Tystar Oxidation & Anneal Furnace Operation - Login | Nanolab, UCLA
Tystar Oxidation & Anneal Furnace Operation - Login | Nanolab, UCLA
Tystar Oxidation & Anneal Furnace Operation - Login | Nanolab, UCLA
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13 After the cantilever is fully loaded, press "Run" followed by desired Recipe #.<br />
UNLOADING:<br />
1 After finishing your run the alarm will sound. Press the Alarm Acknowledge button<br />
and follow steps 1-12 above to unload your samples and return<br />
system to idle mode. Exit Program mode by pressing STATUS button. Fill out the<br />
Log Book completely and make sure the furnace is in the idle mode with Prgm lite<br />
off.<br />
11