12.07.2015 Views

Mitutoyo1001 Catalog.pdf - JW Donchin CO.

Mitutoyo1001 Catalog.pdf - JW Donchin CO.

Mitutoyo1001 Catalog.pdf - JW Donchin CO.

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VMUSERIES 378 — Video Microscope UnitThe VMU is a compact, light-weight, andeasy-to-install microscope unit for CCDcamera monitoring in semiconductorfabrications.FEATURESworking distance objectives and correctionfor the wide range of radiation.the workpiece free from thermal expansioncaused by heat. The fiber-optic illuminatoris required for the light source.revolving nosepiece (objective mount).VMU-VVMU-HVMU-LVMU-L4SPECIFICATIONSMaginification of tube Applicablewavelength 378-505, 378-506378-507 378-513 traviolet radiation378-508 Visible and ultraviolet radiation378-514 Objective(Optional)Reflected illumination stop systemis required.Light source Halogen bulb (21V, 150W)(optional)Mass378-505: 570g378-506: 590g378-507: 980g378-508: 1010g378-513: 1300g378-514: 1300gSelection Guide of System ConfigurationOrder No.(Depends on each systemconfiguration)378-514378-513378-508378-507378-506378-505Vertical CCD camera mount ● ● ● ● ●Horizontal CCD camera mount● ● ● ● ●Fiber-optic illumination unit ● ● ● ●M Plan Apo, M Plan Apo SL, G Plan Apoobjectives for bright field observation▲ ▲ ▲ ▲ ▲ ▲▲ ▲ ▲objectives for laser cuttingM Plan UV objectives for laser machining ▲ ▲●: Provided, ▲: Available as optional accessoryI-34US-1001

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