PVD) coatings have been examined for PEMWE application since they have been established in<br />

fuel cell (PEMFC) application. In Langemann et al. [LFM+15] PVD-coatings of Au and TiN were examined.<br />

Both coatings were infiltrated with the electrolyte because of pin holes in the PVD-coating causing corrosion<br />

of the underlying substrate.<br />

In Rojas et al. [RSS+21] single and multilayer coating architectures of CrN and TiN in combination with different<br />

chemical resistant steels were investigated. Regarding CrN, the protective passivation layer of Cr2O3 was<br />

destroyed at electrochemical potentials of E > 1 V vs NHE. For single layer TiN coatings high dissolution rates<br />

of iron were measured indicating corrosion of the underlying substrate. In multilayer systems this was not<br />

observed which is, according to the authors, contributed to the lower numbers of coating defects in a multilayer<br />

system. Based on this literature review, while TiN and CrN are commonly used for coatings in the PEMFC, the<br />

PVD coatings have shown a worsened electrochemical behaviour under PEMWE conditions.<br />

Coating deposition with thermal spraying for the BPP involves process related challenges. On the one hand,<br />

the coating material is limited to commercially pure (CP) titanium with the affinity to oxidise easily during the<br />

spraying process. The relevance of the process-related oxidation for the application is explained more in detail<br />

in chapter 2.3 Coating Analysis. On the other hand, the BPP substrate should encompass a thickness of just<br />

s ≤ 0.5 mm. Evidently, a high coating density is important as well in order to prevent the underlying substrate<br />

from corrosion. Thermally sprayed coatings for the PEMWE have been studied firstly by Gago et al. [GAG+14]<br />

using vacuum plasma spraying (VPS). By VPS, titanium coatings with an oxygen content of just ω ≤ 1% are<br />

possible [LLH+87].<br />

<strong>DVS</strong> 393 1


In order to reduce production costs, thermal spraying processes without vacuum technology are economically<br />

more interesting. As a high coating density, a low oxide content as well as a low coating roughness for reduced<br />

post-processing are targeted, Cold Gas Spraying (CGS), High Velocity Air-Fuel (HVAF), High Velocity<br />

Oxy-Fuel (HVOF) are chosen for this study. The examination is focused on structural coating features and the<br />

oxygen content as they allow an estimation of the coating performance in the PEMWE environment. The<br />

following six aspects were considered during coating development in this study:<br />

1. Substrate deformation during surface preparation<br />

2. Substrate temperature and deformation during coating deposition<br />

3. Process related oxidation of the deposited titanium<br />

4. Coating thickness<br />

5. Coating roughness<br />

6. Coating density<br />

2 Experimental Set-Up<br />

For enhanced clarity, the following chapters are divided by substrate preparation and coating deposition. In<br />

this chapter, materials and methods are explained.<br />

2.1 Substrate Preparation<br />

To promote the bonding mechanism of mechanical interlocking, sand or grid blasting is a common tool to<br />

roughen the part surface. For this investigation, stainless steel sheets, X2CrNiMo17-12-2, of s = 0.5 mm<br />

thickness are used representing unstructured BPPs. The substrates are prepared for coating with three<br />

different methods: Grid blasting F24 at p = 4 bar manually (GB), grid blasting under same conditions but in a<br />

fixture (GB-fix) and dry grinding with P80 sandpaper horizontally and vertically. The substrates are inspected<br />

visually for deformation and tempering colours. Furthermore, the topography of the grid blasted and the grinded<br />

surface are measured by confocal laser scanning microscopy (CLSM) VKX-200, Keyence Inc., Hokaido,<br />

Japan.<br />

2.2 Coating Deposition<br />

The steel sheets are placed into a coating fixture with a coating area of A = 55 x 55 mm² as reported in<br />

[BHB+23]. As introduced, CGS, HVAF and HVOF will be used for the deposition of titanium grade 4 powder,<br />

Metco 4010C, Oerlikon Metco, Pfäffikon, Switzerland, with a fraction of F = -45 + 11 µm. The coating<br />

parameters are given in Table 1.<br />

Table 1. Coating parameters for CGS, HVAF and HVOF processes<br />

Sulzer Metco,<br />

Kinetiks 8000 (CGS)<br />

Kermetico Inc.,<br />

AK-07 (HVAF)<br />

GTV Verschleißschutz<br />

GmbH, K2 (HVOF)<br />

Nozzle WC 2L 100K<br />

Stand-Off distance in mm 30 200 180<br />

Translational Speed in mm/s 200 1,000 1,000<br />

Powder Feeding in 1/min 2.5 3.3 2 (20 g/min)<br />

Carrier Gas N2 Ar + H2 Ar<br />

Heating Medium 800 °C N2 0.8 MPa Propane 13 L/min Kerosene<br />

Accelerating Gas ≈ 40 bar 0.9 MPa Comp.Air 990 L/min Oxygen<br />

According to the coating parameters in the CGS-process, maximum gas pressure for Kinetiks 8000 is utilized<br />

to process the less ductile and high-melting titanium. In this study, the same powder fraction is used for all<br />

thermal spraying processes. Working with this comparably fine fraction of titanium powder, that is especially<br />

suitable for CGS, in HVAF and HVOF is difficult as the powder is very reactive with nitrogen in hot<br />

temperatures. For this reason, argon is used as carrier gas instead of nitrogen. In the previous study by the<br />

authors [BHB+23], a coarser powder fraction of F = -90 + 45 µm was chosen for the HVAF-process, to minimise<br />

oxidation. However, it was only successful to maintain the biggest particles as α-titanium. In consecutive<br />

experiments, the fraction of F = -45 + 11 µm was tested with different carrier gases and stand-off distances for<br />

the HVAF-process. The parameters in Table 1 are the results from these consecutive experiments. By the<br />

chosen HVOF-coating parameters in Table 1, the stochiometric relation between kerosene and oxygen is<br />

λ = 2.2, resulting in a relatively cold flame with a high particle velocity. Combining this with a relatively short<br />

stand-off distance of dw = 180 mm, low process related oxidation and high coating density are intended.<br />

2<br />

<strong>DVS</strong> 393


2.3 Coating Analysis<br />

The coated substrates are inspected visually for deformation and tempering colours. Coating thickness as well<br />

as porosity are determined from scanning electron microscopy (SEM) images, Thermo Fisher Phenom XL G2,<br />

Eindhoven, Netherlands. A low coating roughness is desirable as the surface area is more reduced to delay<br />

electrochemical reactions. Furthermore, all cell components are stacked together to a cell system so<br />

roughness peaks are potentially pressed into the other cell components causing an inhomogeneous<br />

distribution of compression pressure. Therefore, coating roughness is determined by VKX 200 as well.<br />

The process related oxidation is meaningful to the PEMWE application as the oxide TiO2 is a known dielectric.<br />

Because of this dielectric, more energy is necessary to split water into hydrogen and oxygen by water<br />

electrolysis. In order to examine process related oxidation of titanium qualitatively, x-ray diffraction (XRD) and<br />

high resolution energy dispersive spectroscopy (EDS) was used in a previous study [BHB+23]. Yet, there are<br />

important differences between these methods. The principle of XRD is to determine lattice parameters by<br />

scattered x-ray radiation according to Bragg’s-Law. Therefore, primarily crystalline materials can be analysed.<br />

Using this method, the identification of phase composition and its chemical compounds is possible. Due to the<br />

high cooling rates in thermal spraying, not only crystalline but also amorphous phases exist in the coating<br />

which are more difficult to quantify in XRD. Consequently, XRD provides information about e. g. crystalline<br />

oxides but oxides in amorphous state remain undetected and cannot contribute to a reliable oxygen<br />

determination. In EDS, x-ray emissions of excited secondary electrons are measured which are element<br />

specific. These x-ray emissions vary on the atomic size of the tested element and there is a detection limit for<br />

elements of an atomic number z ≤ 11. Nowadays lighter elements as oxygen, z = 8, can be examined by a<br />

silicon drift detector which was discovered in the 1990s [SLL98]. According to Newbury and Ritchie [NR15],<br />

however, EDS has gained the state of a “semi-quantitative” method for three reasons: Firstly, there is no<br />

calibration of the measurement method, e. g. by standards, secondly, the yield of secondary electrons depends<br />

on the sample properties and, thirdly, there is a low reliability regarding software based automatic peak<br />

identification.<br />

To analyse the surface chemistry, the oxidic content is examined by a different measurement method in this<br />

study. In XPS, photoelectrons are emitted resulting in information about the binding energy of an electron in<br />

the atomic orbital. The binding energy can be correlated to the oxidation state as the binding energy increases<br />

with the oxidation state [SD20]. X-ray photoelectron spectroscopy (XPS) is conducted at the Fraunhofer CSP<br />

in Halle, Germany, with support from the Fraunhofer IMWS, Halle, Germany. In order to characterise surface<br />

properties, the depth profiling mode is used. In contrast to EDS and XRD where the profiling depth ranges<br />

within the µm-scale [RKA+98, LT96], XPS characterises the top nanolayers [SD20].<br />

3 Results and discussion<br />

In this chapter, the qualitative and quantitative results are depicted to evaluate the coating structures. As aforementioned,<br />

a highly dense and low oxide titanium coating is suitable for the application as BPP-coating.<br />

Furthermore, a small coating thickness and a high surface quality are preferred.<br />

3.1 Substrate Preparation<br />

The investigation of different substrate preparation methods demonstrates that the chosen grid blasting<br />

parameters are not suitable for the surface preparation of potential BPPs as heavy deformation is observed.<br />

