Key Elements Of Vacuum Chamber Design - Owens Design
Key Elements Of Vacuum Chamber Design - Owens Design
Key Elements Of Vacuum Chamber Design - Owens Design
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Specific Material Concerns<br />
<strong>Chamber</strong><br />
– Outgassing<br />
– Surface finish<br />
– Durabitlity, scratch resistance<br />
– Weight<br />
Seal<br />
– Metal vs. Elastomers<br />
Lubricants<br />
Windows<br />
MKS Confidential 18