Key Elements Of Vacuum Chamber Design - Owens Design

List Details Like Port size and Use
Chamber Ports Listing
1. Port for Turbo Pump (One 10-inch)
a. 10-inch Conflat
2. Port for Load Lock (One-10 or 12-inch)
a. 12-inch Conflat (Maybe only 10-inch).
3. Ports for sputtering sources (Four 8-inch)
a. Configured in “sputter up” orientation.
b. 2 at 180°, 3 at 120° (Dual and Triplet Co focal to allow future co sputtering)
c. Nominal 25° angle with substrate normal.
d. 16-inch distance from flange to substrate center.
e. All 8-inch Conflat
4. Substrate Mechanical Connection (“Touch-Off” Port) (One, 8-inch)
a. 8-inch Conflat.
b. On deposition side of substrate
5. View Ports (One 8-inch, One 4.5-inch, Three 2.75-inch)
a. 8-inch Conflat (View substrate from side).
b. 4.5-inch Conflat (View substrate from bottom).
c. 2.75-inch Conflat (Optical Pyrometer)
i. Located on deposition side of substrate
ii. Near but not normal (allow for particle sequestration).
d. 2.75-inch Conflat (Pair for Transmission Measurement)
i. Collinear pair aligned through center of substrate. Near normal
6. Gauge Ports (Four 2.75-inch)
a. 2.75-inch Conflat. For Ionization Gauge (assess base pressure at highvacuum)
b. 2.75-inch Conflat. For convection-enhance gauge (atmospheric pressure to
10 -4 torr, used for system control)
c. 2.75-inch Conflat. For high-precision capacitance manometer (0.1-100
mtorr, used for depositon process control).
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