As Figure 1 shows, the deformation of the steel sheets could be reduced by the fixture but not fully prevented.<br />

In addition to that, grid blasting residues are often locked in the roughened surface and can cause a diminished<br />

quality of the high-end quality product.<br />

Figure 1. Results from the substrate preparation with grid blasting, ellipses show deformed substrate areas<br />

Consequently, homogenous manual dry grinding was tested which does not cause deformation of the<br />

substrates. The surface topography after grinding is depicted in Figure 2. Evidently, by grid blasting, the surface<br />

is ablated more heavily and in a more stochastic way. By dry grinding, the surface is primed more<br />

systematically but with a smaller ablation depth. Because of negligible substrate deformation by dry grinding,<br />

this type of substrate preparation is used onwards.<br />

<strong>DVS</strong> 393 3


Figure 2. Hight profile of surface topographies after different substrate preparation, determined via CLSM Keyence VKX<br />

200 with V = 200x and V = 500x for grinded and grid blasted surface respectively<br />

3.2 Coating Deposition<br />

At first, all coatings are inspected visually for coating colour, substrate deformation and steel tempering. These<br />

qualitative results are depicted in Figure 3. Unmodified titanium is typified by a light grey colour. For CGS, a<br />

greyish titanium coating can be deposited without substrate overheating. Due to the high kinetic particle impact,<br />

deformation of the thin steel sheet by the peening effect is visible. The HVAF-coating is characterised by a<br />

dark deposit. For this reason, the category “High” is given for the oxidation of titanium in Figure 3. Substrate<br />

deformation is negligible in this case but overheating with blue tempering colours can be an issue. In HVOF,<br />

because of the comparably short stand-off distance of dw = 180 mm, deformation and steel tempering are<br />

visually observed.<br />

Figure 3. Results of the visual inspection after coating deposition<br />

To investigate the coating structure, SEM images of the three coatings are illustrated in Figure 4. The CGSand<br />

HVOF-coating were embedded, grinded and polished metallographically. The HVAF-coating,<br />

dc = 42 ± 9 µm, was cut with a diamond saw and was polished by ion beam at the Fraunhofer IMWS, Halle,<br />

Germany. By this preparation technique, micro cracks are highlighted. Figure 5 shows coating roughness Rz,<br />

porosity Φ and coating thickness dc. For the maximum profile height Rz, n = 5 measurements are evaluated<br />

as a boxplot, Figure 5a). The boxplots depicts the median, the interquartile range in between the first and third<br />

quartile as well as the upper and lower outliers. In Figure 5b), the average coating porosity and the average<br />

coating thickness of n = 3 and n = 4 measurements are demonstrated. The error mark represents the standard<br />

deviation.<br />

Figure 4. Coating structures of investigated coatings, for CGS and HVOF by Thermo Fisher Phenom XL G2 at IOT and<br />

for HVAF by Zeiss Sigma at Fraunhofer CSP<br />

The coating structure of the HVAF-coating is comparably heterogenous as semi- and fully molten titanium<br />

particles are deposited. Even though the HVAF-structure is heterogenous, the coating roughness, as shown<br />

4<br />

<strong>DVS</strong> 393


in Figure 5, is comparably low which can be ascribed to the complete flattening of the plasticised particles. The<br />

fully molten particles are also strongly oxidised leading to a ceramic nature of the lamellae boundaries. As<br />

such, the lamellae boundaries represent a weak spot for mechanical stresses.<br />

At the particle impact, residual stresses are created by the thermal gradient, the high cooling rate and the<br />

difference in coefficients of thermal expansion. The oxidic lamellae boundaries cannot resist against the<br />

residual stress and form inter-lamellar cracks, red triangle, Figure 4. Trans-lamellar cracks, blue triangle,<br />

Figure 4, are observed as well due to residual stresses by particle shrinking. Inter- and trans-lamellar cracks<br />

are interconnected to a crack network. This crack network potentially allows electrolyte migration resulting in<br />

part damage by corrosion. Because of the crack network, the measured porosity in Figure 5 is higher than for<br />

the other coatings but constituted mayorly out of cracks.<br />

Figure 5. a) Box plot of maximum of profile height R z from the CLSM-analysis, magnification V = 200x, b) Column<br />

diagram showing average porosity and coating thickness from image analysis incl. standard deviation<br />

The analysis of the HVOF-coating shows that the coating is built-up from broader lamellae with a thin outer<br />

shell of oxides, Figure 4. After coating deposition, the metal sheet is bended by the peening effect leading to<br />

tensile stresses in the coating. The tensile stresses result in inter-lamellar cracking alongside the oxidised<br />

lamellae boundaries dominating this coating structure. The cracks propagate to the interface and cause partial<br />

delamination there. Consequently, coating cohesion is affected negatively by the oxidised lamellae.<br />

The CGS-coating exhibits a homogenous titanium deposit with low porosity of Φ ≈ 1%. Even though the<br />

peening effect is also strongly present in the CGS-coating, the coating cohesion is higher in this type of coating.<br />

Consequently, no lamellar cracking can be observed as the resistance against residual stresses is superior.<br />

The coating roughness majorly contributes to the coating thickness as the roughness is comparably high, but<br />

the coating thickness is relatively low. Regarding the requirements in a high coating density for the PEMWE<br />

application, the CGS-coating shows the most favourable structural properties.<br />

On a quantitative analysis by XPS, the surface area of the CGS-coating contains the lowest oxygen levels<br />

while the HVAF-coating surface contains the highest, see Table 2, which confirms the results from the visual<br />

impression. The XPS depth profiling indicates mainly TiO2 in the surface area of the HVAF-coating. According<br />

to the XPS-measurements, the oxygen content is 10% lower on the surface of the HVOF-coating than of the<br />

HVAF-coating.<br />

Table 2. Results from XPS-measurements, conducted with Thermo Fisher XPS Nexa G2 by Fraunhofer CSP, Halle,<br />

Germany, etching time t = 200 s, in a range of binding energy between -10 eV ≤ E ≤ 1,350 eV<br />

ω(Ti)<br />

in mass-%<br />

ω(O)<br />

in mass-%<br />

ω(C)<br />

in mass-%<br />

ω(N)<br />

in mass-%<br />

Other<br />

in mass-%<br />

CGS-Coating 87.5 9.1 0.3 1.2 1.9<br />

HVAF-Coating 59.6 32.8 1.6 1.4 4.6<br />

HVOF-Coating 71.4 24.7 0.4 0.9 2.6<br />

In the previous study [BHB+23], differences in the electrical behaviour were observed between CGS-coating<br />

and HVAF-coating. Accordingly, current transport was more inhibited on the surface of the HVAF-coating than<br />

of the CGS-coating. In addition, electrochemical passivation occurred faster on the surface of the HVAFcoating.<br />

These observations can now be explained by the more oxidic character of the HVAF-coating surface<br />

than of the CGS-coating surface identified by the XPS-measurements.<br />

<strong>DVS</strong> 393 5


4 Summary<br />

In conclusion, three high velocity thermal spraying technologies for titanium deposition are compared in this<br />

study. For the BPP application in a PEMWE cell, the substrate is of only s = 0.5 mm thickness. For each<br />

thermal spray technology tested, there is a different challenge.<br />

To start with HVAF, the thin coating deposited shows potential in terms of coating thickness and coating<br />

roughness. However, inter-lamellar and trans-lamellar cracking are observed being a potential driving force for<br />

corrosion beneath the coating. In addition, the highest level of oxidation is measured for this coating. Further<br />

coating development is necessary to stop the coating from cracking and to avoid extensive overheating.<br />

By setting a high lambda λ in the HVOF-process, lower oxidising conditions in the hot gas stream of the<br />

HVOF-process than in the investigated HVAF-process can be achieved. Yet, the deformation of the substrate<br />

by the peening effect seems to be critical as inter-lamellar cracking and coating delamination are induced.<br />

In contrast to HVOF and HVAF, the CGS-coating shows no cracking because of the superior coating cohesion.<br />

Furthermore, the surface area representing the contacting area to other stack components exhibits the lowest<br />

oxygen levels. The CGS titanium coating appears to be the most suitable coating for PEMWE application as<br />

the coating exhibits a coating density of up to ρ = 99% resulting in promising corrosion properties. While the<br />

overall coating properties are desirable, substrate deformation should not be underestimated and it will need<br />

further engineering to control the deformation.<br />

5 Outlook<br />

In this study, coating deposition is conducted on a sample level. In the future, the CGS-process is going to be<br />

scaled up by evaluating scale effects of larger coated metal sheets. Apart from the structural properties,<br />

electrochemical, electrical and mechanical properties are going to be examined.<br />

6 Acknowledgements<br />

The H2Giga-project StacIE (03HY103B) is funded in the context of the competition of ideas<br />

“Wasserstoffrepublik Deutschland” by German Federal Ministry of Education and Research. The authors like<br />

to thank the project partner Fraunhofer IMWS, Halle, Germany for monitoring and conducting measurements<br />

on behalf of the project StacIE.<br />

6<br />

<strong>DVS</strong> 393


7 Literature<br />

[BHB+23]<br />

[GAG+14]<br />

[LFM+15]<br />

[LLH+87]<br />

[LT96]<br />

[NR15]<br />

K. Bobzin, H. Heinemann, E. Burbaum, K. Radermacher, N. Bagcivan, M. Öte, N. C. Kruppe,<br />

Passivation of Thermally Sprayed Ti-coatings for Bipolar Plate Application in PEMWE, in:<br />

