Key Elements Of Vacuum Chamber Design - Owens Design

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Virtual Leaks Material issues Welding – NO double welds Trapped volumes – O-ring grooves – Screw threads MKS Confidential 16
Materials Process compatibility, requirements <strong>Vacuum</strong> compatibility Fabrication methods available Strength Availability ! Be open minded on use of different alloys or materials MKS Confidential 17
Page 2 and 3: Key Elements of Vacuum Chamber Desi
Page 4 and 5: Important Aspects of Vacuum Technol
Page 6 and 7: One of a kind vs. Cookie-Cutter Is
Page 8 and 9: Get Opinions, Input from Many Sourc
Page 10 and 11: More Questions to ask… How autom
Page 12 and 13: Safety “A vacuum chamber is a pre
Page 14 and 15: Interior of Alcator CMOD with perso
Page 18 and 19: Specific Material Concerns Chamber
Page 20 and 21: Outgassing Rates, sst Ref: M.H. Hab
Page 22 and 23: Chamber with Necessary O-ring MKS C
Page 24 and 25: Gas Load due to Permeation 1.00E-06
Page 26 and 27: Fabrication Methods Machining from
Page 28 and 29: Chamber from Welded Plate MKS Confi
Page 30 and 31: Electropolished Chamber MKS Confide
Page 32 and 33: Packaging and Shipping Maintain th
Page 34 and 35: Performance and Verification Is som
Page 36 and 37: Putting Chamber into Service Perfo
Page 38 and 39: Upgrades and Expansion Down the Roa
Page 40 and 41: List Details Like Port size and Use
Page 42 and 43: The Specification should now includ
Page 44 and 45: Do’s in Chamber Design Do use go
Page 46: Acknowledgments Thank you for your

Key Elements Of Vacuum Chamber Design - Owens Design

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