Tystar Oxidation & Anneal Furnace Operation - Login | Nanolab, UCLA

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4.0 PROGRAMMING To enter a recipe into memory, the TYMGARD must be in the Programming mode. Recipe 0 and the twenty-three separate recipes are considered as twenty-four separate program recipes. Most users will be able to input the desired oxidation or anneal time into the desired recipe and use it. For special cases, it may be necessary to program a separate recipe. ALL USER RECIPES MUST BE APPROVED BY LAB MANAGEMENT BEFORE RUNNING THEM. The TYMGARD can be placed in the Programming mode by depressing the PROGRM (Program) Switch followed by a recipe number. There is no code number necessary for our system. The PROGRM LED will illuminate and the first step of the recipe will be shown on the display. Only the recipe selected may be edited or input at this time. For instance, if the TYMGARD is in the Program mode for recipe 2, then only the recipe steps for recipe 2 can be programmed. Once the TYMGARD is in the Program mode, the output information (recipe) can be programmed for each step. The TYMGARD is programmed by setting up each individual step. The next step is followed by the next, one after the other. This step-by-step programming is continued until the entire recipe is complete. The last step of the recipe is programmed as Step 0 to distinguish it as the Abort step, without this step the recipe will not run. There are ten output relay touch switches called the Contact Closure or Event switches along the right side of the control panel (see Fig 1). Each of these switches corresponds to an output relay as labeled on the front panel as previously described. When programming the TYMGARD, the LEDs, which are illuminated, indicate which event relay is to be energized for the step being programmed. The Numerical Entry Keys are used to enter recipe numbers, step numbers, the time interval for each step, and the setpoint values. The numbers for time are keyed into the display as they are spoken, in hours, minutes, and seconds. The ENTER Switch will scroll through the specified setpoint outputs. The existing setpoint value can be left as it is or the value can be changed by entering a new value. The new value can also be ramped during the step if the RAMP Switch is pushed just before entering a value. In the Programming Mode, the beginning of each step is noted by the display as REC.1 STP.01 For Recipe 1, Step 1, the ENTER Switch must be pushed to start the programming of the step shown in the display. Optionally, a different step number can be requested by pushing the appropriate number switches, then pushing the ENTER Switch. (NOTE: To advance to the next step at any time, press "PROGRM" again.) The time for the step will then be displayed. Enter the time. The display will show the setpoints. Pushing the ENTER switch will cause the display to show the next setpoint. After the last setpoint is shown, the first setpoint will be 8
displayed again. When the setpoint is shown on the display, it may be changed by pushing the appropriate number switches. The relay switches may also be pushed to set the relay outputs that are to be "on" during this step. When Step .01 is complete, step .02 can be reached by pressing the "PROGRM" Switch. This programming procedure is repeated until the entire recipe is entered. For the last step, a zero step is programmed to distinguish it as the Abort step with a time of typically 10 seconds. Recipe #s 1-14 are reserved for <strong>Nanolab</strong> standard recipes (Recipe Sheets). They are all oxidation (dry & wet) steps at temperatures of 850, 900, 950, 1000, 1050 and 1100°C respectively. The oxidation time is kept variable for each of these recipes so that a user may simply input this time after choosing the desired recipe and after pressing RUN. These recipes are pre-approved for any user to run. Consult the dry or wet oxidation curves in the log book to determine oxide thickness. Userprogrammed recipes (# 15-23) must be approved by the superuser or lab manager and must be entered in the recipe section of the log book. Recipe 0 sets the TYMGARD outputs for the conditions desired when a recipe is not running (Idle mode). This recipe defines the Idle Mode conditions as previously described. For this example, the process control recipe is recipe number 3. 5.0 TEMPERATURE: Temperature is a key parameter for oxide growth. Temperature should be +/- 2° C of setpoint (preferably +/- 1°C). As long as the AUTO TEMP light is on, the temperature is controlled by the number input through software. If this light is NOT on, the temperature is controlled by the 3 front panel potentiometers and the Temp1/2 switch. With Temp 1, the upper pots control and with Temp 2 the lower pots control the temperature. There are 3 pots for each group, with a 4th pot (extreme leftmost) for overtemp. Do NOT adjust the Overtemp pot. Of the remaining 3, the leftmost is for the front zone, the middle for the center zone and the right for the rear or source zone. An adjustment of 1 on the center zone corresponds to 1 °C while it takes an adjustment of 10 on the end zones to change by 1°C. When the deviation meter for each zone is centered, temperature for that zone is at steady state. The AUTO TEMP mode should always be used so that the preprogrammed recipes control the temperature (the previously discussed front panel potentiometers are not used). In addition to the set temperature, TempC, there are 3 software offsets which must be programmed: TempL (Load or front zone), Offset2 (center zone) and TempS (source or rear zone). TempL offset and TempS offset must be programmed in EACH step of EACH recipe and is an experimentally obtained number. The Offset2 offset must be set during recipe 0 for each temperature (NOT each step or each recipe). Note: If you are running a standard recipe you should not have to adjust any offset but if you are running at a different temperature or your own recipe you must take these offsets into account.. These offsets allow one to compensate for heat loss at the end zones as well as the extra heat added when the torch is on for wet 9
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Page 7: when the HOLD switch is pressed a s
Page 11: 13 After the cantilever is fully lo

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