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68 "••r-r-r-r*' -~rr-r~r" "T'rr r 'T : -r~r*r-r-—rr-i-r -r-T": '"T" 'T'T'TT- ••••rT~rv-"•T'T" IT" Trrr : •••'rr-r-r- -•r-r-r-jT v ft v. w y ? -60.0000 "f 90". . ! us 440. us Ch. I = 100.0 rcvolts/div Offset Timebase = 50.0 us/div Delav I.180 volts = 190.000 us Trig-er node : Edge On Neg. Edge on Chanl Trigger Levels Chan I = 1.114 volt s Hoidoff = 70.000 ns Figure 5-7 Output of six beams from 1 x6 lens arrays placed after a fiber array.
5.4 Conclusions 69 The design, fabrication, and testing of diffractive microlens arrays for use in fiber optic interconnects have been presented. The potential advantages of using diffractive microlenses for fiber array couplers have been discussed. The wavelength sensitivity of diffractive lenses and the effect of chromatic aberration on fiber coupling efficiency was calculated. This was found to have a minimal effect at the longer wavelengths which are commonly used in fiber communications systems. Effects of lens size on crosstalk between array elements was also discussed. A theoretical discussion of diffractive lens operation and fabrication was presented. From this discussion, equations for mask generation were derived. A program using these equations was written to fabricate a mask set for a four phase level diffractive microlens. These microlenses were placed in one and two dimensional arrays on the mask. Different alignment marks were also enlisted for registration accuracy between mask levels. Experimental procedures for the fabrication of diffractive microlenses were presented. Experiments were conducted to control photoresist thicknesses and to find optimal exposure times. Etching of soda lime substrates was explored and found to be impractical. More commonly used substrates such as fused silica or quartz are recommended instead. Arrays of binary lenses in photoresist with depth errors of less than 4% were fabricated and tested. An average diffraction efficiency of 39.36% was shown for a set of these lenses. This is very close to the 40.5% maximum diffraction efficiency possible with an ideal binary lens.
Page 1:
INFORMATION TO USERS This manuscrip
Page 5 and 6:
DIFFRACTIVE MICROLENSES FOR FIBER O
Page 7 and 8:
ACKNOWLEDGEMENTS 3 I would like to
Page 9 and 10:
5 Page 4.3 Photoresist Deposition 4
Page 11 and 12:
7 Page 4-2 Exposure test results fr
Page 13 and 14:
ABSTRACT 9 The design, fabrication,
Page 15 and 16:
11 architectures. 3,4 5 8 In all of
Page 17 and 18:
13 microlenses have been presented
Page 19 and 20:
15 element acts as an interface bet
Page 21 and 22: CHAPTER 2 17 LENS PARAMETERS FOR FI
Page 23 and 24: 19 power coupling efficiency, T, be
Page 25 and 26: lens is, 21 NAflber = ^=m^. R R . 2
Page 27 and 28: 2.3 Chromatic Aberration 23 Despite
Page 29 and 30: 25 JL 0.985 0.99 0.995 .005 .015 >r
Page 31 and 32: 27 Propagation Distance (mm) Figure
Page 33 and 34: 29 spherical wave emitted from a po
Page 35 and 36: 31 zones is used, the light from ev
Page 37 and 38: 33 OPD=Jrl+f 2 3 3 The incident pla
Page 39 and 40: 3.3 Multi-level Diffractive Lenses
Page 41 and 42: 37 four level approximation. As the
Page 43 and 44: 39 a) T/N b) t(x) T/N ej2ro|> - I-*
Page 45 and 46: 41 A m = e-^sinci^j^t ij = 0 3.17 a
Page 47 and 48: 43 defining the structure of the le
Page 49 and 50: 45 where n is the index of the subs
Page 51 and 52: 47 B Q B mosiac aligned misaligned
Page 53 and 54: 49 4.3 Photoresist Deposition Shipl
Page 55 and 56: 51 Kfl A) 0 . . t .. .'i'S'l'lTtj
Page 57 and 58: 53 A. Substrate Preparation: 1. Soa
Page 59 and 60: 55 modulation is calculated using E
Page 61 and 62: Figure 4-5 Photographs from a scann
Page 63 and 64: 59 was taken as the distance the kn
Page 65 and 66: 61 SAMPLE 1 t IMAX=40.37% SAMPLE 2
Page 67 and 68: 63 670 nm Laser diode Microlens Arr
Page 69 and 70: 65 1 Experimental data n Ideal Gaus
Page 71: 67 /OwQ\ xCX /TK X~X Fiber Figure 5
Page 75 and 76: Appendix A: MATLAB PROGRAM
Page 77 and 78: theta=4*lammm/pi/dmm; z=0:100; dg=d
Page 79 and 80: 75 4" MASK 1" SQUARE CENTER I NOTES
Page 81 and 82: TWP67 V=2mm H=5mm, 77 TWD671 BL1 AM
Page 83 and 84: 15 J.Jahns and A. Huang, "Planar in
Page 85: "J.L. Vossen and W. Kem, Thin Film
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