European Federation of Corrosion EUROCORR 2023, 2023, ISBN<br />

A. S. Gago, A. S. Ansar, P. Gazdzicki, N. Wagner, J. Arnold, K. A. Friedrich, Low Cost Bipolar<br />

Plates for Large Scale PEM Electrolyzers, ECS Meeting Abstracts MA2014-02 21 (2014), 1236<br />

M. Langemann, D. L. Fritz, M. Müller, D. Stolten, Validation and characterization of suitable<br />

materials for bipolar plates in PEM water electrolysis, International Journal of Hydrogen Energy<br />

40 35 (2015), 11385–11391<br />

E. Lugscheider, P. Lu, B. Häuser, D. Jäger, Optimized vacuum plasma-sprayed titanium coatings,<br />

Surface and Coatings Technology 32 1-4 (1987), 215–226<br />

J. Luo, K. Tao, Quantitative X-ray diffraction analysis of surface layers by computed depth<br />

profiling, Thin Solid Films 279 1-2 (1996), 53–58<br />

D. E. Newbury, N. W. M. Ritchie, Performing elemental microanalysis with high accuracy and high<br />

precision by scanning electron microscopy/silicon drift detector energy-dispersive X-ray<br />

spectrometry (SEM/SDD-EDS), Journal of materials science 50 2 (2015), 493–518<br />

[Pou74] M. Pourbaix, Atlas of Electrochemical Equilibria in Aqueous Solutions: NACE International, 1974,<br />

ISBN 978-1-5231-3055-9<br />

[RKA+98]<br />

[RSS+21]<br />

[SD20]<br />

[SGG11]<br />

[SLL98]<br />

[SPC+98]<br />

S. X. Ren, E. A. Kenik, K. B. Alexander, A. Goyal, Exploring Spatial Resolution in Electron Back-<br />

Scattered Diffraction Experiments via Monte Carlo Simulation, Microscopy and Microanalysis 4 1<br />

(1998), 15–22<br />

N. Rojas, M. Sánchez-Molina, G. Sevilla, E. Amores, E. Almandoz, J. Esparza, M. R. Cruz Vivas,<br />

C. Colominas, Coated stainless steels evaluation for bipolar plates in PEM water electrolysis<br />

conditions, International Journal of Hydrogen Energy 46 51 (2021), 25929–25943<br />

F. A. Stevie, C. L. Donley, Introduction to x-ray photoelectron spectroscopy, Journal of Vacuum<br />

Science & Technology A: Vacuum, Surfaces, and Films 38 6 (2020)<br />

T. Smolinka, M. Günther, J. Garche, Stand und Entwicklungspotenzial der Wasserstoffelektrolyse<br />

zur Herstellung von Wasserstoff aus regenerativen Energien, Kurzfassung des<br />

Abschlussberichts, NOW-Studie:, 2011<br />

L. Strüder, P. Lechner, P. Leutenegger, Silicon drift detector – the key to new experiments, The<br />

Science of Nature 85 11 (1998), 539–543<br />

A. E. Segall, A. N. Papyrin, J. C. Conway, D. Shapiro, A cold-gas spray coating process for<br />

enhancing titanium, JOM 50 9 (1998), 52–54<br />

<strong>DVS</strong> 393 7


Plasma-spray deposition of Na3Zr2Si2PO12 electrolyte for high<br />

performance all solid-state sodium-ion battery<br />

Xiao-Chen Bu, Nan Chen, Xiao-Tao Luo, Chang-Jiu Li *; State Key Laboratory for Mechanical Behavior of<br />

Materials, School of Materials Science and Engineering, Xi'an Jiaotong University, Xi'an/China. Email address:<br />

licj@mail.xjtu.edu.cn.<br />

Abstract<br />

All solid-state sodium-ion batteries (ASS-SIBs) have great potential for application to large-scale energy<br />

storage devices due to their safety advantages by avoiding flammable organics and the abundance of sodium.<br />

In this study, plasma spraying was used to deposit Na3Zr2Si2PO12 (NZSP) electrolyte for assembling<br />

high performance ASS-SIBs. NZSP electrolyte layers were deposited at different spray conditions using<br />

NZSP powders in different particle sizes. The factors influencing the microstructure and compositions of<br />

NZSP layers were examined by characterizing the compositions of splat and cross-sectional microstructures<br />

of the deposits. It was found that the preferential evaporation loss of Na and P elements occurs severely to<br />

result in a large composition deviation from initial powders and spray particle size is key factor which dominates<br />

their evaporation loss. The APS NZSP electrolytes present a dense microstructure with well bonded<br />

splats which is attributed to low melting point of NZSP. The apparent porosity of the as-sprayed NZSPs was<br />

lower than 3 %. The effect of annealing on the microstructure of APS NZSP was also investigated. The performance<br />

of typical APS NZSP was also evaluated by assembling an ASS-SIB battery with APS NaxCoO2<br />

(NCO), Na3Zr2Si2PO12 (NZSP) and Li4Ti5O12 (LTO) as cathode, electrolyte and anode, respectively. Results<br />

showed that columnar-structured grains with a chemical inter-splat bonding were formed across the interfaces<br />

between electrodes and electrolyte. There is no evidence of inter-diffusion of zirconium, cobalt and silicon<br />

across the NCO/NZSP interface. With the preliminary battery, the solid electrolyte exhibited an ionic conductivity<br />

of 1.21 × 10 -4 S cm -1 at 200 o C. The SIB can operate at 2.5 V with a capacity of 10.5 mA h g -1 at current<br />

density of 37.4 μA cm -2 .<br />

Keywords: Sodium-ion battery, NASICON electrolyte, plasma spray, capacity<br />

1 Introduction<br />

Recently sodium ion batteries (SIBs) have drawn great attention due to their great advantages: the abundance<br />

of sodium (2.6 %, while lithium only accounts for 0.06 %), low mining costs and similar electrochemical<br />

performance compared with lithium ion batteries [1-4]. The cost-effective manufacturing of SIBs with absolute<br />

safety are beneficial for large-scale electrochemical energy storage system [2].<br />

For traditional SIBs, liquid organic electrolyte are widely used, which still suffer from severe safety problems<br />

such as liquid leakage and risk of fire [4, 5]. The solid-state Na-ion batteries are of great interest due to their<br />

excellent safety advantage within a large operation temperature range and their potentially high energy densities<br />

when compared to liquid counterparts [6, 7]. NASICON-type electrolytes with a general formula of<br />

Na1+xZr2SixP3-xO12 (0≤x≤3) were first reported by Goodenough and attracted great attention for its high ionic<br />

conductivity (10 -4 -10 -3 S/cm, RT) and chemical stability in air [4, 8]. Ran et al. found that the Sc and Ge codoping<br />

of NZSP can stabilize the rhombohedral phase at RT and significantly boost the sodium ion transfer<br />

[9]. For the synthesis of ceramic electrolyte, solid-state reaction is commonly used. However, the high<br />

reacting temperature (>1200 o C) and long sintering duration (>10 h) may cause the element diffusion across<br />

electrolyte/electrode interface [10-12]. Thus, it is difficult to make a compromise between the sintering temperature<br />

of electrolyte and interface control of electrolyte/electrodes of ASSIBs.<br />

Air plasma spraying (APS), as an efficient and economic coating technique, is theoretically capable of depositing<br />

all kinds of ceramics which have a melting point [13]. For typical as-sprayed deposits of refractory ceramics,<br />

more than 2/3 of the interface between splats are not bonded, which severely reduces the transportation<br />

passage of ions and results in a much lower ionic conductivity along the thickness direction compared<br />

with bulk material [13]. Yao et al. have reported that there exists a critical bonding temperature for certain<br />

ceramic to achieve full bonding between adjacent splats during plasma spraying [14]. The critical bonding<br />

temperature is proportional to the melting point of ceramic coating materials. With ceramic materials of a<br />

melting point lower than 1450 o C, their critical bonding temperature is reduced to around or lower than the<br />

normal temperatutre of 25 o C. This means that with such ceramic materials it becomes easy to deposit a<br />

dense layer with well bonded splats. Fortunately, the NASICON-type electrolytes belong to such ceramic<br />

materials. Besides the microstructure, the chemical composition is also crucial for the ionic conductivity of<br />

NZSP. It has been proved that the extremely high temperature heating of plasma jet usually causes the preferential<br />

evaporation of the constitute in complem ceramics with the high saturation vapor pressure and leads<br />

to the deviation of chemical compositions from stoichiometric ratio of feedstock [15-17]. Zhang et al. reported<br />

8<br />

<strong>DVS</strong> 393


that using sinter-crushed La0.8Sr0.2Ga0.8Mg0.2O3 (LSGM) electrolyte with a large particle size can significantly<br />

reduce the Ga evaporation loss during plasma spraying of LSGM [17]. For NZSP, the sodium and phosphorus<br />

elements prefer to evaporate due to their relatively high saturation vapor pressure. Yang et al. found that the<br />

volatilization of Na and P elements in NZSP promoted the formation of ZrO2 content in NASICON matrix [18].<br />

Therefore, it is important to understand the evolution behavior of NZSP particles during plasma spraying and its<br />

influence on the chemical composition of the deposits.<br />

In this work, APS was used to deposit NZSP electrolyte at different plasma arc power using Na3Zr2Si2PO12<br />

powders. The effects of spray particle sizes, plasma arc power and annealing treatment on the microstructure<br />

and chemical composition of APS NZSP deposits were systematically investigated. The effect of chemical<br />

composition on the phase composition of NZSP deposit was examined. Moreover, a preliminary battery was<br />

assembled to investigate the electrochemical performance of the APS-sprayed battery.<br />

