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2012 Corporate Social Responsibility Report - UMC

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Water conservation achievements of <strong>2012</strong><br />

Due to the global climate change, <strong>UMC</strong> promoted and<br />

practiced “Energy Efficiency and Carbon Reduction” more<br />

aggressively.Through the activity, we still have much<br />

to improve. Based on 2009, the performance of <strong>2012</strong><br />

reached 300,400 tons due to the measures. The relative<br />

performance of NT7.51 million* 1 , which is equivalent<br />

to 3% of 2009’s water consumption, reached 1% water<br />

conservation. Besides that, <strong>2012</strong> rain recycling reached<br />

23.7 thousand tons.<br />

Photos of improvements:<br />

CuCMP waste water reuse<br />

Sand filter and activity<br />

carbon backwash waste<br />

water reuse<br />

<strong>UMC</strong>’s Water Conservation Result (2008~<strong>2012</strong>)<br />

0.74 0.75<br />

0.71<br />

0.61<br />

0.62<br />

1,913 1,944 2,228 2,327 2,340<br />

<strong>2012</strong> performances under new measures:<br />

Water Conservation Measures<br />

CuCMP waste water reuse<br />

CMP waste water reuse<br />

RO bypass from General acid reclaim system<br />

EPI tool Local scrubber water reuse<br />

Increased the DIR 30% capacity by adding the new<br />

center scrubber supply system<br />

SF/AC backwash waste water reuse<br />

CAROZ-A01~04 acid drain --> reuse to 35% reclaim<br />

system<br />

MAU reuse to industry pit<br />

Polish resin flushing reuse<br />

DIR 50% system brine water reuse<br />

P1 air condition Box condensate reclaim<br />

DIR50 % system before service pumping to waste water<br />

reuse<br />

8CD DI System AC Back wash drain reuse<br />

Reduction pre-rinse water in DIR 30% after regeneration<br />

Acid rinse water quality was over specification which<br />

converted into R-RO reclaim<br />

ACF Backwash recycling<br />

Increased cooling tower conductivity from 1500 to<br />

2000us/cm for water saving<br />

LDI RO brine water reuse<br />

Implementation<br />

Fabs<br />

12A_2<br />

12A_1<br />

8E<br />

8F<br />

12i<br />

12A_2<br />

12A_2<br />

12A_2<br />

12A_2<br />

12A_2<br />

12A_1<br />

12A_2<br />

8CD<br />

12i<br />

8S<br />

12i<br />

6A<br />

12A_2<br />

Although we made efforts during <strong>2012</strong>, water consumption<br />

increased slightly to 12.54 million tons due to operations<br />

from the newly constructed Fab 12A P4&P5 in July, <strong>2012</strong>.<br />

<strong>UMC</strong>'s Water Conservation Result (2008-<strong>2012</strong>)<br />

9.94<br />

9.35<br />

7.58<br />

8.62<br />

8.68<br />

1,030 997 1,146 1,212 1,254<br />

97 年 98 年 99 年 100 年 101 年<br />

City Water Consumption (k-tons/year)<br />

Unit Water Consumption (Liters/wafer-cm 2 )<br />

Total water recycled over past years was 23.56 million<br />

tons, equivalent to conserving 0.75 of Pao-Shan Second<br />

Reservoir’s * 2 water storage capacity.<br />

97 年 98 年 99 年 100 年 101 年<br />

Water Savings (k-tons/year)<br />

Equivalent Pao-Shan Second Reservoir Capacity<br />

Note:<br />

1. Benefits calculated: city water unit price + sewage unit price=25NT/ton<br />

2. Pao-Shan Second Reservoir is the main water supply to the Science Park. The total<br />

water storage capacity is 31.411 million tons (source: Water Storage Capacity <strong>Report</strong> on<br />

January 2013, WRA, MOEA).<br />

Future Water Conservation projects consumption<br />

Implementation<br />

Measures<br />

Fabs<br />

CuCMP waste water system optimal operation<br />

Recycle waste water from acid drain at Sub-fabas<br />

scrubbing water for central scrubber.<br />

Recycle waste water from acid drain at Sub-fabas<br />

scrubbing water for central scrubber.<br />

RO brine water overflow reuse<br />

Single wafer type tool water saving<br />

Track tool discharge reclaim<br />

AHU condenste reclaim<br />

12A_2<br />

Water conservation will face increasing challenges in the<br />

future as fewer areas will be available to further save water.<br />

<strong>UMC</strong> will continue to introduce new technology that can<br />

help save water in a cost-effective way. Based on <strong>2012</strong><br />

year’s city water consumption, <strong>UMC</strong> has set a goal to save<br />

6% more water in the upcoming 3 years.<br />

12i<br />

12i<br />

6A<br />

12A_2<br />

8F<br />

12A_1<br />

<strong>UMC</strong> <strong>2012</strong> <strong>Corporate</strong> <strong>Social</strong> <strong>Responsibility</strong> <strong>Report</strong><br />

P.52

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