Advanced CAD System for Electromagnetic MEMS Interactive Analysis

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Advanced CAD System for Electromagnetic MEMS Interactive Analysis (Academia) Final Report Contractor: Stanford University Agreement Number: F30602-96-2-0308 Project Number: HJ1500-3221-0599 DARPA Order Number: N-7-0504/AO E117/12 Contract Period: September 13, 1996 – October 31, 2000 Sponsor: Department of the Air Force Technical POC: Robert W. Dutton Report Prepared by: Robert W. Dutton i
Forward This project titled "Advanced CAD System for Electromagnetic MEMS Interactive Analysis (Academia)" was launched in September, 1996 under support from the DARPA Composite CAD program. The title is somewhat misleading in the sense that while certainly electromagnetic effects are an integral part of MEMS devices, the primary emphasis of the work was focused in the area of electrostatically actuated MEMS beams with primary application for radio frequency (RF) switches. The project was concluded at the end of October, 2000. The following report summarizes key technical achievements, in terms of the three major task areas--software, materials characterization and fabrication of application-oriented MEMS. The report also includes sections that elaborate on added technical details on two points of special importance. First, in the area of computational prototyping of MEMS, results of the software environment for prototyping MEMS are discussed, including opportunities for interactive (web-based) design. Second, material is presented on micro-scale fatigue test structures and characterization of potential new materials use in MEMS. Also included in the report are two appendices that list the publications resulting from this contract (Appendix I) and selected copies of papers that might be difficult to find (Appendix II). Finally, it is important to point out that the most detailed summary of materials from university-based research is found in PhD theses. To date this project has supported more than a half-dozen degree candidates; the PhD thesis contributions of Drs. Guido Cornella (MSE), Edward Chan (EE), and Kenneth Honer (EE) can be cited as a key legacy of the Academia project. Ongoing thesis work of Mr. Kenneth Wang, Mr. Nathan Wilson and Ms. Ping Zhang is expected to provide further contributions that add to the knowledge base being created in support of advanced CAD for MEMS. ii
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Page 5 and 6: 3.4.2.3 Process macros ............
Page 7 and 8: 1. Executive Summary Simulation and
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Page 11 and 12: deformation. No relaxation of the p
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Page 15 and 16: 2.5 References [1] Edward Keat Leem
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overlooking the top of the sample f
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Figure 4-5: TEM cross-sectional vie
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Figure 4-8: Stress relaxation of (a
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Figure 4-10: Stress vs. strain curv
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Figure 4-14: Load vs. displacement
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4.2.2 Stress Monitoring Device and
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Figure 4-19: ABAQUS modeling result
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PhD Theses: APPENDIX I - LIST OF PU
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R. W. Dutton, E. K. Chan, N. M. Wil
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APPENDIX II - REPRINTS OF SELECTED
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