2012 Corporate Social Responsibility Report - UMC
2012 Corporate Social Responsibility Report - UMC
2012 Corporate Social Responsibility Report - UMC
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Water conservation achievements of <strong>2012</strong><br />
Due to the global climate change, <strong>UMC</strong> promoted and<br />
practiced “Energy Efficiency and Carbon Reduction” more<br />
aggressively.Through the activity, we still have much<br />
to improve. Based on 2009, the performance of <strong>2012</strong><br />
reached 300,400 tons due to the measures. The relative<br />
performance of NT7.51 million* 1 , which is equivalent<br />
to 3% of 2009’s water consumption, reached 1% water<br />
conservation. Besides that, <strong>2012</strong> rain recycling reached<br />
23.7 thousand tons.<br />
Photos of improvements:<br />
CuCMP waste water reuse<br />
Sand filter and activity<br />
carbon backwash waste<br />
water reuse<br />
<strong>UMC</strong>’s Water Conservation Result (2008~<strong>2012</strong>)<br />
0.74 0.75<br />
0.71<br />
0.61<br />
0.62<br />
1,913 1,944 2,228 2,327 2,340<br />
<strong>2012</strong> performances under new measures:<br />
Water Conservation Measures<br />
CuCMP waste water reuse<br />
CMP waste water reuse<br />
RO bypass from General acid reclaim system<br />
EPI tool Local scrubber water reuse<br />
Increased the DIR 30% capacity by adding the new<br />
center scrubber supply system<br />
SF/AC backwash waste water reuse<br />
CAROZ-A01~04 acid drain --> reuse to 35% reclaim<br />
system<br />
MAU reuse to industry pit<br />
Polish resin flushing reuse<br />
DIR 50% system brine water reuse<br />
P1 air condition Box condensate reclaim<br />
DIR50 % system before service pumping to waste water<br />
reuse<br />
8CD DI System AC Back wash drain reuse<br />
Reduction pre-rinse water in DIR 30% after regeneration<br />
Acid rinse water quality was over specification which<br />
converted into R-RO reclaim<br />
ACF Backwash recycling<br />
Increased cooling tower conductivity from 1500 to<br />
2000us/cm for water saving<br />
LDI RO brine water reuse<br />
Implementation<br />
Fabs<br />
12A_2<br />
12A_1<br />
8E<br />
8F<br />
12i<br />
12A_2<br />
12A_2<br />
12A_2<br />
12A_2<br />
12A_2<br />
12A_1<br />
12A_2<br />
8CD<br />
12i<br />
8S<br />
12i<br />
6A<br />
12A_2<br />
Although we made efforts during <strong>2012</strong>, water consumption<br />
increased slightly to 12.54 million tons due to operations<br />
from the newly constructed Fab 12A P4&P5 in July, <strong>2012</strong>.<br />
<strong>UMC</strong>'s Water Conservation Result (2008-<strong>2012</strong>)<br />
9.94<br />
9.35<br />
7.58<br />
8.62<br />
8.68<br />
1,030 997 1,146 1,212 1,254<br />
97 年 98 年 99 年 100 年 101 年<br />
City Water Consumption (k-tons/year)<br />
Unit Water Consumption (Liters/wafer-cm 2 )<br />
Total water recycled over past years was 23.56 million<br />
tons, equivalent to conserving 0.75 of Pao-Shan Second<br />
Reservoir’s * 2 water storage capacity.<br />
97 年 98 年 99 年 100 年 101 年<br />
Water Savings (k-tons/year)<br />
Equivalent Pao-Shan Second Reservoir Capacity<br />
Note:<br />
1. Benefits calculated: city water unit price + sewage unit price=25NT/ton<br />
2. Pao-Shan Second Reservoir is the main water supply to the Science Park. The total<br />
water storage capacity is 31.411 million tons (source: Water Storage Capacity <strong>Report</strong> on<br />
January 2013, WRA, MOEA).<br />
Future Water Conservation projects consumption<br />
Implementation<br />
Measures<br />
Fabs<br />
CuCMP waste water system optimal operation<br />
Recycle waste water from acid drain at Sub-fabas<br />
scrubbing water for central scrubber.<br />
Recycle waste water from acid drain at Sub-fabas<br />
scrubbing water for central scrubber.<br />
RO brine water overflow reuse<br />
Single wafer type tool water saving<br />
Track tool discharge reclaim<br />
AHU condenste reclaim<br />
12A_2<br />
Water conservation will face increasing challenges in the<br />
future as fewer areas will be available to further save water.<br />
<strong>UMC</strong> will continue to introduce new technology that can<br />
help save water in a cost-effective way. Based on <strong>2012</strong><br />
year’s city water consumption, <strong>UMC</strong> has set a goal to save<br />
6% more water in the upcoming 3 years.<br />
12i<br />
12i<br />
6A<br />
12A_2<br />
8F<br />
12A_1<br />
<strong>UMC</strong> <strong>2012</strong> <strong>Corporate</strong> <strong>Social</strong> <strong>Responsibility</strong> <strong>Report</strong><br />
P.52