Key Elements Of Vacuum Chamber Design - Owens Design

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Safety “A vacuum chamber is a pressure vessel waiting to happen.” --Joel Bowers, LLNL & AVS Instructor For many processes, gas is admitted to the chamber. This makes the above statement a possibility. Some steps to take: – Use a burst disk or some other safety device – <strong>Design</strong> to some pressure vessel standard – Use a direct gauge for back filling MKS Confidential 12
Additional Safety Concerns Handling of hazardous gases or materials Electrical service—voltage and current levels may be transferred into to the chamber Personnel safety, especially on large chambers where people enter MKS Confidential 13
Page 2 and 3: Key Elements of Vacuum Chamber Desi
Page 4 and 5: Important Aspects of Vacuum Technol
Page 6 and 7: One of a kind vs. Cookie-Cutter Is
Page 8 and 9: Get Opinions, Input from Many Sourc
Page 10 and 11: More Questions to ask… How autom
Page 14 and 15: Interior of Alcator CMOD with perso
Page 16 and 17: Virtual Leaks Material issues Wel
Page 18 and 19: Specific Material Concerns Chamber
Page 20 and 21: Outgassing Rates, sst Ref: M.H. Hab
Page 22 and 23: Chamber with Necessary O-ring MKS C
Page 24 and 25: Gas Load due to Permeation 1.00E-06
Page 26 and 27: Fabrication Methods Machining from
Page 28 and 29: Chamber from Welded Plate MKS Confi
Page 30 and 31: Electropolished Chamber MKS Confide
Page 32 and 33: Packaging and Shipping Maintain th
Page 34 and 35: Performance and Verification Is som
Page 36 and 37: Putting Chamber into Service Perfo
Page 38 and 39: Upgrades and Expansion Down the Roa
Page 40 and 41: List Details Like Port size and Use
Page 42 and 43: The Specification should now includ
Page 44 and 45: Do’s in Chamber Design Do use go
Page 46: Acknowledgments Thank you for your

Key Elements Of Vacuum Chamber Design - Owens Design

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