azu_td_1349475_sip1_... - Arizona Campus Repository

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LIST OF TABLES 8 Table Page 2-1 Microlens design parameters 26 4-1 Speed vs. thickness values for Shipley 1811 photoresist 50 4-2 Etching parameters 54 5-1 Diffraction efficiencies of diffractive lenses from two different samples. 'HMax is the maximum theoretical diffraction efficiency 61 5-2 Diffraction efficiencies for lenses with depth errors 62
ABSTRACT 9 The design, fabrication, and testing of diffractive microlens arrays for use in fiber optic interconnects is presented. Advantages of using diffractive microlenses for fiber interconnects instead of refractive microlenses are discussed. A theoretical discussion of diffractive lens operation including the effects of chromatic aberration on fiber coupling is given, along with equations for mask generation. From these equations, a set of masks to fabricate an array of four phase level diffractive microlenses was produced. Experimental procedures for the fabrication of diffractive microlenses from this mask set are presented. Arrays of binary lenses in photoresist with depth errors of less than 4% were fabricated and test results are given. A novel fiber optic tap utilizing both surface relief microlenses and a volume holographic element is demonstrated. In addition, a fiber array coupler using silicon V-grooves and an array of diffractive lenses is also demonstrated.
Page 1: INFORMATION TO USERS This manuscrip
Page 5 and 6: DIFFRACTIVE MICROLENSES FOR FIBER O
Page 7 and 8: ACKNOWLEDGEMENTS 3 I would like to
Page 9 and 10: 5 Page 4.3 Photoresist Deposition 4
Page 11: 7 Page 4-2 Exposure test results fr
Page 15 and 16: 11 architectures. 3,4 5 8 In all of
Page 17 and 18: 13 microlenses have been presented
Page 19 and 20: 15 element acts as an interface bet
Page 21 and 22: CHAPTER 2 17 LENS PARAMETERS FOR FI
Page 23 and 24: 19 power coupling efficiency, T, be
Page 25 and 26: lens is, 21 NAflber = ^=m^. R R . 2
Page 27 and 28: 2.3 Chromatic Aberration 23 Despite
Page 29 and 30: 25 JL 0.985 0.99 0.995 .005 .015 >r
Page 31 and 32: 27 Propagation Distance (mm) Figure
Page 33 and 34: 29 spherical wave emitted from a po
Page 35 and 36: 31 zones is used, the light from ev
Page 37 and 38: 33 OPD=Jrl+f 2 3 3 The incident pla
Page 39 and 40: 3.3 Multi-level Diffractive Lenses
Page 41 and 42: 37 four level approximation. As the
Page 43 and 44: 39 a) T/N b) t(x) T/N ej2ro|> - I-*
Page 45 and 46: 41 A m = e-^sinci^j^t ij = 0 3.17 a
Page 47 and 48: 43 defining the structure of the le
Page 49 and 50: 45 where n is the index of the subs
Page 51 and 52: 47 B Q B mosiac aligned misaligned
Page 53 and 54: 49 4.3 Photoresist Deposition Shipl
Page 55 and 56: 51 Kfl A) 0 . . t .. .'i'S'l'lTtj
Page 57 and 58: 53 A. Substrate Preparation: 1. Soa
Page 59 and 60: 55 modulation is calculated using E
Page 61 and 62: Figure 4-5 Photographs from a scann
Page 63 and 64:
59 was taken as the distance the kn
Page 65 and 66:
61 SAMPLE 1 t IMAX=40.37% SAMPLE 2
Page 67 and 68:
63 670 nm Laser diode Microlens Arr
Page 69 and 70:
65 1 Experimental data n Ideal Gaus
Page 71 and 72:
67 /OwQ\ xCX /TK X~X Fiber Figure 5
Page 73 and 74:
5.4 Conclusions 69 The design, fabr
Page 75 and 76:
Appendix A: MATLAB PROGRAM
Page 77 and 78:
theta=4*lammm/pi/dmm; z=0:100; dg=d
Page 79 and 80:
75 4" MASK 1" SQUARE CENTER I NOTES
Page 81 and 82:
TWP67 V=2mm H=5mm, 77 TWD671 BL1 AM
Page 83 and 84:
15 J.Jahns and A. Huang, "Planar in
Page 85:
"J.L. Vossen and W. Kem, Thin Film
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