ESD - BiTS Workshop
ESD - BiTS Workshop
ESD - BiTS Workshop
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Resistivity Fluctuation<br />
Diameter of guide electrode : 9mm<br />
Applied voltage : 10V, 100V, 500V<br />
GATE<br />
Current measure part<br />
electrode<br />
electrode<br />
64mm<br />
1 2 3<br />
4 5 6<br />
7 8 9<br />
100mm<br />
3mm<br />
<strong>ESD</strong>-STM11.11<br />
9 mm<br />
11/12/2002<br />
<strong>BiTS</strong> 2005<br />
Small type<br />
12
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