2 Experimental Procedures<br />

2.1 Spray Material Synthesis<br />

Na3Zr2Si2PO12(NZSP) was synthesized by the solid-state reaction, where the precursor powders Na2CO3, ZrO2,<br />

SiO2, and (NH4)2HPO4 were ball-milled in anhydrous ethanol solvent in the above ratio for 8 h and calcined in<br />

air at 800 o C for 12 h. Next, NZSP was ball-milled for 16 h to get fine powders. The resulting powders were<br />

mechanically pressed into pellets with a compressive pressure of 200 MPa for 2 min. Finally, the pellets were<br />

sintered at 1150 o C for 6 h to obtain the compact NZSP. The compact NZSPs were crushed to obtain spray<br />

powders. Ultrasonic cleaning was used to remove the micro-sized powder (


2.2 Preparation of APS NZSP Deposits<br />

Plasma spraying was carried out by a commercial plasma spray system (GP-80, Jiujiang, China). 430 stainless<br />

steel buttons (15 mm in diameter and 1 mm in thickness) with surface grit-blasted were used as the<br />

substrate to deposit NZSP electrolyte. The plasma jet was generated using a mixture of argon and hydrogen<br />

gases under different spray parameters, which are shown in Table 1. During plasma spraying, the plasma<br />

arc power was changed in three different levels of 32, 36 and 40 kW by altering arc current, while all other<br />

spray parameters were kept constant. To ensure splat interface bonding, the NZSP deposits were prepared<br />

at a deposition temperature of 300 °C. The isolated splats were also deposited on the polished substrate<br />

surface at the deposition temperature of 300 °C at a rapid torch traverse speed of 1000 m/s to examine the<br />

effect of spray particle size on the vaporization loss of Na and P elements. To investigate the effects of the<br />

annealing on the electrical property of NZSP deposits, they were annealed in air at 600 °C, 800 °C and<br />

1000 °C for 2 h, respectively.<br />

Table 1. Plasma spray parameters.<br />

Parameters<br />

Value<br />

Arc current (A) 550, 620, 690<br />

Arc power (kW) 32, 36, 40<br />

Primary gas (Ar) (SLPM) 45<br />

Auxiliary gas (H2) (SLPM) 4<br />

Spray distance (mm) 80<br />

Torch traverse speed (mm/s) 450<br />

2.3 Characterization of the Microstructure and Composition of the Deposits<br />

The surface morphology and cross-sectional microstructure of the powders and deposits were observed<br />

using scanning electron microscopy (SEM, MIRA 3 LMH, TESCAN, Czech). The apparent porosity and ZrO2<br />

content of the deposits were estimated by digital image analyzing method according to the ISO/TR<br />

26946:2011(E) Standard. In the cross-section images of the well-polished specimens, the pores are present<br />

in the coating in a darker contrast than other areas, while the ZrO2 phase is presented in a whiter contrast.<br />

After the binarization, the apparent porosity and ZrO2 content were obtained from the area ratios of pores<br />

and ZrO2 to the total area of specimen. The elemental compositions of the samples were analyzed by the<br />

energy dispersive spectrum (EDS). The crystal structure was characterized by X-ray diffraction (XRD, D8<br />

ADVANCE) analysis with a step rate of 2° min -1 using Cu Kα radiation source in a 2θ range of 10-60°. The<br />

profile and volume of the individual splats were measured using three-dimensional (3D) confocal laser scanning<br />

microscopy (OLS5000, OLYMPUS, Japan).<br />

2.4 Characterization of Electrochemical Performance of ASS-SIB<br />

The functional layers of ASS-SIB battery were deposited in the order of NCO, NZSP and LTO on the<br />

430 substrate using APS at a plasma arc power of 40 kW. Then, silver paste (82%, DAD-87, resistivity<br />

< 5.0×10 −4 Ω·cm) was coated on the surface of both the LTO electrode and the substrate as current collectors.<br />

The APS-sprayed battery was tested in the range of 0.5-2.5 V on the Zahner battery testing system<br />

(Zennium X). The EIS was characterized using CS350 electrochemical workstation (Solartron SI 1260/1287<br />

impedance analyzer) with an AC amplitude of 10 mV in frequency range from 0.1 Hz to 1MHz. The impedance<br />

data were fitted by the ZView software (Scribner Associates Inc). The ionic conductivity (σ) is computed<br />

using equation:<br />

σ = l / (A × R) (2-1)<br />

where l and A are the thickness of deposits and the area of silver current collector, respectively.<br />

3 Result and Discussion<br />

3.1 Effect of Spray Particle Size on the NZSP Splat Composition<br />

The NZSP splats were deposited on the polished alumina substrates with a preheating temperature of<br />

300 °C. Figure 2(a) shows the morphologies of the splats deposited at a plasma arc power of 40 kW. Most of<br />

the splats exhibited a regular disk shape since the spray particles were fully molten before impinging on the<br />

surface of substrate. A few of them exhibited a semi-molten state because of the poor heat transfer within<br />

large particles. The single isolated splat seen from Figure 2(b) showed a smooth surface without cracks,<br />

which may be attributed to the high deposition temperature which reduced the thermal mismatching stress<br />

with substrate. Only small concaves in a black contrast were distributed on the surface of splats due to the<br />

gas entrapment during spraying process.<br />

10<br />

<strong>DVS</strong> 393


(a)<br />

(b)<br />

Figure 2. Morphologies of (a) NZSP splats deposited on the polished alumina substrate at plasma power of 40 kW, (b)<br />

enlargement of the single isolated splat.<br />

Figure 3 shows the effects of the particle diameter and plasma power on the molar ratio of Na and P to Zr for<br />

isolated NZSP splats. The molar ratio of Na to Zr varied from 1.5 in the original powder to less than 0.8, while<br />

that of P to Zr varied a similar tendency from 0.5 in original powder to less than 0.2. It is evident that with the<br />

increase of the spray particle size, the molar ratios of both the Na/Zr and P/Zr increased. When the particle<br />

size is less than 30 μm (stage I), the evaporation losses of both Na and P under a plasma arc power of<br />

40 kW are more intensive than those of 32, 36 kW, which can be attributed to the more intense mass transfer<br />

under higher plasma power. However, when the particle size was increased from 30 to 40 μm (stage II), the<br />

evaporation loss tendency of Na and P was similar under different plasma powers. Moreover, no apparent<br />

Na and P losses were observed when the particle size became larger than 40 μm (stage III). Therefore, it is<br />

clear that the plasma power has significant impact to the evaporation loss of the spray particles having a<br />

particle size less than 30 μm. Accordingly, the Na and P evaporation losses mainly occurs to the particles<br />

less than 40 μm.<br />

(a)<br />

(b)<br />

Figure 3. Effect of particle size on the atomic ratio of (a) Na and (b) P to Zr at different plasma powers.<br />

3.2 Effect of Powder Particle Size on the Microstructure of NZSP Deposits<br />

Figure 4 shows the cross-sectional microstructure of the deposits prepared by APS under plasma arc power<br />

of 40 kW using feedstock powders with three different particle size ranges. The F-NZSP and M-NZSP deposits<br />

exhibited dense microstructures. More pores are present in L-NZSP deposit than other deposits. With<br />

EDS point analysis, the small block regions in a bright white contrast in Figure 4(a) are recognized as Zr and<br />

O with an atomic ratio of 27.32 to 72.68. Assisted with the XRD patterns in Figure 6(a), it is evident that<br />

these white regions are corresponded to ZrO2 phase, which may be evolved with the severe Na, P evaporation<br />

loss during plasma spraying. The cross-sectional microstructure of the F-NZSP-40kW deposit after annealing<br />

at 1000 o C is shown in Figure 4(d). The annealed deposit exhibits a similar dense microstructure.<br />

The porosity of the annealed deposit slightly increased, which cound be attributed to the sintering of NZSP<br />

deposit.<br />

<strong>DVS</strong> 393 11


(a)<br />

(b)<br />

(c)<br />

(d)<br />

Figure 4. Cross-sectional microstructures of NZSP deposits prepared with (a) fine powder, (b) medium powder and (c)<br />

large powder under the plasma arc power of 40 kW. (d) F-NZSP deposit annealed at 1000 o C.<br />

The effect of plasma arc power on the porosity of the NZSP deposits were shown in Figure 5(a). The porosity<br />

was significantly increased with the increase of the particle size from 30-50 μm to 60-75 μm. It was observed<br />

that the dense NZSP deposit can be obtained with fine powders (30-50 μm) at plasma arc power of 40 kW<br />

with a lowest apparent porosity of 0.8 %. From Figure 5(b), the ZrO2 content of F-NZSP deposits was higher<br />

than other deposits and reached to 6.2-6.5 %. For M-NZSP and L-NZSP deposits, the ZrO2 content are below<br />

2 %, which can be attributed to the less evaporation loss of Na and P in M-NZSP and L-NZSP deposits.<br />

Moreover, it was recognized that the effect of plasma arc power on the porosity and ZrO2 content of the deposits<br />

are not significant.<br />

(a)<br />

(b)<br />

Figure 5. Effect of particle sizes on the apparent porosity (a) and ZrO2 content (b) of NZSP deposits.<br />

