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Etude par Sonde Atomique Tomographique de la formation de nano ...

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tel-00751814, version 1 - 14 Nov 2012<br />

Appendix 2. 3DAP sample pre<strong>par</strong>ation methods<br />

Appendixes<br />

For APT analyses, samples need to be pre<strong>par</strong>ed in the shape of thin needles with circu<strong>la</strong>r<br />

cross section and an end radius smaller than 50 nm.<br />

In the case of bulk/massive materials, matches-shaped samples are cut with a cross-section<br />

of approximately 300×300 μm 2 and submitted to two main electro-chemical polishing<br />

techniques: the “double <strong>la</strong>yer” and “micro-loop” polishing methods [1].<br />

In the case of pow<strong>de</strong>r grains the use of a dual beam scanning electron microscope /<br />

focused ion beam (SEM–FIB) instrument provi<strong>de</strong>s an alternative method for the fabrication of<br />

APT samples [2]. All listed methods are discussed below.<br />

a)“Double <strong>la</strong>yer” method<br />

The principle of pre<strong>par</strong>ation of the tip by this method is shown in Figure 2. The ano<strong>de</strong><br />

(sample) is plugged to a positive potential (~10…18 volts) and p<strong>la</strong>ced into an electrolyte<br />

composed of 25% perchloric and 75% acetic acids floating on an inert solution (Gal<strong>de</strong>n). The<br />

sample should be moved up and down in or<strong>de</strong>r to avoid preferential etching in the area of<br />

"electrolyte-air" interface. After some period of time, a “neck” starts to form in the active <strong>par</strong>t<br />

of the liquid (stage 1).<br />

Stage 1<br />

75 % acetic acid<br />

25% perchloric acid<br />

Gal<strong>de</strong>n<br />

Figure 2. 3DAP tip pre<strong>par</strong>ation by the “double <strong>la</strong>yer” method (from [3]).<br />

When the “neck” is thin and long enough, the sample is p<strong>la</strong>ced in a second electrolyte<br />

composed of 2% of perchloric acid and 98% ethyleneglycol monobutyl ether. A lower tension<br />

of 4…7 volts is then applied, until the neck breaks and the lower <strong>par</strong>t of the match fall down (2<br />

stage). If the lower <strong>par</strong>t of the match is long enough, it can be used to pre<strong>par</strong>e a second tip<br />

using the“micro-loop” method (see below).<br />

Stage 2<br />

2 % of perchloric acid<br />

98 % of ethylene glycol<br />

monobutylic ether<br />

195

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