Advanced CAD System for Electromagnetic MEMS Interactive Analysis

tradeoffs of computational efficiency for automation were made to enable internet-based
prototyping. After discussing the needs of the typical microsystem developer, an overview of the
system is given. Novel methods are documented which utilize existing tools in a
computationally efficient method to achieve accurate and practical geometry.
Figure 3-1: Typical design loop for a micro-electro-mechanical switch.
3.1.2 Simulation environment system requirements
The architecture of a software system for microsystem design must take into account the needs
and skills of a typical designer. Market research indicates typical MEMS design groups are
small, without individuals who are solely dedicated to computer simulation [10]. Here several
basic assumptions can be made of the typical designer:
• Mechanical/Electrical engineer with a masters or equivalent work experience
• Minimal background in computer simulation
• Desire to utilize new tools which supply useful and timely feedback on new designs
The potential users are then designers who want to use computer simulation to help guide their
development efforts. Under these assumptions, Fig. 3-1 shows a desired iterative design cycle for
a RF switch. In general, a simulation based design system for MEMS devices consists of four
major components:
1. Geometry Definition
2. Discretization (i.e. mesh generation)
3. Simulation (e.g. coupled electro-mechanical)
4. Visualization (e.g. displacements, charges, stress)
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