12<br />

<strong>DVS</strong> 393


The XRD patterns of APS-sprayed NZSP deposits along with feedstock powders in different sizes are shown<br />

in Figure 6(a). The original powder exhibited a crystal structure similar to the standard XRD pattern of monoclinic<br />

NZSP (m-NZSP, PDF 84-1200), and the peaks of impure phase of monoclinic ZrO2 (m-ZrO2, PDF 83-<br />

0941) were observed at 2θ = 28° and 31.5°. For the as-sprayed deposits, a new phase of tetragonal ZrO2 (t-<br />

ZrO2, PDF 79-1767) was observed, which resulted in the obvious intensity increase of the major peak at 2θ<br />

angle of ~30.4° and the appearance of a new peak at 2θ angle of 35.3°. The ZrO2 phase was formed due to<br />

the evaporation loss of Na and P elements [18]. It was observed that the peak intensity of t-ZrO2 phase was<br />

higher in F-NZSP than M-NZSP and L-NZSP deposits at 2θ of 35.3°. The appearance of t-ZrO2 can be attributed<br />

to the rapid solidification process of plasma spraying, which preserved the high-temperature phase<br />

to room temperature .<br />

Figure 6(b) shows the XRD patterns of F-NZSP-40 deposits after annealing at different temperatures. When<br />

the annealing temperature was lower than 800 °C, the XRD patterns of NZSP were similar to that of the assprayed<br />

NZSP. From 800 °C to 1000 °C, the relative peak intensities at 2θ = 19.2° and 19.8° indicating major<br />

phase of m-Na3Zr2Si2PO12 increased, while that of t-ZrO2 at 2θ = 35.3° decreased. These fact revealed<br />

that the size distribution of feedstock powders and annealing temperature both have significant impact on the<br />

crystal structure of plasma-spray NZSP deposits.<br />

(a)<br />

(b)<br />

Figure 6. XRD patterns of (a) as-sprayed NZSP deposits with different feedstock powders at plasma power of 40 kW. (b)<br />

F-NZSP-40 deposits annealed at different temperatures.<br />

3.3 Performance of ASS-SIB Assembled by Plasma Spraying<br />

A preliminary ASS-SIB, consisting of a NCO cathode, NZSP electrolyte and LTO anode, was assembled by<br />

APS. All of the functional layers present dense microstructure and are well-bonded across the interfaces<br />

between electrodes and electrolyte, as shown in Figure 7(a) and (c). From element mapping with EDS, there<br />

was no evidence of interdiffusion of zirconium, cobalt and titanium across the interface between electrodes<br />

and electrolyte.<br />

<strong>DVS</strong> 393 13


(a)<br />

(b)<br />

(c)<br />

(d)<br />

Figure 7. (a) Cross-sectional SEM images of NCO-NZSP interface and EDS-mapping of (b) cobalt and zirconium. (c)<br />

Images of LTO-NZSP interface and EDS-mapping of (d) titanium and zirconium.<br />

Figure 8 shows the electrochemical performance of the cell operated at 200 o C. The evolution of the impedance<br />

of the NaxCoO2/NZSP/LTO battery has been analyzed based on the impedance spectrum in Figure<br />

8(a). From the fitted NZSP bulk resistance Rbulk ≈ 582.4 Ω, the ionic conductivity of the electrolyte can be<br />

calculated to 1.01 × 10 -4 S/cm at 200 o C using equation (2-1). Figure 8(b) shows the galvanostatic cycling of<br />

the cell between 0.5 and 2.5 V at 200 o C, which exhibited a capacity of 10.5 mA h g -1 for a current rate of<br />

0.5C (37.4 μA cm -2 ).<br />

(a)<br />

(b)<br />

Figure 8. (a) Impedance spectrum and (b) capacity of a plasma-sprayed NaxCoO2/NZSP/LTO ASS-SIB.<br />

14<br />

<strong>DVS</strong> 393


4 Conclusions<br />

The NZSP electrolytes were prepared by APS with feedstock powders in three different size ranges. The<br />

effect of powder size, spray parameters and annealing were examined to clarify their impact on the microstructure<br />

and chemical composition of the NZSP electrolytes. Moreover, a NaxCoO2/NZSP/LTO preliminary<br />

battery was assembled by APS. The main conclusions can be drawn as follows.<br />

1. The dense NZSP deposits with well-bonded splats were prepared by APS using NZSP sinter-crushed<br />

powders. The porosity of the deposit could be reducded to less than 3.5 % with medium sized powders<br />

in a size range of 50 - 60 μm.<br />

2. The evaporation loss of Na and P occurred which resulted in the formation of ZrO2 phase during plasma<br />

spraying. Results show that the evaporation loss can be alleviated when the particle size is larger than<br />

40 μm.<br />

3. The annealing has a limited impact on the microstructure of deposits. However, the high temperature<br />

annealing (>800 o C) promotes the recovery of NASICON structure.<br />

4. The preliminary ASS-SIB battery assembled with NZSP of an ionic conductivity of 1.01 × 10 -4 S/cm at<br />

200 o C exhibited a capacity of 10.5 mA h g -1 at 0.5-2.5 V and a current density of 37.4 μA cm -2 .<br />

Acknowledgments The present project is financially supported by the National Key Research and Development<br />

Program of China (2021YFB4001400).<br />

Literature<br />

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via magnetron sputtering for stable and long-cycle life lithium metal batteries, J. Power Sources, 2017.<br />

342: 175-182.<br />

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SICON solid electrolyte for an all-solid-state NaxCoO2/NASICON/Na sodium model battery with stable<br />

electrochemical performance, J. Power Sources, 2019. 409: 86-93.<br />

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deposits, J. Therm. Spray Techn., 2002. 11(3): 365-374.<br />

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molten ceramic droplet to a substrate after high-speed impact, Acta. Mater., 2016. 119: 9-25.<br />

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Gd2O3 Preferential Vaporization During Plasma Spraying of Gd2Zr2O7, J. Therm. Spray Techn., 2020.<br />

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[17] S.L. Zhang, T. Liu, C.J. Li, S.W. Yao, C.X. Li, G.J. Yang, and M.L. Liu, Atmospheric plasma-sprayed<br />

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16<br />

<strong>DVS</strong> 393


Cold Atmospheric Plasma Metallization of Power Semiconductor<br />

Devices with CuSn Pseudo-Alloys for Diffusion Soldering<br />

Manuela Ockel, Aleyna Gökçen, Bettina Ottinger, Matthias Petersen, Christian Voigt, Jörg Franke<br />

Cold atmospheric plasma spraying is used to produce thin coatings of copper and tin between 20-80 µm thickness<br />

for use in diffusion soldering. This study presents an alternative process to apply composite solders<br />

directly onto power electronic bare dies. The formation of intermetallic phases may be promoted by the homogeneous<br />

distribution of the Cu and Sn particles as they are presented not in a layered structure but as a pseudo<br />

alloy within the coating. The Cu and Sn powder is mixed in situ using two powder conveyors, enabling adjustable<br />

mix ratios. The presented approach has been shown to produce a homogeneous particle distribution<br />

within the coating. Furthermore, preliminary experiments indicate the feasibility of the technology for applications<br />

in diffusion soldering.<br />

1 Introduction<br />

Efficient modules are crucial for the conversion of energy in electronic systems. The reliability of power modules<br />

directly impacts functionality, cost effectiveness and lifetime. To realize the full potential of Wide-Band-<br />

Gap semiconductors, the adjacent assembly and interconnection technologies need to have high-temperature<br />

stability and must support efficient cooling. While silver sintering with nano-particles is an established hightemperature<br />

die attach technology (> 300 °C), it uses high pressure and expensive materials to establish the<br />

connection. For working at high temperatures (> 250 °C) gold-added solder pastes can be used. The interconnecting<br />

materials are either provided as a paste or preform, or are deposited on one or both joined surfaces<br />

for example by electroplating [1]. Diffusion soldering, Trans-Liquid-Phase Soldering (TLPS) or Solid Liquid<br />

Inter-Diffusion technology (SLID) is used to create intermetallic phases (IMP) between a higher (e.g. copper)<br />

and lower (e.g tin) melting material where die interconnection has a higher remelting temperature than the<br />

material of the joining surfaces or the processing temperatures [2]. Cu atoms dissolve into molten Sn and form<br />

Cu6Sn5 and Cu3Sn. Syed-Khaja [2] used the Cold Atmospheric Plasma Metallization (CAPM) to apply Cu<br />

particles or Cu layers onto a printed Sn-based solder layer. In this study, we aim to eliminate the solder paste<br />

printing by directly spraying lead free “dry-solder” in combination with Cu particles onto the substrate, using<br />

CAPM. Thereby evaluating the feasibility of the technology to produce homogeneous copper tin composites<br />

by combing two powders in situ. The resulting coating is a pseudo alloy where the two materials are mechanically<br />

joined, yet the materials maintain their interfaces. The alloying is only promoted during diffusion soldering.<br />

Additionally, the preforms introduced in Ottinger et. Al. [3] – a layered structure of Cu and Sn (see Figure 1, b)<br />

– are combined with a direct Cu metallization of the backside of the bare die. The metallization in this paper is<br />

similar to the front side metallization summarized in Ockel et. Al [4], where pure Cu coatings between<br />

20-100 µm are applied via cold atmospheric plasma metallization to apply thermo-mechanical bond buffers to<br />

enable Cu-based top-side interconnections, e.g. ultrasonic heavy Cu wire bonding.<br />

