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ESD - BiTS Workshop

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Conclusion<br />

• The <strong>ESD</strong> control materials having the surface resistivity<br />

at specific levels within a range of 10 6 to 10 11 ohms<br />

were obtained by using the technology.<br />

• The surface resistance fluctuation was very small and<br />

the surface resistance change against applied voltage<br />

was small.<br />

• The suitable surface resistance range of <strong>ESD</strong><br />

protection for socket was estimated in the range of 10 8<br />

to 10 11 ohms from various <strong>ESD</strong> characterization.<br />

11/12/2002<br />

<strong>BiTS</strong> 2005<br />

26

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