Key Elements Of Vacuum Chamber Design - Owens Design

Upgrades and Expansion Down
the Road
Process Gurus always want some better
performance later…
Additional instrumentation
– Include additional ports
Pump ports
– Go up a flange size?
Perhaps a modular design approach where
some parts can be reused, or easily modified
Use metal seals up front instead of (initially)
lower cost elastomers sealed
MKS Confidential 38