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ESD - BiTS Workshop

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Leak current analysis<br />

pA<br />

Hi Resistance Meter 4439B<br />

5V<br />

Pin-Probe<br />

Specimen<br />

Insulator<br />

Column number<br />

11/12/2002<br />

3<br />

2<br />

1 2 3<br />

Row number<br />

Schematic of Current analysis<br />

<strong>BiTS</strong> 2005<br />

0.56mm Measurement point<br />

0.8mm<br />

22

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