The diffusion soldering process can be divided into four steps, as depicted in Figure 1. Firstly, the interlayer<br />

materials have to be set up (1). Secondly, the materials are heated to a specified bonding temperature to<br />

liquefy the low-melting layers (2) under mechanical pressure. Subsequently, the assembly is held at temperature<br />

until the liquid has isothermally solidified due to interdiffusion (3). Lastly, the bond can be homogenized<br />

by thermally treating the substrate several hours (4). The latter is dependent on the technical and economical<br />

requirements of the bond. There are several approaches to set up the interlayer materials (Figure 1, a-c)).<br />

Usually the materials are layered vertically and exist as a combined preform or solder and metallization combination.<br />

The preform can have several layers of Cu and Sn. Horizontal approaches where Cu and Sn pastes<br />

were applied side by side are also possible. However, a composite solder – a homogenous distribution of Cu<br />

and Sn –is beneficial, since the formation of IMPs is dependent on the distances between the two materials<br />

and can be minimized with this approach. The composite production can differ from using solder pastes with<br />

Cu and Sn particles, coating Cu particles into a Sn-based paste or the direct deposition of Cu and Sn particles<br />

via thermal spraying as introduced in this paper.<br />

<strong>DVS</strong> 393 17


Figure 1. Process steps of TLPB for die attachment in power modules<br />

The cold atmospheric plasma metallization has been optimized for non-destructive, low temperature deposition<br />

of Cu particles onto bare dies [4, 5]. Braun et. Al. [6] previously utilized a similar setup to applying a tin coating<br />

with CAPM as well. Comparable plasma spraying processes use an argon-based primary gas supplemented<br />

with He, H2, or H2-H2. The arc current varies between 500 to 1000 A, powder feed rates are usually between<br />

6-9 kg/h and particle velocities range from 600 to 2300 mm/s [7]. The adapted process in [5] is located at 300 A<br />

arc current and can convey around 0,4 kg/h powder, suitable for thin coatings. The particle velocity could be<br />

reduced to 200 m/s in comparison to 600-1000 m/s copper particles in cold spraying, which makes it suitable<br />

for coating sensitive substrates. Cold spray is usually used for coatings with high electrical conductivity due to<br />

their low oxide content since the particles are barely melted [8]. Besides recrystallisation, annealing under a<br />

oxygenated atmosphere is used in [5, 9] to reduce the copper oxides which were formed during spraying in<br />

ambient atmosphere. Tin melts at 232 °C whereas copper melts at 1083 °C, which makes the combination of<br />

these materials in one process challenging, typically the process parameters are optimized for mono-material<br />

applications.<br />

2 Experimental Setup<br />

The experiments were performed at the institutes Plasma Coating Unit (PCU) with ambient atmosphere (see<br />

Figure 5, a). The setup comprises a heating stage which serves as a work piece carrier and is mounted onto<br />

a six-axis articulated arm robot for trajectory flexibility (see Figure 5, a). The plasma torch is permanently<br />

mounted in a stationary position for stability of the powder feeder rates (see Figure 5 b). The in situ mixing of<br />

the powder takes place after the particles enter the plasma flame from opposite sides. As a substrate, siliconbased<br />

thyristors (6.5 x 6.5 mm) with a silver backside-metallization are used. The coating geometry is defined<br />

by a laser-cut shadow mask made of steel. The substrates are individually placed inside cavities and the mask<br />

is mounted on top (see Figure 5, c). The carrier gas (argon) is set to 3 l/min each. The primary plasma gas is<br />

argon (12 l/min) and is supplemented by an ArH2 secondary gas 2 l/min. An additional shroud gas comprised<br />

of nitrogen (N2) with five percent hydrogen (H2) is used to minimize oxidation. The plasma is ionized inside a<br />

rotationally symmetrical Cu laval nozzle and a tungsten cathode, ignited with the Plasmatron MC-60 with 200 A<br />

and a 24 VAC ignition device. The combined powder feed rate is 6 g/min with argon as a carrier gas set to<br />

6 l/min. For a standard Cu coating the deposition rate is around 20 µm per repetition of the coating as shown<br />

in [9, 10]. The same Cu powder is used which has spherical particles with d50 = 11,86 µm and d90 = 20,21 µm.<br />

Two different Sn powders were tested regarding their flowability. The first Sn powder has a particle size smaller<br />

than 63 µm and is droplet shaped. The second Sn power plasmadust® is spherical as well. For the in situ<br />

mixing of the powder each vibrational powder conveyor (Flowmotion) is equipped with one powder. The powders<br />

are combined in different ratios according to Table 2. The Cu to Sn ratio is varied between 100 % Cu and<br />

100 % Sn in twenty percent steps. The flow rate is determined before the coating by measuring the conveyed<br />

powder weight with the precision scale LS 2200 from Precisa with a solution of 0,01 g for 15 min. Each powder<br />

flow rate is determined individually in order to reach a combined deposition rate of 6 g/min. The particle temperature<br />

and velocity are analysed with the Spraywatch 2S from Oseir which is mounted to the robot. Before<br />

the coating of the bare dies a detailed analysis of the powders is carried out. To determine the fundamental<br />

differences the powders were analysed via SEM (scanning electron microscopy). The first powder is spherical,<br />

coated with a silicon layer according to an EDX analysis (see Figure 2) has a narrow particle size distribution<br />

and therefore similar properties to the Cu powder in [4]. The second powder is irregularly, droplet-shaped, has<br />

a smaller grain size and contains small particles, agglomerated with larger particles. The surface of the particles<br />

is uncoated and significantly rougher as well (see Figure 3). Besides tin, a significant amount of phosphorus<br />

was detected, however a silicon layer could not be measured.<br />

18<br />

<strong>DVS</strong> 393


Figure 2. SEM (a-c) and EDX (d) analysis of spherical Sn powder plasmadust®<br />

One prerequisite for defined homogeneous material distribution inside the coating is a coordinated powder<br />

feeding rate for each Cu-Sn ratio. The flow rate for the Cu powder is for each ratio consistently lower than for<br />

Sn. The flowing uniformity is similar for each powder. The flow rate for 20 % Sn is at the lowest limit of the<br />

powder conveyor and could not be further reduced and is therefore higher than 20 % Cu powder. The feed<br />

rate of the 20 % Sn series showed a consistent increase in the flow rate over time. This phenomenon was not<br />

observed for other series. The powder flow rates are depicted in Figure 4.<br />

Figure 3. SEM (a-c) and EDX (d) analysis of droplet-shaped Sn powder<br />

The particle temperatures and velocities were measured for each Cu-Sn ratio in Figure 4. The temperature<br />

measurement only provided results for experiments with Cu particles. The measurement for 100 % Sn did not<br />

provide any results which indicates a temperature less than 1000 °C The temperature resolution of the camera<br />

is limited to 1000 °C. TCu100% = 1933.5 °C for pure Cu, TCu80% = 1772.4 °C for 80 % Cu and for 20-60 % Cu ratio<br />

the temperature is between 1553.3 to 1655.3 °C. The particle velocity is lower for higher Cu particle shares.<br />

For 0-40 % Cu ratio the velocity is around 120 m/s. With increasing numbers Cu particles inside the plasma<br />

flame the velocity decreases to 105 m/s. The gas flow rates were not modified.<br />

Table 1. Flow rate parameters of Cu in powder conveyer one 1 and Sn in powder conveyor 2<br />

Cu powder, conveyor 1 Sn powder, conveyor 2<br />

Target<br />

share<br />

[%]<br />

Determined<br />

flow<br />

rate [%]<br />

Calculated<br />

weight<br />

[g/min]<br />

Target<br />

share<br />

[%]<br />

Determined<br />

flow<br />

rate [%]<br />

Calculated<br />

weight<br />

[g/min]<br />

100 30.0 6.0 0 0.0 0.0<br />

80 24.0 4.8 20 1.0 1.2<br />

60 20.0 3.6 40 2.0 2.4<br />

40 14.5 2.4 60 5.5 3.6<br />

20 5.5 1.2 80 8.0 4.8<br />

0 0.0 0.0 100 11.0 6.0<br />

<strong>DVS</strong> 393 19


Figure 4. Powder flow rates (left) and particle temperatures and velocities (right) of different Cu and Sn ratios<br />

The bare dies are placed into the cavities of the substrate carrier and fixed with a laser cut steel mask. The<br />

substrates are preheated to 130 °C. Before the first coating a plasma cleaning with the same plasma parameters<br />

but without particle injection is performed. The coating thickness is adjusted by repeating the process<br />

between one to six times.<br />

Table 2. Fixed and varied parameters of the experimental set-up of Cu-Sn<br />

∑ Samples Cu ratio [%] Sn ratio [%] Fixed parameters<br />

216 (6 samples<br />

per parameter<br />

combination)<br />

100 0<br />

Carrier gas flow rate [l/min] 3<br />

80 20 Primary plasma gas flow rate [l/min] 12<br />

CAPM<br />

60 40 Secondary plasma gas flow rate [l/min] 2<br />

40 60 Preheating [°C] 130<br />

20 80<br />

Temperature [°C] 180<br />

Annealing<br />

0 100 Duration [h] 7<br />

The thermal treatment introduced is performed for half of the samples for each parameter combination. The<br />

holding time is set to 7h at 180 °C under a N2H2 inert atmosphere in the Gero Carbolite GHA 12/300 tube<br />

furnace with a maximum oxygen content of 15 ppm. The trans-liquid phase soldering (diffusion soldering) is<br />

equivalent to the process presented in Ottinger et. Al. [3] and performed under a formic acid containing atmosphere.<br />

