Tystar Oxidation & Anneal Furnace Operation - Login | Nanolab, UCLA

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important that opening of the Tube be kept as short as possible to prevent contamination. Use Recipe 0 to Load and Unload your wafers rather than programming this feature into your recipe. 8 VARITM Instead of having a fixed duration time in a step, any step in a recipe can have a variable time (VARITM). This allows the operator to defer the selection (choice) of step time until the recipe is to be run. When programming a recipe, the VARITM switch is used to declare a step as having variable time. When the recipe is run, the TYMGARD will request the fixed time of the VARITM steps. The operator must enter these times before the recipe actually begins the RUN sequence. Varitime will usually be used for an oxidation step. 9 STATUS The STATUS switch is used to place the display in the Status (automatic scan) mode, where the parameters of the recipe step currently in progress will be displayed sequentially. These elements include recipe and step number, time remaining in the recipe, time remaining in the step, and analog setpoint values. The state of the relays is always shown on the LEDs. If TYMGARD is in the Status mode, press the ENTER switch to cause the scan to halt at the present item. Only this item will be displayed, and its value will change as directed by the recipe. Press the ENTER switch repeatedly and the display will "single step" through the status items in the normal scan sequence. Press the STATUS switch again and normal auto scanning will resume. 10 ENTER The ENTER key inputs numerical data. Whenever a numerical value is to be entered, the number is specified by using the numerical keys (1,2,3,4,5,6,7,8,9, or 0), and then input by pressing the ENTER switch. Also, see the STATUS switch operation given above. 11 RUN The RUN button is used (pushed) to begin the execution of a recipe sequence. The display will inquire which recipe is to be run, RECIPE ? One of the twenty-three recipes may be selected by pushing a numbered key (1, 2, 3 through 23) followed by pushing the ENTER switch. This begins the execution of the control sequence. If one or more variable time (VARITM) steps are included in the recipe selected, the recipe sequence starts after the times are entered. The RUN LED illuminates when the RUN switch is pushed and remains lit throughout the recipe, including the abort routine. The RUN LED goes out when the TYMGARD returns to Idle condition. 12 HOLD When the HOLD function is pushed "on," the LED illuminates and the counting of time is halted. The counting of time begins again 6
when the HOLD switch is pressed a second time. While the recipe is on HOLD, it may be edited (see PROGRAM Switch). The HOLD switch has no other functions. The front panel HOLD switch cannot override the external hold input; however, if the front panel HOLD Switch is used in conjunction with external hold, the status display honors the front panel command. 13 PREVIEW The PREVIEW switch provides the function to view the contents of a recipe without the ability to change the recipe. When the TYMGARD is in the Idle mode (no recipe running), PREVIEW may be used to index through a recipe to preview the sequence and setpoints. When the TYMGARD is in the Run mode, the information in the recipe can be viewed without affecting the currently energized steps or the timing of those steps. The LED is illuminated when in the Preview mode. The Preview mode may be exited by pressing PROGRM, STATUS, or the RUN switch. The Preview mode may be exited without disturbing a recipe sequence by pressing the STATUS switch. 14 PROGRAM The PROGRM switch places the TYMGARD into the Edit (program) mode, enabling recipes to be entered or changed. While in the Edit mode, the TYMGARD display will prompt the operator for recipe information. The PROGRAM LED illuminates when this mode is active. The TYMGARD may be set so that a password (code number) must be entered to activate this mode. To exit the Program mode, press the PREVIEW or STATUS Switch. PROGRM and PREVIEW cannot be on at the same time. 15 RAMP The TYMGARD provides for the linear ramping of any analog setpoint. The RAMP switch is used during the programming of setpoint information and is used to denote that the setpoint will change from its previous value to its new value in the amount of time programmed into the step. All ramp steps must have a previous step in order to be programmed. Ramp allows the temperature, for example, to be increased at a fixed rate (usually slower). If a higher temperature is called for without using Ramp, the temperature will be raised as fast as possible (~ 10°C/minute) until the setpoint is reached. 16 UNITS The UNITS switch enables the display to show the engineering units (e.g., typical units for process control) associated with the various gas and temperature setpoints instead of the values of the setpoints normally shown. This feature may be used in the Program and Preview modes and while the display is scanning during recipe execution. Press the UNIT switch a second time to revert the display back to showing setpoint values. 7
Page 1 and 2: Rev 4/14/04 Tystar Oxidation & Anne
Page 3 and 4: stainless steel bench or on dedicat
Page 5: - N2 carrier 000 - N2 4500 - O2 000
Page 9 and 10: displayed again. When the setpoint
Page 11: 13 After the cantilever is fully lo

Tystar Oxidation & Anneal Furnace Operation - Login | Nanolab, UCLA

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