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ESD - BiTS Workshop

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Technology review of materials<br />

Technology<br />

<strong>ESD</strong> control<br />

Cleanliness<br />

Heat and<br />

properties<br />

chemical<br />

resistance<br />

Carbon<br />

Unstable<br />

Good<br />

Good<br />

Metal<br />

Unstable<br />

Limited use<br />

Good<br />

Antistatic agent<br />

Limited use<br />

Poor<br />

Poor<br />

Antistatic<br />

Limited use<br />

Limited use<br />

Poor<br />

polymer blend<br />

11/12/2002<br />

<strong>BiTS</strong> 2005<br />

7

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