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ESD - BiTS Workshop

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Hot spot voltage test<br />

+<br />

Surface electrometer<br />

sample<br />

Hot spot voltage<br />

Charged Plate Monitor<br />

• To search insulative spots on the surface<br />

• To evaluate homogeneity by measuring residual<br />

voltage after discharging.<br />

11/12/2002<br />

<strong>BiTS</strong> 2005<br />

18

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