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substrate. 12 High efficiency surface relief diffractive microlens arrays have also been demonstrated. 11 Diffractive microlenses offer greater design flexibility than possible with refractive microlenses because they are computer generated. Diffractive microlenses can thus be designed to form arbitrary wave fronts and can correct for aberrations.' 2 Arrays of diffractive microlenses can also be made on any shape grid, with varied pitch and size, and with fill factors up to 100% which increase source to detector coupling efficiencies. Another advantage of the inherent design flexibility offered by diffractive lenses is the ability to construct nonhomogeneous arrays of elements. 13 Each element on a lens array can be designed differently and perform a different function than its neighbor allowing for greater system flexibility. Advantages offered by diffractive microlenses also stem from their method of fabrication. Diffractive microlenses are fabricated with the same integrated circuit processing techniques used to produce electronic devices. Alignment of microlenses to electronic components may thus be done during fabrication to produce hybrid electro-optical components that are pre-aligned. Diffractive lenses etched directly onto vertical surface emitting lasers, for example, have already been reported. 14 The precision and resolution available from integrated circuit processing techniques may also be employed to realize integrated diffractive elements using double sided wafer technology. 15 An application of microlenses of particular interest in optical interconnects is the coupling of light into, out of, and between arrays of optical fibers. Many demonstrations of fiber interconnects utilizing refractive
13 microlenses have been presented in the literature. In these demonstrations, the microlenses usually have been utilized to couple sources into fibers. 16 Occasionally, microlenses have been instead used to couple light between fibers. Such an example is a 2x2 optical fiber tap array constructed using two microlenses to collimate the output from two fibers. 17 The collimated beams were reflected by a partially transparent mirror to a second set of microlenses which coupled the signal back into another set of fibers. Recently, a single mode fiber array coupler was constructed using a 1x4 array of refractive microlenses.' 8 Holographic microlenses have also been suggested for fiber coupling. 11120 Surface relief diffractive microlenses have also been used for optical fiber interconnects. The most common application again is fiber to source coupling. A recent example of this is a novel laser coupling module which employed a diffractive lens to couple light from a laser diode into a single-mode fiber. 21 The use of the diffractive lens allowed the coupler to be made into a compact, light-weight package. Single diffractive lenses have also been used to couple light between fibers in a pulse delay system. 22 Instead of using only single microlenses for fiber coupling, the design flexibility of diffractive lenses could be used to efficiently couple light between arrays of sources and fibers or between fiber arrays. It has been suggested that the use of fiber arrays is better suited for long distance high density interboard connections than free space interconnects which are more appropriate for localized interconnections. 23 An application of diffractive microlens arrays for such an interconnect scheme is the fiber array tap illustrated in Figure 1-1. This
Page 1: INFORMATION TO USERS This manuscrip
Page 5 and 6: DIFFRACTIVE MICROLENSES FOR FIBER O
Page 7 and 8: ACKNOWLEDGEMENTS 3 I would like to
Page 9 and 10: 5 Page 4.3 Photoresist Deposition 4
Page 11 and 12: 7 Page 4-2 Exposure test results fr
Page 13 and 14: ABSTRACT 9 The design, fabrication,
Page 15: 11 architectures. 3,4 5 8 In all of
Page 19 and 20: 15 element acts as an interface bet
Page 21 and 22: CHAPTER 2 17 LENS PARAMETERS FOR FI
Page 23 and 24: 19 power coupling efficiency, T, be
Page 25 and 26: lens is, 21 NAflber = ^=m^. R R . 2
Page 27 and 28: 2.3 Chromatic Aberration 23 Despite
Page 29 and 30: 25 JL 0.985 0.99 0.995 .005 .015 >r
Page 31 and 32: 27 Propagation Distance (mm) Figure
Page 33 and 34: 29 spherical wave emitted from a po
Page 35 and 36: 31 zones is used, the light from ev
Page 37 and 38: 33 OPD=Jrl+f 2 3 3 The incident pla
Page 39 and 40: 3.3 Multi-level Diffractive Lenses
Page 41 and 42: 37 four level approximation. As the
Page 43 and 44: 39 a) T/N b) t(x) T/N ej2ro|> - I-*
Page 45 and 46: 41 A m = e-^sinci^j^t ij = 0 3.17 a
Page 47 and 48: 43 defining the structure of the le
Page 49 and 50: 45 where n is the index of the subs
Page 51 and 52: 47 B Q B mosiac aligned misaligned
Page 53 and 54: 49 4.3 Photoresist Deposition Shipl
Page 55 and 56: 51 Kfl A) 0 . . t .. .'i'S'l'lTtj
Page 57 and 58: 53 A. Substrate Preparation: 1. Soa
Page 59 and 60: 55 modulation is calculated using E
Page 61 and 62: Figure 4-5 Photographs from a scann
Page 63 and 64: 59 was taken as the distance the kn
Page 65 and 66: 61 SAMPLE 1 t IMAX=40.37% SAMPLE 2
Page 67 and 68:
63 670 nm Laser diode Microlens Arr
Page 69 and 70:
65 1 Experimental data n Ideal Gaus
Page 71 and 72:
67 /OwQ\ xCX /TK X~X Fiber Figure 5
Page 73 and 74:
5.4 Conclusions 69 The design, fabr
Page 75 and 76:
Appendix A: MATLAB PROGRAM
Page 77 and 78:
theta=4*lammm/pi/dmm; z=0:100; dg=d
Page 79 and 80:
75 4" MASK 1" SQUARE CENTER I NOTES
Page 81 and 82:
TWP67 V=2mm H=5mm, 77 TWD671 BL1 AM
Page 83 and 84:
15 J.Jahns and A. Huang, "Planar in
Page 85:
"J.L. Vossen and W. Kem, Thin Film
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