Key Elements Of Vacuum Chamber Design - Owens Design
Key Elements Of Vacuum Chamber Design - Owens Design
Key Elements Of Vacuum Chamber Design - Owens Design
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Gas Load due to Permeation<br />
1.00E-06<br />
1.00E-07<br />
Leak Indication, mbar-l/sec<br />
1.00E-08<br />
1.00E-09<br />
1.00E-10<br />
1.00E-11<br />
0:00:00 0:02:00 0:04:00 0:06:00 0:08:00 0:10:00<br />
Time (h : m : sec)<br />
22% comp,Viton,140 C, 3 Oct 08 22% comp, Viton, Room T, 4 Sept 08<br />
MKS Confidential 24
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