Advanced CAD System for Electromagnetic MEMS Interactive Analysis

prospect for future impact. In Section 2.2 the interactions with Beckmann Institute at the
University of Illinois was mentioned. The combination of researchers at Beckmann with
interests in MEMS and the computational resources provided through NCSA, offer a very potent
option for the ongoing development of interactive MEMS design using a web-based paradigm
demonstrated in this project. Professor Narayan Aluru, also active in other DARPA programs in
the MEMS area, has expressed interest and willingness to go forward in this area; our Stanford
team has offered to assist him both in obtaining our code and collaborative efforts to move
further in this research direction.
The second aspect of ongoing technology transition for software results from this work involved
the Focus Research Center (FRC) in the area of interconnects, sponsored through MARCO
(including a substantial component of DoD funding) and headed by Professor James Meindl of
the Georgia Institute of Technology. Specifically, the capabilities that have been developed
under this program in terms of the Geodesic prototype are potentially of major use and benefit in
modeling interconnections in VLSI. This includes options for 3D integration of heterogeneous,
mixed technology capabilities as part of interconnect fabrics. Specifically, the ability of
Geodesic to deal with complex geometries that include process and technology dependencies-the
goals related to MEMS--turns out to be nearly ideally suited for the applications in
interconnect domain. Hence, with strong support and encouragement from Professor Meindl, the
Geodesic prototype will be used and further extended under the ongoing MARCO FRC in
interconnects.
There have been several interactions in testing advanced RF MEMS structures that can be
applied to DoD-oriented applications and that have been leveraged by test structure work and
leading edge processing capabilities for MEMS at Stanford. Test device work was carried out in
collaboration with the group headed by Captain Rob Reid (AFRL/Hanscomb). As described in
Section 2.3, these efforts have been curtailed in scope pending new funding sources. There have
also been extensive discussions between Professor Greg Kovacs and staff at Hughes (HRL) to
determine feasibility for developing SOS/CMOS to demonstrate that Stanford photovoltaic
actuation technology that could be integrated with MEMS. The devices have already been shown
to actuate an HRL RF MEMS switch using Stanford microphotovoltaics. Despite the sporadic
nature of both AFRL and HRL interactions there have been very real benefits to both groups
leveraged through this research program.
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