11.05.2014 Views

Key Elements Of Vacuum Chamber Design - Owens Design

Key Elements Of Vacuum Chamber Design - Owens Design

Key Elements Of Vacuum Chamber Design - Owens Design

SHOW MORE
SHOW LESS

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

Use and Maintenance<br />

Involve maintenance dept. during set up<br />

Log books for operators and maintenance—<br />

from ‘Day 1’. Log<br />

– Performance when new<br />

– Performance at regular intervals<br />

– Maintenance and upgrades<br />

– Performance after maintenance<br />

! Record/document improvements that should be<br />

incorporated into future builds.<br />

MKS Confidential 37

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!