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ESD - BiTS Workshop

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Static decay time<br />

1000V electric source + monitor<br />

clip<br />

ground +<br />

sample<br />

SDT measurement using Charged Plate Monitor<br />

Static decay time<br />

•The static decay time from 1000V to 5V was measured<br />

using charged-plate monitor.<br />

11/12/2002<br />

<strong>BiTS</strong> 2005<br />

16

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