Key Elements Of Vacuum Chamber Design - Owens Design
Key Elements Of Vacuum Chamber Design - Owens Design
Key Elements Of Vacuum Chamber Design - Owens Design
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The Specification should now<br />
include:<br />
Material information<br />
Bill of Materials<br />
Dimensions with reasonable tolerances<br />
Fabrication notes and methods<br />
Cleaning requirements<br />
Acceptance/performance verification<br />
Packaging information<br />
Plan for putting chamber into service<br />
MKS Confidential 42
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