Advanced CAD System for Electromagnetic MEMS Interactive Analysis

Table of Contents
Forward ...........................................................................................................................................ii
Table of Contents ...........................................................................................................................iii
List of Figures ................................................................................................................................. v
List of Tables................................................................................................................................... v
1. Executive Summary .................................................................................................................... 1
2. Objectives, Approach and Significant Results............................................................................ 2
2.1 Software Development........................................................................................................... 2
2.2 Characterization of MEMS Material Models ....................................................................... 3
2.3 MEMS Device Modeling and Design.................................................................................... 5
2.4 Technology Transition of Results.......................................................................................... 7
2.5 References.............................................................................................................................. 9
3. Software Development............................................................................................................. 10
3.1 A heterogeneous environment for computational prototyping and simulation based design
of MEMS ................................................................................................................................... 10
3.1.1 Introduction ................................................................................................................... 10
3.1.2 Simulation environment system requirements .............................................................. 12
3.1.3 Internet based prototyping of Micro-Electro-Mechanical Systems............................... 13
3.1.3.1 Client-server overview ............................................................................................ 13
3.1.3.2 Client-server architecture ........................................................................................ 14
3.1.4 Geodesic framework...................................................................................................... 16
3.1.4.1 Object repository..................................................................................................... 17
3.1.4.2 Solid modeling module ........................................................................................... 17
3.1.4.3 Level set module .................................................................................................... 18
3.1.4.4 Meshing module...................................................................................................... 18
3.2 Creating geometry for the simulation of Micro-Electro-Mechanical Systems.................... 18
3.2.1 Overview ....................................................................................................................... 18
3.2.2 Previous and current work in geometric simulation for VLSI & MEMS ..................... 19
3.2.3 Surface representation ................................................................................................... 20
3.2.4 Process emulation vs. process simulation...................................................................... 20
3.2.5 Accessibility to algorithms which achieve multiple levels of physical accuracy.......... 20
3.3 Examples.............................................................................................................................. 21
3.3.1 Overview ....................................................................................................................... 21
3.3.2 Example of creating the canonical RF switch test device ............................................. 21
3.3.3 Example of extending Geodesic – Reactive ion etching ............................................... 26
3.3.5 Example using Geodesic level set module: Process simulation.................................... 29
3.3.6 Examples of internet based prototyping ........................................................................ 33
3.4 A solid modeler independent implementation of the Composite CAD Process Definition
Specification .............................................................................................................................. 34
3.4.1 Introduction ................................................................................................................... 34
3.4.2 Discussion of commands............................................................................................... 35
3.4.2.1 Book-keeping .......................................................................................................... 35
3.4.2.2 Miscellaneous.......................................................................................................... 35
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