The standard soldering profile parameters temperature and pressure are not adjusted during soldering<br />

of different Cu-Sn ratios and for every substrate the same. Six bare dies are soldered onto a direct copper<br />

bonded (DCB) substrate consisting of copper and an insulating ceramic. For microscopical analysis the Scanning<br />

Electron Microscope Tescan Amber X with either an Everhart-Thornley detector (E-T) or LE BSE detector<br />

for highlighted material contrasts at low landing energies was used. The layer thicknesses were analysed via<br />

the laser scanning microscope Keyence VK-X3050. For the optical analysis a Leica DVM6 was used.<br />

20<br />

<strong>DVS</strong> 393


Figure 5. Setup of Plasma Coating Unit for in situ mixing and coating of Cu and Sn powder<br />

3 Results<br />

After the adjustment of the inline parameters a total of 216 bare dies were coated with different parameters. In<br />

order to avoid adhesion of the bare die during coating the mask geometry is smaller than the back side of the<br />

chip. The continuous reuse of the shadow mask during one series results in uneven edges of the coating as<br />

the mask edges are clogged with particles. This phenomenon is more pronounced for coatings with high Sn<br />

content (see Figure 6). As the layer thickness increases clearly visible smolder is deposited at the edges. Due<br />

to melting of deposited Sn on top of the mask solder splashes are visible on some of the bare dies. The edge<br />

resolution is higher for coatings with high Cu content and the smolder deposition is moved from the coating<br />

edges to the uncoated backside of the bare die. The varying Cu and Sn contents are directly visible after the<br />

coating (see Figure 6). The color changes from dark red to silver in proportion to the Sn content. The comparatively<br />

high thickness of the coating led to delamination of the coating with six repetitions for 80 and 100 % Cu<br />

content. The high thermo-mechanical induced stress destroyed the chip during the cooling of the substrate,<br />

not at the interface between pseudo-alloy the metallic contact of the semiconductor, but within the silicon.<br />

A detailed surface analysis shows the homogeneous distribution of Cu and Sn. In Figure 7 the surface of the<br />

coating with 20 % Cu and 80 % Sn is assessed in detail. With maximum magnification the scattered Cu particles<br />

are visible in the optical image (Figure 7, b). The microscopical SEM analysis emphasizes the even distribution<br />

of the splats (deformed particles). There are several unmolten Cu and Sn particles detectable at the<br />

coatings surface (Figure 7, d). The Sn splats are flatter and more irregular deformed were as the Cu particles<br />

form more even splats. Due to the high difference in the materials melting points the unequal behavior of the<br />

particles was expected. To confirm the even distribution for all Cu-Sn ratios an EDX analysis was performed<br />

for every combination. Besides Cu and Sn small contents of Oxygen and Carbon were detected (see Figure 8).<br />

The measured Cu and Sn contents are in- or decreasing proportional to the set powder ratios, but the measurement<br />

showed consistently lower contents of Cu or Sn as expected. Closest to the target Cu content is the<br />

coating with 100 % Cu. 96 % of the surface are copper (see Figure 8). For the series with 80 % Cu only 70 %<br />

Cu was measured and more Sn then expected (26 %). The results are similar for the series with 60 % Cu<br />

content and 40 % Sn content. For 40 % Cu the measured outcome is 56 % Cu, for 20 % Cu more than 30 %<br />

Cu content were detected. For 100 % Sn content only 88 % Sn were detected and 7 % Cu. This indicates<br />

different deposition rates for the two materials.<br />

Figure 6. Coated Bare Dies with 0-100 % Cu content, one and six coating repetitions in comparison<br />

<strong>DVS</strong> 393 21


Figure 7. Surface analysis of coating with 20 % Cu – 80 % Sn; a) & b) optical image and c) & d) SEM analyses with LE<br />

BSE detector for highlighted material contrast<br />

Figure 8. Qualitative EDX analysis of surface coatings with 0 % - 100 % Cu content with detailed element distribution for<br />

40 % Cu content and recorded energy spectrum<br />

To validate the homogenous material distribution inside the coating metallographic cross-sections of the were<br />

made. Without additional analysis the different Cu and Sn contents and their proportional deposition rate are<br />

visible as well as their influence on the copper oxidation. Exemplary cross-sections for each Cu content are<br />

depicted in Figure 9. Picture a) and b) also show a crack in the silicon due to the higher thermo-mechanical<br />

stress with increased Cu contents. The coating was carried out in oxygen-containing atmosphere. The resulting<br />

oxidation between the Cu layers is visible in picture a). With increasing Sn-content the copper oxidation is<br />

reduced, which is also visible in Figure 6. Cross-section b) – d) shows a relatively homogeneous distribution<br />

of Cu and Sn. Picture e) and f) have extremely low deposition rates. However, the thickness measurements<br />

and solder experiments show improved deposition rates for other bare dies.<br />

The quantification of Cu and Sn contents as well as pore distribution was done by measuring the area percentage<br />

of each material. Surface irregularities were excluded. The measurements are carried out after each<br />

process step. Before soldering, after soldering and after soldering with annealed substrates. Neither soldering<br />

with annealing under hydrogen containing atmosphere nor soldering without annealing showed significant<br />

changes in the distribution of Cu and Sn. The porosity increases significantly with lower Cu contents.<br />

22<br />

<strong>DVS</strong> 393


Figure 9. Metallographic cross-sections of coatings with 100 % a), 80 % b), 60 % c), 40 % d), 20 % e) and 0 % Cu f).<br />

The layer heights were measured via laser scanning microscopy. The overall average thickness for one coating<br />

repetition is 29.01 µm and for six repetitions 75.51 µm. For 100 % Cu the average deposition rate is 16.52 µm,<br />

which is roughly 10 µm lower than the presented deposition rates in Hensel et. Al. [5]. For 80 and 60 % copper<br />

content the deposition rate is around 19 µm. For 40 and 20 % Cu ratio the deposition rate is significantly lower<br />

with an average of 13.98 and 8.81 µm. A detailed look at each series shows a continuous decrease in the<br />

deposition rate during the coating procedure. For high tin contents clogging of the plasma nozzle was an issue.<br />

Insufficient cleaning leads to a reduction of the deposition rate. After cleaning the deposition rate for 100 % Sn<br />

is at 18.18 µm. The laval nozzle in Figure 10 shows one sided clogging as only the powder feeder on the<br />

opposite side conveys tin powder.<br />

Figure 10. Layer heights per repetition for different Cu ratios and Sn clogged laval nozzle.<br />

Half of the coated bare dies were annealed under hydrogen containing atmosphere. The pure copper coatings<br />

show significant improvement of their electrical conductivity proven in [9]. After annealing the six chips are<br />

placed onto a DCB for diffusion soldering. Between the pure copper coating and the DCBs preforms were<br />

placed, each connection in this series was established successfully. The other connections were visually inspected<br />

via radiography. Table 3. shows the number chips that showed initial adhesion after soldering. With<br />

increasing Sn content, the number of successful connection increases. The annealed samples have a slightly<br />

higher chance for a successful connection. For 100 % Sn every connection was successful. For higher coating<br />

<strong>DVS</strong> 393 23


thicknesses the molten tin was squeezed out, since the solder stamps were not adjusted individually for each<br />

bare die and formed Sn splashes.<br />

Figure 11 shows the metallographic cross-sections of the diffusion solder connections without additional preforms.<br />

Figure a) to c) show a gap between the DCB copper and the plasma sprayed coating. The quality of a<br />

successful connection could not be assessed via radiography. The cross-section shows insufficient adhesion<br />

for several connections which firstly had been classified as sufficient. A point connection distributed across the<br />

interface is likely. Only the coatings with high Sn content showed an almost continuous connection.<br />

Table 3. Successful connections (initial adhesion) after diffusion soldering dependent on the Cu content.<br />

Cu<br />

[%]<br />

Sn<br />

[%]<br />

Successful connections<br />

without annealing<br />

Successful connections<br />

with annealing<br />

80 20 0 2<br />

60 40 1 2<br />

40 60 1 3<br />

20 80 5 4<br />

00 100 6 6<br />

The addition of preforms improved the bare die adhesion significantly. With either annealed or not annealed<br />

copper coatings a connection could be established during soldering. The tin at the interface to the plasma<br />

sprayed coating flowed into the irregular surface. Whether an intermetallic phase has been formed at the<br />

interface has yet to be proven via SEM and Raman-Spectroscopy. The difference between annealed and not<br />

annealed substrates is clearly visible in Figure 12. Although diffusion soldering has been carried out under<br />

formic acid containing atmosphere the copper oxides could not be reduced significantly. Only the hydrogen<br />

reduction showed significant reduction of the copper oxides.<br />

Figure 11. Metallographic cross-sections of solder connections without additional preforms<br />

24<br />

<strong>DVS</strong> 393


Figure 12. Metallographic cross-sections of solder connections with additional preforms without (left) and with (right) annealing<br />

under hydrogen containing atmosphere<br />

4 Discussion<br />

The flow rates analysis showed the possibility to convey low powder rates for producing thin coatings. However<br />

spherical tin particles need to be used, since droplet-shaped particles could not be conveyed at all due to<br />

significant agglomerations before the powder could be. The additional silicon coating could improve flow rate<br />

stability and was not detected on the other powder. The conveyed power mass is dependent on the particle<br />

size, which is why always more tin than copper has been conveyed. However, the significantly lower melting<br />

temperature of tin lead to reduced deposition rates of Sn. The parameter and powder for Sn need to be optimized<br />

independently from Cu spraying. The clogging of the plasma nozzle occurred after only a few coatings<br />

were applied. This will need to be monitored closely since it reduces the deposition rate. The oxidization during<br />

spraying in oxygenated atmosphere needs to be minimized during or after the process. The thermal annealing<br />

under N2H2-atmosphere did not show any improvement regarding the oxidation. To inhibit diffusion before the<br />

soldering process the temperature was reduced to 130 °C to prevent Sn melting but did lead to a reduced<br />

reduction process of the oxides which usually occurs at temperatures above 350 °C. The Cu and Sn particles<br />

are horizontally and vertically homogeneously distributed which enables flexible adjustment of Cu-Sn ratios<br />

without mixing the particles before the power conveyors. The diffusion soldering worked for high Sn-contents<br />

