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ESD - BiTS Workshop

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Peak current analysis<br />

Oscilloscope<br />

Power supply<br />

1000V<br />

sample<br />

+<br />

Charged Plate Monitor<br />

•Generated current on <strong>ESD</strong> provides a serious damage to<br />

devices.<br />

•Magnitude of peak current on <strong>ESD</strong> is estimated by<br />

monitoring wave form during discharging.<br />

11/12/2002<br />

<strong>BiTS</strong> 2005<br />

20

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