Advanced CAD System for Electromagnetic MEMS Interactive Analysis

core Init
# the “lset_for” loop runs the level set simulations for a given number of time
# steps.
set verbose 0
lset_for core $numSteps {} $verbose 1 0
# extract a surface, which either represents the top surface of the new
# material in a deposition or the surface of the “air” region Iin the case of an
# etch.
core ExtractFront -out output_pd -closed 0
Fig. 3-10 shows the results of the deposition on a corner, while Fig. 3-11 shows the results of an
isotropic etch with materials of two difference selectivities.
(a) (b) (c)
Figure 3-10: A conformal deposition of unit thickness on a corner. (a) original
corner, (b) corner with deposition, (c) close up of levelset function.
Figure 3-11: Example of a selective corner etch using the integrated 3-D level set
kernel in Geodesic. The figure shows three steps in the evolution of the boundary
surface, where the red surface indicates the level zero function. As can be seen, the
small block on top of the larger block is more resistive to etch.
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