(80 % and 100 % Sn), with increasing Cu contents the die attach did not work. The temperature and pressure<br />

during soldering has not been adjusted to account for different Cu contents. With less liquid tin the solid-liquid<br />

diffusion area, which is responsible the primary connection, is reduced drastically. With higher Cu contents the<br />

direct interface contacts between DCB and pseudo-alloy are larger in area with Cu and therefore solid-liquid<br />

diffusion is reduced. To ensure adhesion at the interface between DCB and coating an additional Sn layer<br />

could improve the adhesion. The soldering with preforms showed even distribution of Sn into the rough surface<br />

of the Cu coating. The soldering with formic acid was not able to reduce the copper oxides. Prior annealing at<br />

higher temperature however, reduced the oxides completely. For the analysis of IMP-formation further analysis<br />

has to be conducted. An IMP formation at the particle’s interfaces and its influence on the soldering process<br />

cannot be ruled out. If IMPs formed during soldering at the particle’s interfaces and the DCB-coating interface<br />

has to be proven as well.<br />

5 Conclusion<br />

The study proved that a direct coating of bare dies with Sn or Cu/Sn combinations via the cold atmospheric<br />

plasma spray process is possible without destroying the bare die. The distribution of Cu and Sn particles is<br />

uniform inside the coating. Even with oxygen residues diffusion soldering with high Sn contents was possible<br />

which shows potential of the technology. The diffusion soldering parameters need to be adjusted to the specific<br />

coating properties. An additional homogenization of the joint is an additional option as well. The inline process<br />

monitoring for Sn must be adjusted with particle monitoring for temperatures lower than 1000 °C. The efficiency<br />

and deposition rate needs to be analyzed and optimized in further research, since [10] showed, that the effective<br />

deposition of Cu particles is only at 20 % of the total power consumption. The deposition efficiency for tin<br />

is expected even lower, since the low melting point leads to evaporation of the material.<br />

6 Acknowledgements<br />

The scanning electron microscope which was used for the SEM and EDS analysis is funded by the Deutsche<br />

Forschungsgemeinschaft (DFG, German Research Foundation) – 442921285.<br />

<strong>DVS</strong> 393 25


Literaturverzeichnis<br />

[1] MYŚLIWIEC, M. und R. KISIEL. Die attachment Process Overview for High Power Semiconductors.<br />

In: 2023 46th International Spring Seminar on Electronics Technology (ISSE): IEEE, 2023, S. 1-5.<br />

ISBN 979-8-3503-3484-5<br />

[2] SYED-KHAJA, A. Diffusion Soldering for High-temperature Packaging of Power Electronics [online].<br />

Verfügbar unter: doi:10.25593/978-3-96147-163-8<br />

[3] OTTINGER, B., J. HOLVERSCHEID, S. KONIG, E. JERICHOW, S. LUNZ, M. SPRENGER, L. MUL-<br />

LER, C. GOTH und J. FRANKE. Reliability of lead-free solders for die attach in automotive power<br />

modules. In: 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC): IEEE, 2022,<br />

S. 409-413. ISBN 979-8-3503-9885-4<br />

[4] OCKEL, M., A. HENSEL, S. STEGMEIER und J. FRANKE. Plasma Powder Copper Coating on silicon<br />

substrates for copper wire bonds in comparison to state-of-the-art top-side interconnection technologies.<br />

In: Pan Pacific Microelectronics Symposium 2023<br />

[5] HENSEL, A., M. MUELLER, J. FRANKE und K.K. von PLATEN. Additive Copper Metallization of<br />

Semiconductors for Enabling a Copper Wire Bonding Process. In: 40th International Spring Seminar<br />

2017, S. 1-6<br />

[6] BRAUN, T., S. GREINER, J. FRANKE und D. DRUMMER. Additive Plasma Metallization of Spatial<br />

Ceramic Injection Molded Components. In: 12th International Congress Molded Interconnect Devices.<br />

Scientific Proceedings, 2016, S. 62-67. ISBN 978-1-5090-5427-5<br />

[7] FAUCHAIS, P.L., J.V. HEBERLEIN und M.I. BOULOS. Thermal Spray Fundamentals. Boston, MA:<br />

Springer US, 2014. ISBN 978-0-387-28319-7<br />

[8] SUDHARSHAN PHANI, P., D. SRINIVASA RAO, S.V. JOSHI und G. SUNDARARAJAN. Effect of<br />

Process Parameters and Heat Treatments on Properties of Cold Sprayed Copper Coatings [online].<br />

Journal of Thermal Spray Technology, 2007, 16(3), S. 425-434. ISSN 1059-9630. Verfügbar unter:<br />

doi:10.1007/s11666-007-9048-1<br />

[9] HENSEL, A., M. MÜLLER, K. KOHLMANN VON PLATEN und J. FRANKE. Additive Copper Metallization<br />

of Semiconductors for Enabling a Copper Wire Bonding Process. In: 2017 40th International<br />

Spring Seminar on Electronics Technology (ISSE). 10-14 May 2017. Piscataway, NJ: IEEE, 2017.<br />

ISBN 978-1-5386-0582-0<br />

[10] OCKEL, M., F. FUNK, L. JANISCH und J. FRANKE. Evaluation of the Cold Atmospheric Plasma<br />

Metallization of Bare Dies with Copper Through Life Cycle Assessment. In: WGP-Kongress 2023, S.<br />

417-427<br />

26<br />

<strong>DVS</strong> 393


Comparative Studies of SUS316L Layer Deposited by Conventional<br />

Laser Cladding and Extreme High Speed Laser Cladding<br />

T. Izumi(Hyogo, Japan), A. Yano(Hyogo, Japan), and M. Arai(Tokyo, Japan)<br />

Extreme High -Speed Laser Cladding (EHLA) is a new process category of laser cladding. In this study, EH-<br />

LA layer was characterized by comparing with conventional laser cladding (LC) layer. Basic SUS316L layers,<br />

as well as WC-reinforced SUS316L layers, were formed on SUS304 substrates using both LC and EHLA<br />

processes. The macroscopic morphology, microstructure, microhardness, wear resistance, and residual<br />

stress of the four types of layers were evaluated. As a result, EHLA layers exhibited slightly higher microhardness<br />

and less wear loss than that of LC layers, despite the presence of more micropores. This can be<br />

due to their finer dendritic structures. Furthermore, residual stress of EHLA layer was lower than that of LC<br />

layer due to those micropores. Additionally, EHLA can add up to 45 wt.% WC into SUS316L layer without<br />

crack formation, resulting in higher wear resistance than that of LC where crack formation occurred at<br />

25 wt.% WC. This enhanced crack resistance in EHLA is believed to be due to the less heat input during<br />

deposition.<br />

1 Introduction<br />

Extreme High-Speed Laser Cladding (EHLA) has been proposed as a new process with high deposition<br />

efficiency [1]. Figure 1 shows a schematic diagram of the principles of conventional Laser Cladding (LC) and<br />

the EHLA process. EHLA enables high-speed deposition by reducing the laser spot size to approximately 1<br />

mm in diameter, thus increasing energy density. Powders are also focused on this small spot and melted<br />

before reaching the substrate surface. Simultaneously, the residual laser energy creates a shallow melt pool<br />

on the substrate surface, enhancing metallurgical bonding. EHLA operates at a velocity of 15–200 m/min and<br />

a deposition efficiency of 0.3–3.2 m²/h, which is 10–100 times greater than that of LC. This high-speed process<br />

significantly reduces heat input to the substrate, thereby minimizing thermal distortion and dilution. These<br />

technical advantages position EHLA as a promising technology for surface treatment applications across<br />

various industrial fields. However, there is limited research investigating the characteristics of EHLA layers<br />

due to its relatively recent introduction, necessitating in-depth investigation. In particular, there are even fewer<br />

reports on EHLA layers reinforced with carbide ceramic powders which are often used to improve the<br />

wear resistance and hardness of the deposition layer [2]. In this study, EHLA layers were characterized in<br />

comparison with LC layers. The basic SUS316L layers, as well as WC-reinforced SUS316L layers, were<br />

formed on SUS304 substrates using both LC and EHLA processes. The macroscopic morphology,<br />

microstructure, microhardness, wear resistance, and residual stress of the four types of layers were evaluated.<br />

2 Experimental procedures<br />

A 10kW diode laser coupled with a conventional lathe and a precision six-axis robot was used to both the<br />

EHLA and LC processes. SUS316L powders were deposited on a SUS304 cylinder whose dimensions are<br />

φ30 × 200 mm. The chemical composition of the powders for LC and EHLA was almost the same, but the<br />

range of particle sizes was different. The powder diameters for LC and EHLA were 53-150 µm and<br />

20-53 µm, respectively.<br />

<strong>DVS</strong> 393 27

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