Key Elements Of Vacuum Chamber Design - Owens Design
Key Elements Of Vacuum Chamber Design - Owens Design
Key Elements Of Vacuum Chamber Design - Owens Design
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More Questions to ask…<br />
How automated will the system need to be? Level of<br />
operator training?<br />
How is the chamber to be loaded in use? Will there<br />
be a loadlock?<br />
Where in the chamber will the process occur? Is it only<br />
in some section of the chamber—under a target say.<br />
This may mean the need for movement/robotics to<br />
transport the substrate. How will the substrate be<br />
located and held? Chuck, platen?<br />
On heavy and large chambers, is a crane needed for<br />
installation?<br />
MKS Confidential 10
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