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Etude par Sonde Atomique Tomographique de la formation de nano ...

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tel-00751814, version 1 - 14 Nov 2012<br />

Chapter 2. Materials, experimental and simu<strong>la</strong>tion techniques<br />

Figure 2.3. Potential energy diagrams for atom (Ua) and ion (Ui) on the surface of a<br />

sample un<strong>de</strong>r an electric field [16].<br />

After the atom is ionized, it flies towards a <strong>de</strong>tector. The chemical nature of the<br />

evaporated ions is then <strong>de</strong>termined by time of flight mass spectrometry. The time of flight is<br />

the time between the electrical (or Laser) pulse that initiate the ionisation and the impact of<br />

the ion into the <strong>de</strong>tector (micro channel p<strong>la</strong>tes and aDLD).<br />

The mass-over-charge ratio, m/n, of ions is then <strong>de</strong>duced from the applied voltage,<br />

Vtotal=Vo+Vp (with Vo and Vp standing and pulse voltages) and the time of flight, t, by using<br />

the energy ba<strong>la</strong>nce re<strong>la</strong>tionship:<br />

m<br />

n<br />

�<br />

2<br />

� t �<br />

2e( V0<br />

�V<br />

) ��<br />

�<br />

� L �<br />

p (2.3.)<br />

where m is the ion mass, n is the ion charge state (1 + , 2 + ...), e is the electron elementary<br />

charge and t and L the flight time and length.<br />

The data collected during an experiment are represented in the form of a mass spectrum,<br />

showing the number of <strong>de</strong>tected ions as a function of their mass-over-charge ratio (given in<br />

atomic mass units, amu). Each peak could be i<strong>de</strong>ntified and associated to the corresponding<br />

element or its isotopes or combination (molecu<strong>la</strong>r ions). The concentration of an element i, in<br />

the analyzed volume is given in atomic percent by:<br />

N<br />

N<br />

i Ci � (2.4.)<br />

t<br />

53

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